A method of
processing a polycrystalline film on a substrate includes generating a plurality of
laser beam pulses, positioning the film on a support capable of movement in at least one direction, directing the plurality of
laser beam pulses through a
mask to generate patterned
laser beams; each of said beams having a length l′, a width w′ and a spacing between adjacent beams d′, irradiating a region of the film with the patterned beams, said beams having an intensity that is sufficient to melt an irradiated portion of the film to induce
crystallization of the irradiated portion of the film, wherein the film region is irradiated n times; and after
irradiation of each film portion, translating either the film or the
mask, or both, a distance in the x- and y-directions, where the distance of translation in the y-direction is in the range of about 1′ / n-δ, where δ is a value selected to form overlapping the beamlets from the one
irradiation step to the next, and where the distance of translation in the x-direction is selected such that the film is moved a distance of about λ′ after n irradiations, where λ′=w′+d′.