The invention provides a moving magnetic steel gas-
magnetism combined air-suspension double-workpiece-stage vector circular-arc exchange method and device based on planar
grating measurement and belongs to a
semiconductor manufacturing equipment technology. The device comprises a supporting frame, a balance
mass block, gas-
magnetism combined air-suspension workpiece stages, workpiece stage measurement devices, workpiece stage driving devices and sensor
signal transmission devices, wherein the two workpiece stages work between a measurement position and an
exposure position, the positions of the workpiece stages are measured by adopting a plane
grating, motion compensation is conducted on the balance
mass block by adopting a passive compensation structure consisting of plane leaf springs and electromagnetic dampers, the workpiece stages are driven by adopting
air suspension and planar motors, and the planar motors are adopted to drive the two workpiece stages to achieve quick single-beat arc stage exchange in the double-workpiece-stage exchange process. The problems of large
beat number, long trajectories, multiple start-stop links, long stabilization time and the like of an existing stage exchange scheme are solved, stage exchange links are decreased, the stage
exchange time is shortened, and the productive rate of a photo-
etching machine is improved.