The invention provides a mosaic laminated type XYZ three-dimensional dynamic microdrive device. The mosaic laminated type XYZ three-dimensional dynamic microdrive device comprises a bottom plate, a Y-directional precision compensation unit arranged on the bottom plate, and an X-directional precision compensation unit penetrating through the bottom plate and the Y-directional precision compensationunit from top to bottom, and further comprises a Z-directional precision compensation unit, wherein the Z-directional precision compensation unit is fixedly arranged inside the X-directional precision compensation unit, fixedly arranged on the lower surface of a terminal platform and used for compensating micro displacement of the terminal platform in the Z-axis direction; and the mosaic laminated type XYZ three-dimensional dynamic microdrive device further comprises a reading unit used for reading displacement in the X-axis, Y-axis and Z-axis directions, and an industrial personal computer used for correspondingly controlling the X-directional precision compensation unit, the Y-directional precision compensation unit and the Z-directional precision compensation unit. According to the mosaic laminated type XYZ three-dimensional dynamic microdrive device, a mosaic laminated type structure is adopted, the structure is compact, a framework is simplified, the mounting space is effectivelysaved, motion precision is improved, the functions of three-dimensional collaborative dynamic compensation and dynamic damping are realized, and the precision movement of the terminal platform is ensured.