The present invention provides a method for manufacturing an electronic part that can cope with downsizing, improvement in performance and quality of a multilayer electronic part. A
ceramic green sheet is produced by forming on a substrate or on a layer formed on a substrate an internal
electrode having a predetermined thickness by a discretional process, forming a photosensitive
ceramic slurry on a surface of the substrate or the layer and the internal
electrode in such a way that its thickness just before
exposure will be substantially equal to or smaller than the thickness of the internal
electrode from the surface of the substrate or the layer, irradiating the photosensitive
ceramic slurry with light from the upper side of the substrate to perform
exposure while masking the internal electrode pattern, to selectively harden the surface of the photosensitive ceramic
slurry, the
exposure amount being controlled in such a way that the surface of the photosensitive ceramic slurry is hardened, and removing the portion of the photosensitive ceramic slurry that has not been exposed by a development process to
expose a surface of the internal electrode pattern.