Cumulate molecular beam source for organic thin film

Abstract

A molecular beam source for stacking organic thin films capable of forming a uniform thin film on the film-forming surface of a large-sized substrate without causing deposition or separation of film-forming materials at openings where molecules of the film-forming materials are released, wherein the valve 33 is provided in the space from the molecular heating part 12 to the molecule releasing opening 14 for releasing the molecules of the generated film forming material to the film forming surface. In addition, heaters 18 and 19 are provided at the molecule releasing opening 14 side for heating the molecules of the film-forming material to be released. An outer guide 13 with conical guide walls and an inner guide 16 with conical guide walls are arranged at the sides of the molecule release opening 14 , which are arranged in said outer guide. Between the outer guide 13 and the inner guide 16, a molecule release channel 17 is formed, the diameter of which gradually increases along the direction of molecule release. Heaters 18 and 19 are provided on the outer guide 13 and the inner guide 16, respectively, and besides these, a heater 20 is provided through the molecule release opening 14, whereby narrowing and / or clogging hardly occur at the release opening. .

Description

technical field [0001] The present invention relates to a molecular beam source for accumulation of organic thin films for heating a material to be formed in thin film form on the surface of a solid object or substance such as a substrate, etc., thereby melting and evaporating the thin film forming material; i.e. Generating evaporated molecules to grow thin films on the surface of solid objects, more particularly, it relates to a molecular beam source for the deposition of thin films of organic materials suitable for use in the deposition of thin films of organic materials on substrates such as A thin film of a solid object such as a solid object forms a surface. Background technique [0002] In recent years, attention has been paid to organic thin film devices, for example, organic electroluminescence (ie, EL) and / or organic semiconductors as typical or representative members thereof. For such thin film elements, the organic material is heated in a vacuum to spray vapor on...

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Problems solved by technology

[0005] In addition, as another defect of the evaporation means related to the film-forming material, a bad result is also pointed out; that is, since the organic film-forming material can generate vapor under the environment of high evaporation pressure and low temperature, as long as the material is put into the crucible and Placing it in a vacuum can unintentionally or unexpectedly generate vapors of the film-forming material, thereby contaminating the substrate

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