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20068results about "Refractors" patented technology

Illumination system particularly for microlithography

The invention concerns an illumination system, particularly for microlithography with wavelengths <=193 nm, comprising a light source, a first optical component, a second optical component, an image plane and an exit pupil. The first optical component transforms the light source into a plurality of secondary light sources being imaged by the second optical component in said exit pupil. The first optical component comprises a first optical element having a plurality of first raster elements, which are imaged into said image plane producing a plurality of images being superimposed at least partially on a field in said image plane. The first raster elements deflect incoming ray bundles with first deflection angles, wherein at least two of the first deflection angles are different. The first raster elements are preferably rectangular, wherein the field is a segment of an annulus. To transform the rectangular images of the first raster elements into the segment of the annulus, the second optical component comprises a first field mirror for shaping the field to the segment of the annulus.
Owner:CARL-ZEISS-STIFTUNG TRADING AS CARL ZEISS

LED lighting device

The present invention relates to a lighting device using an LED. One embodiment of the invention provides a lamp-shaped LED lighting device that can replace a known lighting device. The lamp-shaped LED lighting device promptly emits the heat generated by an LED element, which influences the optical output and the lifespan of the LED lighting device, through a lamp-shaped frame with a heat-ventilation structure that facilitates air circulation. In addition, the lamp-shaped LED lighting device prevents glare from an LED light source by using a lateral reflecting member, a diffusion lens and a diffusion cover and diffuses the light from the light source widely without optical attenuation. Another embodiment of the invention provides a tube and panel-shaped LED lighting devices that can be replaced with a previous tube-shaped fluorescent light and a panel-shaped lighting device. The tube and panel-shaped LED lighting devices rapidly emit the heat generated by an LED element, which influences the optical output and the life span of the LED lighting device, through a tube and panel-shaped frame with a heat-sink structure. In addition, the tube and panel-shaped LED lighting devices prevent glare from the LED light source by optically arranging a curved reflecting plate, a diffusion plate and a diffusion window which include a diffusion lens at the upper portion of the LED element. Furthermore the tube and panel-shaped LED lighting devices diffuse the light from the LED light source widely without optical attenuation.
Owner:SOLARKOR
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