The invention relates to a filter of tunable terahertz
metamaterial and a preparation method thereof based on low-
voltage-driven
liquid crystal material with the aim of solving problems of an existing filter of tunable terahertz
metamaterial such as fixed working
wavelength, limited working bandwidth, narrow application scope, complicated structure and preparation technology and low reliability. The filter is in the structure of a multi-layer flat plate and comprises a glass substrate layer, a first
metal structure layer, an
insulation layer, a
metal seed layer, a second
metal structure layer,
liquid crystal material and a
glass cover plate. The preparation method comprises following steps: first, preparation of metal structure
layers; second, preparation of the
insulation layer; third, preparation of the metal seed layer; fourth, preparation of a mould structure used for
electroplating; fifth, preparation of a periodic slit-metal structure; sixth, filling of
liquid crystal material and covering with the
glass cover plate. The filter of tunable terahertz
metamaterial and the preparation method thereof based on low-
voltage-driven liquid
crystal material have following beneficial effects: the filter is low in needed
voltage, simple in structure, wide in tuning range, high in response speed and good in
chemical stability and is not sensitive to polarization; and the method is suitable for preparation of filter of tunable terahertz metamaterial filter of tunable terahertz metamaterial.