Manufacturing method of surface plasma lens

Abstract

The invention provides a manufacturing method of a surface plasma lens. The manufacturing method of the surface plasma lens comprises the steps that a substrate is provided; a metal membrane layer with the certain thickness is formed on the upper surface of the substrate; the upper surface of the metal membrane layer is etched to form a main annular groove; the bottom surface of the main annular groove is etched to form an auxiliary annular groove which is formed in the circumferential direction of the main annular groove, wherein the ring center connecting line of the main annular groove and the auxiliary annular groove is perpendicular to the upper surface of the metal membrane layer, the outer diameter of the main annular groove is larger that that of the auxiliary annular groove, and the bottom end face of the auxiliary annular groove is higher than the lower surface of the metal membrane layer. The manufacturing method solves the problems that in the prior art, for improving efficiency, a surface plasma lens is complex in structure and large in size. The surface plasma lens is simple in structure, small in size and beneficial to small-type integration, and the manufacturing method is simple.

Description

technical field [0001] The invention relates to the field of surface plasmon lenses, in particular to a method for manufacturing a single-ring, centripetal excited surface plasmon lens. Background technique [0002] Most of the current surface plasmon lenses are realized by the ring structure etched on the metal film. When radially polarized incident light irradiates the ring structure, surface plasmons can be excited, and the excited surface plasmons propagate from each point on the ring to the center of the ring, where in-phase interference produces a surface plasmon focus. But in fact, the surface plasmon excited on the ring will not only propagate to the center of the ring, but also propagate to the outside of the ring, and the surface plasmon propagating outside the ring does not contribute to the formation of the surface plasmon focus in the center of the ring, resulting in the surface plasmon lens low efficiency. In order to improve the efficiency, the current pract...

AI Technical Summary

Problems solved by technology

[0003] The technical problem to be solved by the present invention is to provide a method for manufacturing a surface plasmon lens, which solves the problems in the prior art that the surface plasmon lens has a complex structure and a large volume in order to improve efficiency. The surface plasmon lens has a simple structure and is easy to manufacture. The method is simple, the volume is small, and it is convenient for small integration

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