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397results about How to "Desired performance" patented technology

Exposure apparatus and device manufacturing method

An exposure apparatus in which by filling at least a portion between a projection optical system and a substrate with a liquid and by projecting an image of a pattern onto the substrate via said projection optical system and said liquid, said substrate is exposed, said exposure apparatus includes: a substrate holding member that holds said substrate and keeps liquid so that said substrate is immersed in the liquid; and a liquid supply mechanism that supplies, at a vicinity of the projection area of said projection optical system, liquid onto said substrate from above said substrate.
Owner:NIKON CORP

Optical element and projection exposure apparatus based on use of the optical element

A liquid immersion exposure apparatus includes a projection optical system (PL) which projects an image of a pattern onto a substrate (W) and a unit (5) which supplies a liquid (7) between an optical element (4) at the end of the projection optical system (PL) and the substrate (W). A corrosion-resistant film composed of an oxide is formed on the surface of the optical element (4) to prevent corrosion by the liquid (7). Consequently, a desired performance of the projection optical system can be secured for a long time even where a full field exposure in the step-and-repeat manner or a scanning exposure in the step-and-scan manner is performed in a liquid-immersion state.
Owner:NIKON CORP

Fuel cell

A unit cell of a fuel cell is formed by stacking a membrane electrode assembly between a first metal separator and a second metal separator in a stacking direction. A frame is provided in an outer end of the membrane electrode assembly. A seal member is formed on the frame. The seal member includes a first seal as a fuel gas seal, a second seal as a coolant seal, and a third seal as an oxygen-containing gas seal. The first seal, the second seal, and the third seal are offset from each other in the stacking direction.
Owner:HONDA MOTOR CO LTD

Exposure apparatus, exposure method, and method for producing device

An exposure apparatus includes a substrate stage movable while holding a substrate, a substrate alignment system which detects an alignment mark (1) on the substrate held by the substrate stage and detects a reference mark (PFM) provided on the substrate stage, and a mask alignment system which detects, via a projection optical system, a reference mark (MFM) provided on the substrate stage. The reference mark (PFM) on the substrate stage is detected without a liquid by using the substrate alignment system, and the reference mark (MFM) on the substrate stage is detected using the mask alignment system via the projection optical system and the liquid. Then, a positional relationship between a detection reference position of the substrate alignment system and a projection position of an image of a pattern is obtained, thereby accurately performing alignment processing in the liquid immersion exposure.
Owner:NIKON CORP

Inorganic optical taggant and method of making

Sintered, translucent ceramic microbeads, preferably alumina, titania, zirconia, yttria, zirconium phosphate, or yttrium aluminum garnet (YAG) are doped with one or more optically active species. The beads may be added to substances such as explosives in order to create a distinctive optical signature that identifies a manufacturer, lot number, etc. in the event of the need for forensic analysis. Because the beads have a generally spherical surface, the radius of curvature provides an additional distinguishing characteristic by which a particular sample may be identified. The beads could also be formulated into paints if needed to create distinctive optical signatures for camouflage, decoys, or other countermeasures and could also be applied as a dust to track the movement of personnel, vehicles, etc.
Owner:UT BATTELLE LLC
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