The invention discloses
plasma vacuum coating equipment with the function of
electrode and workpiece movement and a using method. The equipment comprises moving electrodes, a vacuum air exhausting device, a
plasma vacuum cavity, a workpiece driving moving device, a
plasma discharge source and an air
inlet channel; the plasma
discharge source and the vacuum air exhausting device are arranged on theexterior of the plasma vacuum cavity; and the moving electrodes and the workpiece driving moving device are arranged in the plasma vacuum cavity. The using method of the equipment comprises the following steps that the plasma vacuum cavity is vacuumized, and
coating is conducted on a to-be-coated workpiece. According to the plasma
vacuum coating equipment with the function of
electrode and workpiece movement and the using method, the
coating sedimentation rate and the
coating production efficiency are improved by adopting a plasma-enhanced
chemical vapor deposition method, the coating uniformity and consistency are improved, the protection effects such as water prevention, sweat prevention,
moisture prevention,
corrosion resistance and
solvent resistance of a coating are improved, and theplasma
vacuum coating equipment can be applied to various coating occasions such as PCBs, PCBAs, electronic products, electric appliance parts, electronic semi-products, metals, electronic components, semiconductors,
integrated circuit boards and plastic products.