A process which uses a
silicone resin to form a
wafer-to-carrier bonded
package that enables
wafer thinning and backside
processing while the cured resin exhibits high chemical and
thermal resistance. The process is versatile in that the constructed
wafer package allows for a wide range of chemical exposures to include
dilute acid and base etchants,
resist and residue strippers,
electroplating chemistries, and also providing use in a range of deposition and etch processes that may exceed 300° C. The process utilizes a mixture of
silicone monomers that when applied to
semiconductor wafers by a spin-coat application, the result is a planarization of the front side device area, and when a subsequent thin coat is applied will facilitate bonding of the wafer-to-carrier
package when heat and pressure are applied. The cured
silicone bonded wafer-to-carrier package allows for
wafer thinning consistent to industry objectives. Backside
processing may include
thermal oxide deposition, installed vias, and subsequent metallization in plating baths. Upon completion of a thinned and processed wafer, detachment occurs as described in prior art.
Specialty chemical systems which completely dissolves the cured silicone and allows the wafer substrate to be easily rinsed and dried and become available for subsequent
processing or final dicing and packaging.