The invention relates to a high-sensitivity diaphragm type photoacoustic spectrum sensor based on self-mixing. The high-sensitivity diaphragm type photoacoustic spectrum sensor comprises a sensing
light source, an excitation
light source, a first coupler, a photoacoustic cavity and a
signal processing circuit unit, wherein the sensing
light source and the excitation light source emit
laser which is led into the photoacoustic cavity through an
optical fiber by the first coupler; the photoacoustic cavity comprises a
ceramic bushing and a high-sensitivity diaphragm; the
laser light source emits the
laser to excite gas molecules to generate a photoacoustic
signal and enable the high-sensitivity diaphragm to vibrate; the sensing light source serving as a detection
light signal is incident into the surface of the high-sensitivity diaphragm and then is reflected back to the end face of the
optical fiber; reflected light is output through the
optical fiber into a cavity of the sensing light source to generate a self-mixing photoacoustic spectrum
signal; the self-mixing photoacoustic spectrum signal is processed through the
signal processing circuit unit, so that the vibration frequency and the amplitude of the high-sensitivity diaphragm can be obtained, and the concentration information and the pressure information of the gas can be further obtained. By the adoption of a self-mixing interferential sensing technology, the high-sensitivity diaphragm type photoacoustic spectrum sensor has the advantages that the structure is simple and reliable, and the remote distributed gas detection can be realized.