The invention belongs to the technical field of
semiconductor packaging, and relates to a binary array
optical fiber coupling structure of a balanced photoelectric
detector and a manufacturing method, and the
coupling structure adopts a lead-
tin welding technology to weld a binary array
optical fiber in a
metal tube shell; the
metal tube shell comprises a
metal sleeve and a metal cavity, and the metal sleeve is embedded in the wall of the metal cavity in a penetrating mode. The binary array
optical fiber comprises two optical fibers, a metal
nickel tube, a sleeve and two optical
fiber connectors, the two optical fibers are jointly fixed in the metal
nickel tube by adopting a gold-
tin welding process, one ends of the two optical fibers are exposed out of the metal
nickel tube, the other ends of the two optical fibers are respectively connected with the optical
fiber connectors, and the sleeve wraps the two optical fibers and is connected with the metal nickel tube; the binary array optical
fiber is fixed in the metal sleeve, and the metalized end of the binary array optical fiber is coaxially aligned with the photosensitive surface of the
chip in the metal cavity; according to the invention, double-
fiber coupling can be realized at one time, and the
coupling process difficulty is reduced; the coupling packaging size can be reduced, and
miniaturization packaging of the photoelectric detection module can be balanced.