The invention relates to the technical field of a
semiconductor photoelectronic device, in particular to a novel AlGaN-based
ultraviolet light emitting diode. The novel AlGaN-based
ultraviolet light-emitting
diode comprises a tube body, wherein a
sapphire substrate, a AlN nucleating layer, a non-doped u-type Al<x1>In<y1>Ga<1-x1-y1>N buffer layer, an n-type Al<x2>In<y2>Ga<1-x2-y2>N layer, a Al<x3>In<y3>Ga<1-x3-y3>N / Al<x4>In<y4>Ga<1-x4-y4>N
quantum well active region, a p-type NiO / Al<x5>In<y5>Ga<1-x5-y5>N
superlattice structure
electron blocking layer, a p-type Zn<z1>Mg<z2>Ni<1-z1-z2>O layer and an
indium tin oxide transparent conductive layer are sequentially arranged in the tube body from bottom to top, a p-type ohmic
electrode is led out of the
indium tin oxide transparent conductive layer, and an n-type ohmic
electrode is led out of the n-type Al<x2>In<y2>Ga<1-x2-y2>N layer. In the novel AlGaN-based
ultraviolet light emitting diode, the forbidden bandwidth and the
lattice constant can be independently adjusted by the AlInGaN material, the
crystal quality of an epitaxial layer is effectively improved, the p-type NiO / Al<x5>In<y5>Ga<1-x5-y5>N
superlattice structure has a high
quantum limitation effect on a carrier, the p-type Zn<y2>Mg<y2>Ni<1-y2-y2>O is used for improving the combination efficiency of the carrier in the active region, the
sapphire substrate material on a r surface, an m surface or an a surface is a non-polarity or semi-polarity AlGaN material, the separation of
electron and hole wave functions in a space is reduced, and the
radiation combination efficiency of the carrier is improved.