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1027 results about "Standard test" patented technology

Definition of standard test. : a test (as of intelligence, achievement, or personality) whose reliability has been established by obtaining an average score of a significantly large number of individuals for use as a standard of comparison.

Model and parameter selection for optical metrology

A profile model for use in optical metrology of structures in a wafer is selected, the profile model having a set of geometric parameters associated with the dimensions of the structure. A set of optimization parameters is selected for the profile model using one or more input diffraction signals and one or more parameter selection criteria. The selected profile model and the set of optimization parameters are tested against one or more termination criteria. The process of selecting a profile model, selecting a set of optimization parameters, and testing the selected profile model and set of optimization parameters is performed until the one or more termination criteria are met.
Owner:TOKYO ELECTRON US HOLDINGS INC

Method of correcting measurement error and electronic component characteristic measurement apparatus

A high-precision, multi-port compatible, relative correction method and apparatus for correcting measurement errors covering an increase in the number of ports of a non-coaxial electronic component, in which a relative correction adapter 31 is provided that is formed of a two-port network connected to each port of a production test fixture 5B adjacent to a measurement apparatus. The relative correction adapter has a characteristic that modifies the electrical characteristics generated by the production test fixture 5B having an electronic component under test mounted thereon into electrical characteristics generated by a standard test fixture 5A having the electronic component under test mounted thereon. An error factor of the relative correction adapter 31 is identified from a standard test fixture measurement value and a production test fixture measurement value of a correction data acquisition specimen 11B. A production test fixture measurement value of the electronic component under test 11A is corrected with the error factor of the relative correction adapter 31 to thereby obtain the standard test fixture measurement value of the electronic component under test 11A which is assumed to be obtained when the electronic component under test 11A.
Owner:MURATA MFG CO LTD

Optimized model and parameter selection for optical metrology

A profile model for use in optical metrology of structures in a wafer is selected based on a template having one or more parameters including characteristics of process and modeling attributes associated with a structure in a wafer. The process includes performing a profile modeling process to generate a profile model of a wafer structure based on a template having one or more parameters including characteristics of process and modeling attributes. The profile model includes a set of geometric parameters associated with the dimensions of the structure. The generated profile model may further be tested against termination criteria and the one or more parameters modified. The process of performing a modeling process to generate a profile model and testing the generated profile model may be repeated until the termination criteria are met.
Owner:TOKYO ELECTRON US HOLDINGS INC

Fire-barriers for straight-line and intersecting expansion-spaces having male and female coupling-ends

Fire-barriers systems, including pre-assembled intersecting and straight-line fire-barriers having either all male-, all female-, or both types of coupling ends eliminate on-site cutting and construction of barriers required for intersection-spaces and provide easy, rapid, and safe one-step, drop-in installation and coupling. All male / female ended fire-barriers are constructed as single-piece units. All adjacent laid-flat layers are continuously connected having no gaps or folds. Straight-line and L-shaped barriers are certified according to the criteria mandated by both the ASTM E 1399-97 (Reapproved 2005), Standard Test Method for Cyclic Movement and Measuring the Minimum and Maximum Joint Widths of Architectural Joint Systems and the UL 2079 Fire Resistance of Building Joint Systems Test for air leakage (Revised and relocated as 1.14 Mar. 10, 2006).
Owner:INPRO CORP

Edge enhancement of gray level images

A method and apparatus for processing gray level image data. Gray level image data is subjected to plural separate halftone screen processing to form plural separate halftone processed screen gray level image data. The current pixel is also analyzed for contrast index. In response to analysis of the contrast index blending coefficients for processing of the halftone screen modified image data is made. The respective halftone outputs of the screen processings are multiplied by the respective blending coefficient. The resulting blended halftone gray value of the current pixel as well as neighboring pixels are then subjected to a threshold criterion test to determine if this represents a substantially binary image file such as might occur in a saturated text image file. The blended halftone gray value data for the current pixel is subjected to gray level edge enhancement processing to replace certain binary pixels adjacent an edge to reduce anti-aliasing effects. A signal resulting from the threshold criterion test is used to determine whether there is output to the printer or display of an edge enhanced version of the current blended halftone pixel or a pixel value representing the blended halftone pixel.
Owner:MONUMENT PEAK VENTURES LLC

Method and device for automatically generating test case

The invention provides a method and a device for automatically generating a test case. The method comprises the following steps of presetting a standard test case library, wherein the standard test case library comprises test case templates of all check points under a basic functional node and the test case templates comprise parameter variables; extracting a currently required test case template and receiving parameter values input for the corresponding parameter variables by a user; and according to the test case template and the parameter values, generating the test case. According to the invention, the test case can be rapidly and automatically generated and the compiling efficiency of the test case is promoted.
Owner:ALIBABA GRP HLDG LTD

Detection analysis device for technical indexes of numerical control device

The invention discloses a detection analysis device for technical indexes of a numerical control device, belongs to a test device for the numerical control device, and solves the problems that the conventional detection analysis devices for the technical indexes of the numerical control device are not universal for various numerical control devices and the detected and analyzed technical indexes are not comprehensive. The detection analysis device comprises a data interface, a parameter setting module, a data processing module, an analog feedback module, an analysis evaluation module, a display module and a test code library. The data processing module computes the indication data received by the data interface, and the test result is output to the analysis evaluation module and the display module. The parameter setting module sets parameters of the analog feedback module. The test code library provides standard test G codes for each item to be tested. The detection analysis device for the technical indexes of the numerical control device simulates characteristics of actual servo drive, motor and machine tool by using the analog feedback module, computes corresponding feedback data, removes the influence of uncertainty of an actual electromechanical system and inconsistent processing performance of the machine tool, and can accurately and objectively analyze and evaluate each important technical index of the numerical control device.
Owner:HUAZHONG UNIV OF SCI & TECH +1

Fire Resistant Slipsheet

A fire resistant slipsheet in roll form includes a fiber mat having first and second sides and a coating containing expandable graphite, a filler, and a binder. The coating is coated on at least one of the first and second sides of the fiber mat, and a single layer of the slipsheet achieves a Class A rating when tested according to UL 790 and / or ASTM E-108 Standard Test Methods for Fire Tests of Roof Coverings. A fire resistant roofing system and a method for installing a fire resistant roofing system that achieves a Class A rating when tested according to UL 790 and / or ASTM E-108 Standard Test Methods for Fire Tests of Roof Coverings is also provided.
Owner:BMIC LLC

Model and parameter selection for optical metrology

A profile model for use in optical metrology of structures in a wafer is selected, the profile model having a set of geometric parameters associated with the dimensions of the structure. A set of optimization parameters is selected for the profile model using one or more input diffraction signals and one or more parameter selection criteria. The selected profile model and the set of optimization parameters are tested against one or more termination criteria. The process of selecting a profile model, selecting a set of optimization parameters, and testing the selected profile model and set of optimization parameters is performed until the one or more termination criteria are met.
Owner:TOKYO ELECTRON US HOLDINGS INC

Foamed roofing materials and methods of use

Improvements in compositions, composites, and methods for construction of weather resistant and insulated roofs are disclosed. The type of roofs to which these improvements apply are typically known as built up roofs. Built up roofs feature a substrate as an inner layer normally adjacent to and attached to the exterior of an unimproved roof surface. This invention is directed to improved foamed resin substrates used in such roof constructions. Alternating layers of hot asphalt and roofing felt are applied to the foam substrate layer. In prior art roofs, the foamed resin substrates could not withstand the direct application of hot molten asphalt to the foam surface which necessitated use of an isolation layer between the foamed resin layer and the first asphalt layer. This invention discloses compositions, composites, and methods involving direct application of hot asphalt to specially formulated and thermally resistant polyester foam resin substrate layers at temperatures up to 500° F. These improved compositions, composites, and methods not only reduce labor and material costs but also produce roofs that score higher on standard tests used for rating such roofing constructions.
Owner:BP CORP NORTH AMERICA INC

Joint test specimen method using 3D (three-dimensional) printing for making structure surface containing specific geometrical characteristics

ActiveCN104807685AThe sample preparation process is simple and fastOperational securityPreparing sample for investigationEngineeringModel test
The invention provides a joint test specimen method using 3D (three-dimensional) printing for making a structure surface containing specific geometrical characteristics, and belongs to a specimen making method of model test specimens similar to joint rock bodies. According to the method, the structure surface is independently designed according to study requirements, or the actual rock body structure surface appearance is obtained through a surface outline scanning technology; the designed structure surface penetrates through a complete cylinder model in 3D graphics software, two parts of complementary test block models obtained through separation are obtained through Boolean operation, and a 3D printer is used for respectively printing and forming the two parts of test block models; printing molds are respectively put into two specimen making boxes and are assembled, similar materials are cast into the specimen making boxes, and the mold dismounting maintenance is carried out after the materials are solidified and formed; the two parts of test blocks are correctly combined to obtain the standard test specimens containing the designed structure surface. The method has the advantages that (1) the operation of the method is safe, simple and convenient; (2) the complicated and variable structure surface is embedded in the standard test specimens, the actual rock body structural surface can be reproduced through being matched with the surface outline scanning technology, and the reasonable test result is obtained.
Owner:CHINA UNIV OF MINING & TECH

Heat exchanger performance test stand

The invention discloses a heat exchanger performance test-bed, which comprises an air circulation system, an oil circulation system, a water / ethylene glycol circulation system and a compressed air system that are respectively connected with a test piece. The heat exchanger performance test-bed of the invention, on the one hand, simulates the working condition of the tested heat exchanger test piece so as to test whether the heat transfer capacity and the resistance are qualified for the design regulation requirements, on the other hand, by testing the standard test piece, the performance curve data of fins which have different types and specifications is obtained, and the fin performance database is established and enriched, thereby the design can reach a better, higher and more economical level.
Owner:WUXI GUANYUN HEAT EXCHANGER

Item database organization and automatic volume group implementing method and system

An item bank organization and self-composing test paper realization method and system is provided, which mainly comprises the following steps: organizing am item bank; setting format of standard test paper; making composing test paper scheme; selecting test questions manually or randomly; composing test paper automatically; auditing test paper; outputting and printing test paper. The invention finishes organization of input and maintenance from the test questions in the document format to the database through object linking and embedding technology and composes test paper manually and randomly by setting format of standard test paper and composing test paper scheme, and then carries out examination and evaluation, finally outputs and prints paper standard test paper. The system realized by the method is fast and convenient in use, which improves the efficiency of composing test paper, perfects special trade item bank in metallurgy industry, automatically generates test paper fast and conveniently according to the examination requirements, ensures the fairness and justice of examination and saves labors and materials for organizing examination at the same time.
Owner:SHANDONG IRON & STEEL CO LTD

Metallocene-Catalyzed Polyethylene

A metallocene-catalyzed polyethylene resin having a multimodal molecular weight and composition distribution, comprising from 45% by weight to 75% by weight of a low density fraction, said fraction having a density below or equal to 918 g / cm3 as measured following the method of standard test ISO 1183 at a temperature of 23° C.,wherein the density of the polyethylene resin is from 0.920 to 0.945 g / cm3,wherein the Mw / Mn of the polyethylene is of from 2.8 to 6,wherein the melt index MI2 of the polyethylene resin of from 0.1 to 5 g / 10 min measured following the method of standard test ISO 1133 Condition D at a temperature of 190° C. and under a load of 2.16 kg; andwherein the composition distribution breadth index (CDBI) of the polyethylene resin is below 70%, as analyzed by quench TREF (temperature rising elution fractionation) analysis.
Owner:TOTAL RES & TECH FELUY

Photovoltaic EVA film resisting PID

The invention relates to a photovoltaic EVA film resisting PID. The photovoltaic EVA film resisting the PID comprises the following components, by mass fraction, 0.05-5% of cross-linking agents, 0.05-5% of assistant crosslinker agents, 0.2-10% of polyolefin ionomer, 0.1-5% of hydrophobing agents, normal additives and the balance EVA. The photovoltaic EVA film resisting the PID is low in cost and high in performance, has no selectivity on battery pieces, the PID resistance performance is lasting and stable, and the photovoltaic EVA film resisting the PID can pass the PID standard test of IEC, has identical lasting PID resistance performance in a photovoltaic system, thoroughly eradicates the PID problem of components in an EVA level, and meets the demands of current and future component markets.
Owner:CSI SOLAR POWER GROUP CO LTD +2

Test Device for Determining Three-Dimensional Consolidation Properties of Soils

Standard test methods for determining one-dimensional consolidation properties of soils using incremental loading in accordance with ASTM D2435, or AASHTO 216, and of those of other international and organizations, do not accurately predict the values of vertical settlement, coefficients of consolidation in horizontal and vertical directions, and modulus of elasticity in vertical direction, because fixed ring used in these tests do not allow horizontal settlement and dissipation of excess pore-water pressures in horizontal direction, whereas, in field, under application of a vertical load, both horizontal and vertical settlements occur along with dissipation of excess pore-water pressures in both vertical and horizontal directions. To overcome this more than 100 year old problem, the inventor (Dr. Ramesh Chandra Gupta, Ph. D., P.E.) has invented a test device for determining three-dimensional consolidation properties of soils, using a flexible ring which permits development of horizontal and vertical displacements, and dissipation of excess pore-water pressures in both horizontal and vertical directions, along with increased lateral resistance as takes place in field at any depth in a soil deposit when vertical load at the surface is applied.The flexible ring consists of filter fabric around the soil specimen, rubber membrane around the filter fabric, circular segmental metal plates around the membrane and elastomeric rubber bands or spring loaded jacket around the segmental plates, and allows horizontal and vertical displacements, dissipation of pore-water pressures in horizontal and vertical directions to take place with increased lateral resistance with each increment of vertical load like those in the field. Thus new test device simulates field condition to allow accurate determination of three-dimensional consolidation properties of soils (such as settlements, coefficients of consolidation in horizontal and vertical directions, and modulus of elasticity).For this new test device, conventional incremental consolidation frame or triaxial type chamber system either with the triaxial loading system or modified to adapt to incremental consolidation frame, shall be used to perform three-dimensional consolidation tests.
Owner:GUPTA RAMESH CHANDRA

Dynamic and static combined loading rock test machine and test method used for multiphase coupling

The invention discloses a dynamic and static combined loading rock test machine and test method used for multiphase coupling. The machine comprises a visual confining pressure loading chamber module, air pressure control modules, a dynamic loading module and constant volume modules; and the loading chamber of the visual confining pressure loading chamber module is a steel cylinder structure with a square outside and a circular inside, three surfaces of the loading chamber has windows, high borosilicate glass is embedded in every window to realize the visualization of the test process, an opening in one surface of the loading chamber is provided with a rear door which is convenient to replace and take a test piece, and various monitoring devices are arranged in the loading chamber and are led out through sensor lead wires of a baseboard to realize real-time monitoring of all physical-mechanical parameters of the test piece in the test process. The machine has the advantages of small size, simple structure, convenience in dismounting, and realization of accurate, quantitative and visual monitoring of the adsorption-desorption characteristic of a coal rock standard test piece in different load forms and coupling form and the permeability and the damage dilatancy process of gas-containing coal body in different loading stages.
Owner:SHANDONG UNIV

Radio frequency test system for mobile communication terminal

The invention relates to a mobile communication terminal radio frequency testing system, which belongs to the field of mobile communication terminal radio frequency test. The system comprises a comprehensive tester, a frequency spectrum analyzer, a vector signal source, a wideband signal source, a power meter, a direct current source, a temperature control box, a switch control unit and a controller thereof , and a system control platform, wherein the system control platform is connected with the controller of the switch control unit, the temperature control box, the comprehensive tester, the frequency spectrum analyzer, the vector signal source, the wideband signal source, the power meter and the direct current source respectively; and the comprehensive tester, the frequency spectrum analyzer, the vector signal source and the wideband signal source are connected with the switch control unit and a terminal to be tested respectively. The system has the advantages of simple operating flow, clear testing process, quick testing, serious processing on testing result, and good reliability and stability; in addition, the system can quickly and accurately develop a test case meeting self requirement, realize diverse and standard test, also can flexibly extend to the control on other instruments and meters, and realize flexible configuration of the system.
Owner:BEIJING WULONG TELECOM TECH

Method for manufacturing surface crack defect test block for nondestructive flaw detection

The invention discloses a method for manufacturing a surface crack defect test block for nondestructive flaw detection. By using the mechanism of production of surface cracks in the process of welding, the invention provides a method for quickly manufacturing the surface crack defect test block. The method manufactures a commonly used surface weld crack test block through the approaches of adding sulfur elements into a welding seam, reasonably controlling a welding process and the like. The surface cracks manufactured by the method are different from artificial defects of a commonly used flaw detection standard test block, the crack defects are real and practicable, can be applied to nondestructive flaw detection methods of ultrasonic flaw detection, penetrant flaw detection and the like, and are significant for training and evaluation of license changing and obtaining of nondestructive flaw detection personnel, and improving perceptual and rational knowledge of surface crack defect flaw detection signals of the nondestructive flaw detection personnel.
Owner:XI AN JIAOTONG UNIV

Microcontroller built-in type on-line simulation debugging system

The invention provides a microcontroller flush bonding on-line simulation debugging system, comprising a communication port control module, a state control module, a debugging command control module and a hardware breakpoint monitoring trigger module; the modules are collected into a chip through a special debugging command transmitted by a mainboard to control the work of the whole on-line simulation debugging system; complex boundary scan to the inside of the chip through a standard test boundary scan can be finished; the microcontroller chip is controlled according to an outer command to be converted into a debugging mode from a normal mode; a program can be downloaded and numerated from any position in a memorizer of the microcontroller through the debugging communication interface of the mainboard to support the target system single-step debugging and support software breakpoints and hardware breakpoints; the contents of a specific function register, a data memorizer and a program memorizer of the inside of the chip are checked and altered real-time; address bus and data bus are monitored, and the functions of real-time logical tracing, etc. are realized. The invention is of clear and simple structure, high-efficient operating effect and precise real-time monitoring.
Owner:SHANGHAI EASTSOFT MICROELECTRONICS

Fire resistant slipsheet

A fire resistant slipsheet in roll form includes a fiber mat having first and second sides and a coating containing expandable graphite, a filler, and a binder. The coating is coated on at least one of the first and second sides of the fiber mat, and a single layer of the slipsheet achieves a Class A rating when tested according to UL 790 and / or ASTM E-108 Standard Test Methods for Fire Tests of Roof Coverings. A fire resistant roofing system and a method for installing a fire resistant roofing system that achieves a Class A rating when tested according to UL 790 and / or ASTM E-108 Standard Test Methods for Fire Tests of Roof Coverings is also provided.
Owner:BMIC LLC

Soft defect printability simulation and analysis for masks

Masks that include optical proximity correction or phase shifting regions are increasingly being used in the manufacturing process. These masks, either initially or after repair, can have “soft” defects, e.g. phase and / or transmission defects. In accordance with one feature of the invention, soft defect information can be computed from standard test images of a mask. This soft defect information can be used to generate an accurate simulated wafer image, thereby providing valuable defect impact information to a user. Knowing the impact of the soft defect can enable a user to make better decisions regarding the mask. Specifically, a user can now with confidence accept the mask for the desired lithographic process, repair the mask at certain critical locations, or reject the mask, all without exposing a wafer.
Owner:SYNOPSYS INC

Constant-load stress corrosion testing device of small test sample and testing method thereof

The invention relates to a constant-load stress corrosion evaluation method and a constant-load stress corrosion evaluation device of a small test sample. The essentials are as follows: the constant-load stress corrosion testing method and device can be used for testing an anti-stress corrosion cracking property of a thin-wall pipe and a small-size member; the small-size test sample is designed and processed and the level of the loaded stretching stress is accurately controlled; a stress corrosion experiment is carried out in an acidic environment; an anti-sulfide stress corrosion performance and an acting mechanism of the thin-wall pipe and the small-size member in the acidic corrosion environment are evaluated and researched according to an experiment result. With the adoption of the evaluation method and device, the anti-stress corrosion cracking property of the thin-wall pipe and the small-size member, which can not be used for processing a standard test sample, can be determined; the applicability of the material of the member can be obtained according to a testing result, so that the material selection and the applicability evaluation of the thin-wall pipe and the small-size member are carried out.
Owner:SOUTHWEST PETROLEUM UNIV

JTAG (joint test action group) debug method of multi-core processor

The invention provides a JTAG (joint test action group) debug method of a multi-core processor. A multichannel test interface controller is connected between a standard test access port controller and a simulator JTAG debug interface of every processor core. The debug method comprises the following steps that: firstly, a system is electrified, and the functional state machine of the multichannel test access port controller enters the state of test logic reset; secondly, a debug command is sent, and specific TCK (testing clock), TDI (testing data input) and TMS (testing method select) signals are output through the simulator JTAG debug interface, so that state control modules enter states in sequence; thirdly, selective signals are sent, and a control register is configured; fourthly, after one-clock cycle of delay, the information in the control register is loaded to a state register; and fifthly, after finishing the selection of the processor cores, the debug command is sent, and the debug procedure of a single-core processor is carried out. The invention effectively completes the selection and the control of every processor core and the storage and the feedback of debug information, so that the reliability is promoted.
Owner:C SKY MICROSYST CO LTD

Methods and apparatus for risk assessment of developmental disorders during early cognitive development

The nonlinear complexity of EEG signals is believed to reflect the scale-free architecture of the neural networks in the brain. Analysis of the complexity and synchronization of EEG signals as described herein provides a quantitative measure for routine monitoring of functional brain development in infants and young children and provide a useful biomarker for detecting functional abnormalities in the brain before the cognitive, behavioral or social manifestations of these brain developments can be observed and measured by standard tests. One or more machine learning algorithms are used to discover relevant patterns in the complexity and synchronization values determined from the EEG data to facilitate risk assessment and / or diagnosis of developmental disorders in infants and young children by predicting cognitive, behavioral and social outcomes of the measured functional brain activity patterns.
Owner:CHILDRENS MEDICAL CENT CORP

Laser-induced critical parameter analysis of CMOS devices

A technique is described for performing critical parameter analysis (CPA) of a semiconductor device (DUT) by combining the capabilities of conventional automated test equipment (ATE) with a focused optical beam scanning device such as a laser scanning microscope (LSM). The DUT is provided with a fixture such that it can be simultaneously scanned by the LSM or a similar device and exercised by the ATE. The ATE is used to determine pass / fail boundaries of operation of the DUT. Repeatable pass / fail limits (for timing, levels, etc.) are determined utilizing standard test patterns and methodologies. The ATE vector pattern(s) can then be programmed to “loop” the test under a known passing or failing state. When light energy from the LSM scanning beam sufficiently disturbs the DUT to produce a transition (i.e., to push the device outside of its critical parameter limits), this transition is indicated on the displayed image of the DUT, indicating to the user which elements of the DUT were implicated in the transition.
Owner:TWITTER INC

Artificial feed of sesamia inferens walker as well as preparation method and feeding method thereof

The invention relates to an artificial feed of sesamia inferens walker as well as a preparation method and a feeding method thereof, belonging to the technical field of insect feeding. The artificial feed comprises soybean meal, corn meal, wheat germ, yeast powder, casein, cane sugar, honey, fresh wild rice shoots or fresh rice stems, ascorbic acid, cholesterol, choline chloride, Fiske salt, vitamin B complex, vitamin E, sorbic acid, methyl parahydroxybenzoats, 40 percent formaldehyde, 98.18 percent rice ketone, agal-agal and water. A long-term and successive feeding method of the sesamia inferens walker is carried out by adopting a wild rice shoots (young larva) and artificial feed (old larva until pupation). The fed larva of the sesamia inferens walker have development period of 24.8 days, larva survival rate of 76.6 percent, percentage of pupation of 87.7 percent, eclosion rate of 91.3 percent, egg laying amount of 101.9 for single adult and egg hatching rate of 88.8 percent. The invention has the advantages of low cost, practicability, simple preparation, and the like, and is suitable for massive, long-term and successive feeding of standard test sesamia inferens walkers.
Owner:INST OF PLANT PROTECTION CHINESE ACAD OF AGRI SCI

Method for automatically testing optical link in passive optical network

The invention discloses a method for automatically testing an optical link in a passive optical network, and relates to the field of passive optical networks. The method comprises the following steps: setting an optical time domain reflectometry (OTDR) test parameter of the optical link, acquiring and setting a standard OTDR test curve and a standard OTDR curve reference point of the optical link, and establishing a relation of the actual optical link and the standard OTDR curve reference point; acquiring an OTDR test curve of the optical link; comparing the test curve and the standard test curve; checking the state of the optical link, and if an abnormal reference point exists, finding out the abnormal optical link according to the corresponding relation of the reference point and the optical link; and performing 'trunk-branch' fault judgment on the abnormal optical link by using the topological structure of the passive optical network, deleting a mis-reported abnormal branch optical link, finding out a fault point of the optical link according to a new event point on the curve, and reporting the optical link test result. According to the method, artificial participation and judgment during detection of the optical link are avoided; the operation and maintenance efficiency of the passive optical network can be improved; and the operation and maintenance cost is reduced.
Owner:FENGHUO COMM SCI & TECH CO LTD

Phase shifted test pattern for monitoring focus and aberrations in optical projection systems

A method is described for determining lens aberrations using a test reticle and a standard metrology tool. The method provides test patterns, preferably in the form of standard overlay metrology test patterns, that include blazed gratings having orientation and pitch selected to sample desired portions of the lens pupil. The method measures relative shifts in the imaged test patterns using standard metrology tools to provide both magnitude and sign of the aberrations. The metrology tools need not be modified if standard test patterns are used, but can be adapted to obtain additional information. The test reticles may be formed with multiple test patterns having a range of orientations and pitch in order to compute any desired order of lens aberration. Alternatively, single test patterns may be used to determine both the magnitude and sign of lower order lens aberrations, such as defocus or coma.
Owner:GLOBALFOUNDRIES INC
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