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33results about How to "Avoid recondensation" patented technology

Self-cleaning toilet mirror

The invention discloses a self-cleaning toilet mirror. The self-cleaning toilet mirror comprises a box body. A mirror plane is attached to the front face of the box body, an upper rail groove is formed in the top of the front face of the box body, and a linear motor sliding table is arranged at the bottom of the front face of the box body. A tube groove is formed in the front face of the box body, and an electric heating tube assembly is embedded into the tube groove. A scrubbing assembly comprises a scrubbing assembly support, the top and the bottom of the scrubbing assembly support are connected with a top plate and a bottom plate respectively, and a scrubbing sponge block is fixedly arranged between the top plate and the bottom plate. The plate edge of the top plate is connected with a rotating base, and the rotating base is provided with idler wheels in a rotating mode. The scrubbing assembly vertically stretches over the mirror plane, the idler wheels on the top of the scrubbing assembly support are mounted in the upper rail groove in a rotating mode, and the bottom plate at the bottom of the scrubbing assembly support is fixed on a sliding table body of the linear motor sliding table. The self-cleaning toilet mirror has the excellent advantages of being convenient to use, simple in structure, low in cost and the like.
Owner:安徽省智汇电气技术有限公司

Method for carrying out fluidized drying on lignite by microwaves

The invention discloses a method for carrying out fluidized drying on lignite by microwaves. The method comprises the steps of: pre-drying crude lignite by a microwave device with hot air, and then carrying out fluidized drying on the lignite by a fluidizing bed with hot air so that the free water content in the crude lignite is lower than 1 percent. By utilizing the method disclosed by the invention, large-scale, rapid, low-energy-consumption and deep drying production of lignite can be realized.
Owner:KEDA INDUSTRIAL GROUP CO LTD

Paper drying equipment

The invention discloses paper drying equipment. The equipment comprises a paper tape and a drying device, wherein drying devices are both arranged on an upper side and a lower side of the paper tape; a group of extrusion roller shafts are arranged on a left side of
Owner:ANHUI TECHN COLLEGE OF MECHANICAL & ELECTRICAL ENG

Dry ice cleaning spray nozzle, dry ice cleaner and secondary pollution preventing dry ice cleaning method

PendingCN110369403AAvoid contactSolve the problem of condensation foggingCleaning using gasesPollutantDry ice
The invention discloses a dry ice cleaning spray nozzle, a dry ice cleaner and a secondary pollution preventing dry ice cleaning method. The dry ice cleaning spray nozzle comprises a spray nozzle mainbody, and a gas curtain spray nozzle, wherein the spray nozzle main body is provided with a structure connecting a dry ice conveying tube and a dry ice gas flow injection channel; the gas curtain spray nozzle surrounds the periphery of the spray nozzle main body, and comprises an inner cavity which surrounds the periphery of the spray nozzle main body and a connecting hole which communicates withthe inner cavity, and is connected to a protective gas source through a protective gas tube; and the gas curtain spray nozzle defines a protective gas curtain which surrounds the periphery of dry icejet flow jetted by the spaying nozzle main body. According to the scheme adopted by the invention, the protective gas curtain formed by protective gas is arranged at the periphery of the dry ice jetflow, and a cleaning surface can be effectively isolated from outside air, so that pollutants such as impurities and water vapor are prevented from being in contact with the cleaning surface; and meanwhile, the cleaned surface is swept through the protective gas curtain, so that the cleaned surface can be dried and can be restored to the room temperature, and therefore, the problem that water vapor is condensed and fogged is solved, protection can be performed throughout the process, and the cleaning effect is guaranteed.
Owner:儒众智能科技(苏州)有限公司

Preparation method of Gemini emulsifier used for producing cationic rosin size

The invention discloses a preparation method of a Gemini emulsifier used for producing cationic rosin size. The method comprises the following steps: adding a cationic surface active agent, a non-ionic surface active agent, a molecular weight regulator and an alcohol solvent into a reaction kettle; raising a temperature to 78-97 DEG C; adding a rosin monomer, a hydrophobic group monomer, a hydrophilic group monomer and an initiating agent; performing a heat-preservation reaction for 3-5 hours; when the reaction is completed, adding distilled water to adjusting the solid content to 30%-40%; and performing product discharging to obtain the Gemini emulsifier used for producing cationic rosin size. The invention also provides the Gemini emulsifier prepared by the method. The Gemini emulsifier has a moderate HLB value, and also has good stability, dispersity and emulsifying ability. The Gemini emulsifier can be used to prepare high quality cationic rosin size with fine particles, small bubbles, high whiteness, and good sizability.
Owner:SHANGHAI DONGSHENG NEW MATERIALS

Method for catalytic oxidation degradation of wood chips by novel polyoxometallate

The invention provides a method for catalytic oxidation degradation of wood chips by a novel polyoxometallate composite catalyst. The method comprises the following steps: blending wood chips, the catalyst and a solvent, and catalytically oxidatively degrading wood chips in an oxygen atmosphere, at a certain pressure and at a certain temperature to obtain oxidation products. The catalyst is a polyoxometallate / hydrotalcite composite catalyst containing two active centers: one catalytic active center is one or more acids selected from the group consisting of Keggin-type polyoxometallate phosphotungstic acid, silicotungstic acid, phosphomolybdic acid and silicon molybdenum; and the other catalytic active center is selected from one or more of the Dawson type, the notched Dawson type and the heteroatom-substituted Dawson type polyoxometallates. The reaction products include aromatic aldehyde and ketone compounds. Compared with the prior art, the invention relates to a novel polyoxometallate / hydrotalcite composite catalyst for high-efficiency catalytic oxidation degradation of wood chips to generate aromatic aldehyde and ketone compounds. According to the invention, an organic solvent such as alcohol is selected as a reaction medium; wood chips, a catalyst and a small molecule compound are directly separated by centrifugation; and the extraction process is avoided. The conditions are mild, the operation is simple, and the catalyst is cheap and easily available.
Owner:CHINA UNIV OF PETROLEUM (EAST CHINA)

Metal cleaning agent

The invention belongs to the technical field of metal cleaning agents and particularly relates to a metal cleaning agent. The metal cleaning agent comprises, by weight, 60-80% of sodium orthosilicate, 12-30% of sodium carbonate, 4-10% of triethanolamine, 3-8% of washing assistants, 1-2.5% of fatty alcohol-polyoxyethylene ether and 0.5-1% of defoaming agents. The metal cleaning agent has the good performances of wetting, permeation, emulsification, dispersing and solubilizing, and is good in cleaning effect, free of pollution, short in cleaning time and high in detergency.
Owner:山东龙港硅业科技有限公司

Drying method for food processing machine, and food processing machine

The invention discloses a drying method for a food processing machine and the food processing machine, the food processing machine comprises a crushing cup, a drying assembly, a motor and a crushing blade arranged in the crushing cup and driven by the motor, and the drying method comprises the following steps: a, enabling the interior of the crushing cup to be in a negative pressure state; b, heating gas in the drying assembly to a preset temperature T1 '; and c, making the drying assembly communicate with the smashing cup, so that gas in the drying assembly is sucked into the smashing cup. According to the technical scheme, the machine is dried through hot air circulation, the heated gas can enter the smashing cup, the drying effect is better, and the effects of removing peculiar smells and removing bacteria are achieved.
Owner:JOYOUNG CO LTD

Energy-saving and environment-friendly communication cable deicing device capable of enhancing communication signals

The invention relates to the technical field of communication technologies, and discloses an energy-saving and environment-friendly communication cable deicing device capable of enhancing communication signals; the device comprises a machine body, the inner side of the machine body is rotatably connected with a first driving shaft, and the outer side of a first moving rod is slidably connected with a second moving chamber; first connecting rods are fixedly connected to the left side and the right side of the first moving rod, first rotating blocks are arranged on the left sides of the first connecting rods, second connecting rods are rotatably connected to the lower sides of the first rotating blocks, and knocking hammers are slidably connected to the inner sides of first rail blocks. According to the energy-saving and environment-friendly communication cable deicing device capable of enhancing the communication signals, the first rotating blocks are driven to rotate clockwise under the action of the first moving rod and the first connecting rods, so that a knocking hammer is pushed to move inwards, the knocking hammer knocks the communication cable on the inner side back and forth while rotating, and thus the outer skin of the communication cable is deiced; by means of the structure, the effects of arranging the deicing device and enhancing communication signals are achieved.
Owner:XIANGYANG POWER SUPPLY COMPANY OF STATE GRID HUBEI ELECTRIC POWER +1

Pellet Processing Drum

The present invention relates to a desiccation apparatus, the apparatus comprising: a hollow drum mounted for revolution about a substantially longitudinal axis, the drum comprising a shell having an interior surface and an exterior surface; and a means to generate airflow through the hollow drum.
Owner:PELLETON GLOBAL RENEWABLES LTD

Method for preparing high-concentration emulsion from modified nano titanium dioxide powder

InactiveCN102079798AEasy hard reunionHard reunion noTitanium dioxideHigh concentrationEmulsion
The invention discloses a method for preparing a high-concentration emulsion from modified nano titanium dioxide powder. The adoption of the liquid phase modification avoids grinding, calcining and other processing means which easily cause nano powder to generate hard agglomerates; and the method disclosed by the invention can be used for preparing nano titanium dioxide powder with favorable amphiphilic surfaces only by controlling the addition amount of the acid for modification and the reaction time. The powder can be used for preparing a stable high-concentration emulsion under the action of ultrasonic or stirring; the nano titanium dioxide powder stably exists on the oil-water interface to prevent dispersed oil and water from agglomerating into large liquid drops and causing phase splitting, thereby stabilizing the emulsion; and the prepared emulsion can be stably stored for more than 3 months at room temperature without producing obvious emulsion breaking.
Owner:SHANGHAI NAT ENG RES CENT FORNANOTECH

Novel monitoring and deicing iron tower

The invention discloses a novel monitoring and deicing iron tower. The novel monitoring and deicing iron tower comprises a tower body which is mainly constituted by four main supporting rods and a plurality of cross arms. Each main supporting rod is mainly formed by a plurality of vertical rods which are connected. The two ends of each cross arm are mounted on the connecting position of every twovertical rods on the two corresponding sides correspondingly. The novel monitoring and deicing iron tower further comprises a stress detecting device, a gravity detecting device and a control chamber.The stress detecting device is mounted on the outer side faces of the connecting positions of the vertical rods and the cross arms. The gravity detecting device is mounted between the vertical rods connected in pairs. Retractable heating devices are mounted on the cross arms and the vertical rods correspondingly, and the control chamber is formed in the tower body. A temperature sensor and an icing sensor are mounted on the tower body, and a solar panel is arranged on the tower body. According to the novel monitoring and deicing iron tower, the structural design is ingenious, by arranging theretractable heating devices, the stress detecting device and the gravity detecting device on the tower body, ice covering the iron tower can be effectively removed, and loosening and inclination situations of the connecting positions of the iron tower are effectively monitored to avoid collapse accidents.
Owner:梁雪 +1

Method for controlling refrigerator

A method for controlling a refrigerator according to an embodiment of the present invention is characterized by comprising: a step for determining whether a defrosting period (POD) for defrosting a freezing chamber and a deep freezing chamber has elapsed; a step for, when it is determined that the defrosting period has elapsed, performing a deep cooling operation for bringing at least one among the temperature of the deep freezing chamber and the temperature of the freezing chamber down to a temperature lower than a control temperature; and a step for defrosting the deep freezing chamber when the deep cooling operation is terminated, wherein, when the defrosting of the deep freezing chamber is started, a freezing chamber valve is closed to block cold air flow to a heat sink, the defrosting of the deep freezing chamber includes cold sink defrosting and heat sink defrosting performed after the cold sink defrosting is completed, and while the heat sink defrosting is being performed, a deep freezing chamber fan is driven to remove water vapor generated during the cold sink defrosting.
Owner:LG ELECTRONICS INC

A grinding and dispersing treatment system and method for preparing imitation granite exterior wall paint

The invention relates to a system and method for preparation, grinding and decentralized processing of a simulated granite exterior wall coating. The system comprises a working frame, a grinding frame, a motor, a spindle, an air pump, grinding disk sets and fixed grinding disks, wherein a spindle is installed inside the grinding frame by a bearing; the grinding disk sets are uniformly installed onthe spindle; the fixed grinding disks are uniformly placed inside the grinding frame; a left end of the spindle is connected to an output shaft of the motor; the motor is installed on the working frame; the working frame is installed on the left end of the grinding frame; and the air pump is installed on the bottom end inside the working frame. The system and method provided by the invention havethe beneficial effects that problems like that an existing simulate granite exterior wall solid coating is directly exposed in air during fabrication; the adjacent solid coating can be easily adheredtogether to form cakes; and a worker generally places the solid coating at a screen before bagging and extrudes the coating by an extruding mode, so mesh holes of the screen may be blocked by the solid coating can be solved.
Owner:上海中南建筑材料有限公司

Semiconductor cleaning method and cleaning equipment

The invention provides a semiconductor cleaning method and cleaning equipment, and the method is used for cleaning a semiconductor device, and the method comprises the steps: placing the to-be-cleaned semiconductor device in a cavity of the cleaning equipment for cleaning treatment, the cleaning treatment comprising a cleaning fluid cleaning step and a drying step, and at least in the drying step, introducing heated protective gas into the cavity. The embodiment of the invention has the advantages that the heated protective gas can reduce the humidity of the chamber and increase the temperature of the surface of the semiconductor device, so that suspended matters in the chamber are prevented from re-condensing on the surface of the semiconductor device, particulate matters cannot be attached to the surface of the semiconductor device, and the influence on the semiconductor device is avoided.
Owner:YANGTZE MEMORY TECH CO LTD

Ammonia evaporation and buffering integrated device

The invention relates to an ammonia evaporation and buffering integrated device comprising a tank body, a liquid ammonia evaporator and an ammonia buffer which are mutually connected and arranged in the tank body, the liquid ammonia evaporator is connected with a liquid ammonia pipeline, the liquid ammonia pipeline is provided with a liquid ammonia input interface which is positioned outside the tank body, the ammonia buffer is connected with an ammonia pipeline, and the ammonia pipeline is provided with an ammonia output interface which is positioned outside the tank body. The device has simple overall structure, small occupied space and convenient installation, the liquid ammonia evaporator and the ammonia buffer can be simultaneously ensured to be in the appropriate temperature environment by controlling the temperature of the tank body, thereby avoiding the re-condensation of ammonia in the ammonia buffer caused by temperature change.
Owner:中化环境大气治理股份有限公司

A track deicing device

The invention discloses a track deicing device. The track deicing device comprises a rack installed on a track inspection car, and one or more combined deicing units used for deicing steel rails of tracks are installed on the rack. Each combined deicing unit comprises a mechanical crushing type deicing assembly, a sweeping type deicing assembly and a heat source deicing assembly, wherein the mechanical crushing type deicing assembly, the sweeping type deicing assembly and a heat source outlet of the heat source deicing assembly are installed on the rack in sequence in the advancing direction of the track inspection car. The track deicing device has the advantages of being free of damage to the surfaces of the steel rails, high in deicing efficiency, small in energy consumption, reasonable in structural design, low in manufacturing cost, broad in application prospect and the like.
Owner:CENT SOUTH UNIV

A self-cleaning vanity mirror

The invention discloses a self-cleaning toilet mirror. The self-cleaning toilet mirror comprises a box body. A mirror plane is attached to the front face of the box body, an upper rail groove is formed in the top of the front face of the box body, and a linear motor sliding table is arranged at the bottom of the front face of the box body. A tube groove is formed in the front face of the box body, and an electric heating tube assembly is embedded into the tube groove. A scrubbing assembly comprises a scrubbing assembly support, the top and the bottom of the scrubbing assembly support are connected with a top plate and a bottom plate respectively, and a scrubbing sponge block is fixedly arranged between the top plate and the bottom plate. The plate edge of the top plate is connected with a rotating base, and the rotating base is provided with idler wheels in a rotating mode. The scrubbing assembly vertically stretches over the mirror plane, the idler wheels on the top of the scrubbing assembly support are mounted in the upper rail groove in a rotating mode, and the bottom plate at the bottom of the scrubbing assembly support is fixed on a sliding table body of the linear motor sliding table. The self-cleaning toilet mirror has the excellent advantages of being convenient to use, simple in structure, low in cost and the like.
Owner:安徽省智汇电气技术有限公司

Cumulate molecular beam source for organic thin film

The invention relates the molecular beam source used to cumulate organic film, which can form homogeneous film on the surface of large scale basement film without producing deposition or segregation at the opening of film forming material. The valve 33 is installed in the space from molecule heating part 12 to molecule deactivation opening 14, and the heater 18 and 19 are installed on the side of the molecule deactivation opening 14. On the side of the molecule deactivation opening 14 there is outer guiding element 13, and in the outer guiding element 13 there is inner guiding element 16. Between the outer guiding element and inner guiding element there is molecule deactivation channel 17, whose diameter increases along the deactivation direction. The heater 18 and 19 are installed on outer guiding element 13 and inner guiding element 16, and the heater 20 is installed on molecule deactivation opening 14.
Owner:CHOSHU IND

Vaporization device for thin film deposition

The vaporization device of the present invention may comprise: a sprayer that mixes a source injected through a source injection port and a carrier gas injected through a carrier gas injection port, and sprays the mixed gas; a vaporizing part having first and second vaporizing spaces for vaporizing the mixed gas ejected from the atomizer, and discharging the vaporized gas as a process gas through an outlet; and the heating part is used for keeping the mixed gas in the vaporization part at a preset temperature. The heating unit may include: a first heating unit arranged to surround the first vaporization space so as to maintain the temperature of the mixed gas in the first vaporization space; and a second heating part which is arranged together with the first heating part so as to surround the second vaporization space and maintain the temperature of the mixed gas in the second vaporization space.
Owner:MI

Metal organic chemical vapor deposition apparatus and deposition method

A metal organic chemical vapor deposition apparatus comprising a source ampule, a liquid micro-pump, a vaporizer equipped with a solvent supply means, and a reactor. A reactant dissolved in a solvent in the source ampule is transferred to the vaporizer by the liquid micro-pump. A sufficient amount of the solvent is additionally fed to the vaporizer by the solvent supply means, concurrently with the transfer, and vaporized along with the reactants. After being vaporized in the vaporizer, the reactant is injected to the reactor by carrier gas and deposited on a semiconductor substrate to form a high dielectric thin film. By virtue of the additional supplied solvent, the recondensation of the reactant in the vaporizer, can be prevented in the vaporizer and in the transfer line between the vaporizer and the reactor. In addition, the residues of the reactant can be washed off by providing the solvent through the supply means to the vaporizer.
Owner:HYUNDAI ELECTRONICS IND CO LTD

motorcycle frame rack

The invention discloses a placement rack for a motorcycle frame. The placement rack comprises a heating layer, a high-temperature resistant insulation medium layer and a photoelectric layer. The heating layer comprises a heat transfer layer and resistance heating bodies. Multiple water drainage blocks are arranged on the lower surface of the heat transfer layer. The bottoms of the water drainage blocks are equipped with multiple through holes. Water absorbing cotton is arranged between every two resistance heating bodies. Movable cavities are arranged in the high-temperature resistant insulation medium layer. The lower parts of the movable cavities are provided with a venturi tube. A fan is arranged in the venturi tube. The end part of a high-temperature resistant insulation medium is provided with a motor used for turning on and off the fan. Multiple heat exchange tubes are arranged on the venturi tube. Air inlet holes are arranged uniformly in the high-temperature resistant insulation medium layer between the water absorbent cotton and the resistance heating bodies. The heat exchange tubes communicate with the air inlet holes corresponding to the heat exchange tubes. Compared with the prior art, heat is generated by the resistance heating bodies arranged on the high-temperature resistant insulation medium and transferred to the heat transfer layer. The heat transfer layer isused for preserving heat of the frame. Therefore, ice is prevented from forming the inside of a pipeline of the frame.
Owner:重庆荣爵摩托车有限公司

A kind of velvet crape myrtle high grafting seedling raising method

The invention belongs to the technical field of tree vegetative propagation methods, and specifically relates to a method for raising seedlings by high grafting of velvet crape myrtle. The method comprises the following steps: selecting and cultivating rootstock seedlings: selecting 25-year-old seedling crape myrtle trees as rootstocks; velvet crape myrtle The scion is grafted to the crape myrtle tree, and the cultivation base is selected; the selection and collection of the scion: the developing branches of the velvet crape myrtle sapling are selected as cuttings, and 2-3 buds are reserved for each cutting; the upper joint is flat, 1.3cm away from the terminal bud, and the lower joint is It is flat, below the internodes or below the buds to facilitate healing; the present invention is mainly used to provide a method for raising seedlings by high grafting of velvet crape myrtle. Compared with the prior art, the method for raising seedlings by high grafting of velvet crape myrtle of the present invention not only has simple conditions, The operation is easy, the reproduction cost is low, and it can also significantly increase the success rate of grafting, reduce the incidence of powdery mildew, and obviously improve the quality of grafted seedlings.
Owner:ANQING NORMAL UNIV

Drying method for food processing machine and food processing machine

The invention discloses that the invention provides a drying method for a food processor and a food processor. The food processor includes a crushing cup, a drying assembly, a motor, and a For the pulverizing blade driven by the motor, the drying method includes: step a: keeping the inside of the pulverizing cup in a negative pressure state; step b: heating the gas inside the drying component to a preset temperature T1'; step c: The drying component is connected with the crushing cup, so that the gas inside the drying component is sucked into the crushing cup. This technical solution dries the machine through hot air circulation, and the heated gas can enter the crushing cup for drying. The drying effect is better, and the effect of eliminating peculiar smell and degerming is realized.
Owner:JOYOUNG CO LTD

A kind of cationic rosin rubber emulsifier and preparation method thereof

The invention discloses a preparation method of a cationic rosin latex emulsifier, which comprises the following steps: Step 1, using a cationic monomer to prepare a cationic monomer solution; Step 2, preparing a monomer solution; Step 3, preparing an initiator solution; Step 4 , adding the surfactant to the reaction kettle, then adding deionized water, and heating up; step five, adding cationic monomer solution, monomer solution and initiator solution at one time; step six, distilling deionized water, adjusting the solid content to 35 % that is cationic rosin latex emulsifier. The invention adopts static aqueous solution polymerization, the production process is simple, the production efficiency is high, and it can be compounded with non-ionic surfactant to produce strong surface activity, adsorbed on the interface to form a complex, oriented and closely arranged, and form a high-strength interface film to prevent droplets Or re-condensed small solid particles.
Owner:SHANGHAI CHANGFA NEW MATERIAL CO LTD

Cumulate molecular beam source for organic thin film

A molecular beam source for stacking organic thin films capable of forming a uniform thin film on the film-forming surface of a large-sized substrate without causing deposition or separation of film-forming materials at openings where molecules of the film-forming materials are released, wherein the valve 33 is provided in the space from the molecular heating part 12 to the molecule releasing opening 14 for releasing the molecules of the generated film forming material to the film forming surface. In addition, heaters 18 and 19 are provided at the molecule releasing opening 14 side for heating the molecules of the film-forming material to be released. An outer guide 13 with conical guide walls and an inner guide 16 with conical guide walls are arranged at the sides of the molecule release opening 14 , which are arranged in said outer guide. Between the outer guide 13 and the inner guide 16, a molecule release channel 17 is formed, the diameter of which gradually increases along the direction of molecule release. Heaters 18 and 19 are provided on the outer guide 13 and the inner guide 16, respectively, and besides these, a heater 20 is provided through the molecule release opening 14, whereby narrowing and / or clogging hardly occur at the release opening. .
Owner:CHOSHU IND

A novel polyoxometalate catalyzed oxidation degradation method for wood chips

The invention provides a method for catalytic oxidation degradation of wood chips by a novel polyoxometallate composite catalyst. The method comprises the following steps: blending wood chips, the catalyst and a solvent, and catalytically oxidatively degrading wood chips in an oxygen atmosphere, at a certain pressure and at a certain temperature to obtain oxidation products. The catalyst is a polyoxometallate / hydrotalcite composite catalyst containing two active centers: one catalytic active center is one or more acids selected from the group consisting of Keggin-type polyoxometallate phosphotungstic acid, silicotungstic acid, phosphomolybdic acid and silicon molybdenum; and the other catalytic active center is selected from one or more of the Dawson type, the notched Dawson type and the heteroatom-substituted Dawson type polyoxometallates. The reaction products include aromatic aldehyde and ketone compounds. Compared with the prior art, the invention relates to a novel polyoxometallate / hydrotalcite composite catalyst for high-efficiency catalytic oxidation degradation of wood chips to generate aromatic aldehyde and ketone compounds. According to the invention, an organic solvent such as alcohol is selected as a reaction medium; wood chips, a catalyst and a small molecule compound are directly separated by centrifugation; and the extraction process is avoided. The conditions are mild, the operation is simple, and the catalyst is cheap and easily available.
Owner:CHINA UNIV OF PETROLEUM (EAST CHINA)

Vaporizing apparatus for thin film deposition

A vaporizing apparatus for thin film deposition is provided. The vaporizing apparatus includes an atomizer configured to mix a source injected through a source inlet and a carrier gas injected through a carrier gas inlet and spray a mixed gas, a vaporizing unit including a first vaporization area and a second vaporization area, which are configured to vaporize the mixed gas sprayed from the atomizer, and configured to discharge a vaporized gas as a process gas through an outlet, and a heating unit configured to maintain the mixed gas in the vaporizing unit at a fixed temperature. The heating unit includes a first heating part arranged to surround the first vaporization area and configured to maintain the temperature of the mixed gas in the first vaporization area and a second heating part arranged to enclose the second vaporization area with the first heating part and configured to maintain the temperature of the mixed gas in the second vaporizing space.
Owner:MI
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