The present invention provides a
processing device which can correct the warping of a workpiece without complicating the structure of the device, and can keep the workpiece on a chuck
workbench reliably. A conveying pad (21) possesses an absorption surface (211) of absorbing and keeping the central part of the workpiece, a pressing part (22) possesses an annular pressing surface (211) with an internal
diameter greater than the external
diameter of the conveying pad (21), and a forwarding and withdrawing part penetrates a hole (231) and a shaft (24) and enables the conveying pad (21) to forward and withdraw along a direction vertical with the absorption surface (211) between a position of the absorption surface (211) protruding towards the pressing surface (221) and the position at which the absorption surface (211) and the pressing surface (221) are located in a same plane. A lifting component (26) enables a keeping mechanism (20) keeping the workpiece to move towards the direction of the chuck
workbench (13), thereby pressing the workpiece against the chuck
workbench (13). Therefore, the forwarding and withdrawing part acts, so that the absorption surface (211) is positioned in the plane same with the pressing surface (221), the warping of the workpiece is corrected, and the chuck workbench (13) keeps the workpiece.