The invention discloses a schottky
semiconductor device with an insulating layer isolation structure and particularly discloses a schottky
semiconductor device with a super junction structure and a manufacturing method thereof.
Charge compensation can be formed by second conductive
semiconductor materials located on the lower portions inside the grooves and first conductive
semiconductor materials among the grooves, then the super junction structure is formed; when a
semiconductor device is connected with a certain
reverse bias voltage, a
metal oxide semiconductor (MOS) structure is constructed by the second conductive
semiconductor materials which are doped with
metal or high-concentration impurities and arranged on the upper portions inside the grooves and insulating medium located on the side surfaces of the grooves, and the
pheromone that the barrier height of a
schottky barrier is reduced along with rising of the
reverse bias voltage is reduced; and besides, the
schottky barrier which is capable of forming
semiconductor materials P is formed by
metal located on the upper portions inside the grooves and the second conductive semiconductor materials located on the lower portions inside the grooves, when the
semiconductor device is connected with a forward bias
voltage, the
schottky barrier is in a
reverse bias state, so that forward communication of PN junctions can be effectively restrained, accordingly injection of minority carriers to a drift region is reduced, and a switching characteristic of a device is improved.