The invention discloses industrial chemical mechanical
grinding equipment which structurally comprises a handpiece, a case, an
abrasive spray head, a
drive shaft, a
grinding head mechanism, a protective cover and a rotary table; the rotary table is provided with a
polishing pad;
electrical connection is employed between the handpiece and the case; the upper end of the case is fixedly provided withthe protective cover; the protective cover is provided with the rotary table; the
drive shaft is controlled by the handpiece; the bottom end of the
drive shaft is connected with the
grinding head mechanism; one end of the
abrasive spray head penetrates through the protective cover and is connected to the case, and the other end corresponds to the
polishing pad; the
abrasive spray head is added onthe outer side of the
polishing pad; the inner side of the polishing pad, an inner chute and a center collection hole perform common action, and an abrasive can be embedded into the polishing pad inthe
grinding process and slides downwards into the center collection hole along the slanting surface of the bowl-shaped inner chute; and in the polishing process, the old abrasive is automatically separated from the polishing surface by friction between the polishing pad and a
wafer to enable a new abrasive to be exposed, so that the timely replacement phenomenon of the new and old abrasives is realized,
branch reconstruction of the surface of a polishing disc is reduced, and a thick
glaze layer is prevented from being formed on the surface.