A semiconductor ultraviolet light source device
An ultraviolet light source and semiconductor technology, applied in semiconductor devices, electrical components, circuits, etc., can solve the problems of high working voltage and low luminous efficiency of ultraviolet LEDs, and achieve the effect of reducing forward working voltage and improving luminous efficiency.
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[0027] The realization idea of the present invention is as follows: the AlInGaN ultraviolet LED contains many heterogeneous interfaces, and at the heterogeneous interfaces, the composition of group III elements undergoes a sudden change, resulting in sudden changes in many materials and physical parameters such as lattice constants, piezoelectric constants, and polarization constants. . Reasonable treatment of the heterointerface is the key to obtaining high-efficiency UV LEDs. First, defects, such as dislocations, should be avoided at the heterointerface. Second, it is necessary to fully consider the polarization phenomenon of the material and configure a reasonable interface polarization charge density. The best way to eliminate or reduce the polarization charge on the heterointerface is to form a heterointerface with a nonpolar or semipolar surface. The present invention finds that in the M-surface Semipolar facets formed on sapphire GaN, AlN, AlGaN and other III-ni...
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