Moving coil magnetic-levitation wireless micro-motion-stage vector circular-arc exchange method and device based on herringbone coil arrangement

Abstract

The invention provides a moving coil magnetic-levitation wireless micro-motion-stage vector circular-arc exchange method and device based on herringbone coil arrangement and belongs to a semiconductor manufacturing equipment technology. The device comprises a supporting frame, a balance mass block, magnetic-levitation workpiece stages, workpiece stage measurement devices and workpiece stage driving devices, wherein the two workpiece stages work between a measurement position and an exposure position, the positions of the workpiece stages are measured by adopting a plane grating, the workpiece stages are driven by magnetic-levitation planar motors, the herringbone coil arrangement is adopted for planar motor active cells, the planar motors are adopted to drive the two workpiece stages to achieve quick single-beat arc stage exchange in the double-workpiece-stage exchange process, and the workpiece stages are powered by wireless signal transmission and charging modules and get rid of constraint of cable stages. The problems of large beat number, long trajectories, multiple start-stop links, long stabilization time and the like of an existing stage exchange scheme are solved, stage exchange links are decreased, the stage exchange time is shortened, and the productive rate of a photo-etching machine is improved.

Description

technical field [0001] The invention belongs to the technical field of semiconductor manufacturing equipment, and mainly relates to a method and a device for a moving coil maglev wireless micro-motion table vector arc return conversion table based on a herringbone coil arrangement. Background technique [0002] Lithography machine is one of the important ultra-precision equipment in the manufacture of very large scale integrated circuits. As the key subsystem of the lithography machine, the workpiece table largely determines the resolution, overlay accuracy and productivity of the lithography machine. [0003] Productivity is one of the main goals of lithography machine development. Under the condition of satisfying the resolution and overlay accuracy, improving the operating efficiency of the workpiece table and thus improving the productivity of the lithography machine is the development direction of the workpiece table technology. The most direct way to improve the oper...

AI Technical Summary

Problems solved by technology

However, the transposition of the workpiece table by rotating the entire base has problems such as large moment of inertia, difficulty in precise positioning of high-power rotary motors, and high heat generation that cause system temperature rise. At the same time, the radius of gyration is large, which significantly increases the structure of the main body of the lithography machine.

Chinese patent CN102495528 adopts a rotary transfer table in the center of the abutment to complete the exchange of double workpiece tables. The table change is divided into three beats, which improves the efficiency of the table change. However, the structure of the rotary transfer table is complicated and the rotary positioning accuracy is low.

The workpiece table moves at a high speed, and the measurement scheme must meet the high-speed measurement and precision requirements. In US patents US6498350B2 and US20100279232A1, multiple laser interferometers are used to measure the position of a workpiece table. The laser interferometer has high measurement accuracy, The working distance is long, but the measurement optical path is too long, it is very sensitive to errors caused by humidity and air turbulence, and the cost is high

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