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Filter of tunable terahertz metamaterial and preparation method thereof based on low-voltage-driven liquid crystal material

A liquid crystal material and filter technology, which is applied in the field of tunable terahertz metamaterial filter and its preparation, can solve the problems of complex structure and preparation process, fixed working wavelength, limited working bandwidth, etc., and achieves simple structure and narrow working bandwidth. , the effect of small width

Inactive Publication Date: 2016-10-12
HARBIN UNIV OF SCI & TECH
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  • Application Information

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Problems solved by technology

[0007] In order to solve the problems of fixed working wavelength, limited working bandwidth, narrow application range, complex structure and preparation process, low reliability and high preparation cost of the existing terahertz metamaterial filter, the present invention proposes a low-voltage drive based Tunable terahertz metamaterial filter of liquid crystal material and preparation method thereof

Method used

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  • Filter of tunable terahertz metamaterial and preparation method thereof based on low-voltage-driven liquid crystal material
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  • Filter of tunable terahertz metamaterial and preparation method thereof based on low-voltage-driven liquid crystal material

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specific Embodiment approach 1

[0040] Specific implementation mode one: combine Figure 1~4 , Figure 6 and Figure 7 Describe this embodiment mode. This embodiment mode is a tunable terahertz metamaterial filter based on low-voltage driving liquid crystal material. The filter is multi-layer flat, including a glass substrate layer 1, a first metal structure layer 2, an insulating layer 3. Metal seed layer 4, second metal structure layer 5, liquid crystal material 6 and glass cover plate 7;

[0041] The first metal structure layer 2 is arranged on the upper surface of the glass substrate layer 1, and the first metal structure layer 2 is composed of cylindrical metal 2-1 arranged in a rectangular array and strip-shaped metal 2-1 connected to the cylindrical metal 2-1. 2 composition;

[0042] The insulating layer 3 is arranged in the area surrounded by the cylindrical metal 2-1 and the strip-shaped metal 2-2, and the upper surface of the strip-shaped metal 2-2; the upper surface of the insulating layer 3 is...

specific Embodiment approach 2

[0054] Specific implementation mode two: combination figure 2 Describe this embodiment mode. The difference between this embodiment mode and specific embodiment mode 1 is: the cylindrical metal 2-1 and the elongated metal 2-2 are Ni, Cr, Al, Ag, Au or Cu, and the cylindrical metal 2 -1 and the elongated metal 2-2 have a height of 0.2 to 1 μm. Other steps and parameters are the same as those in the first embodiment.

specific Embodiment approach 3

[0055] Specific implementation mode three: combination image 3 Describe this embodiment mode, the difference between this embodiment mode and the specific embodiment mode 1 or 2 is: the insulating layer 3 is made of silicon dioxide, silicon nitride, aluminum oxide, photoresist, polyimide, benzocyclobutene or polydimethylacrylamide. Other steps and parameters are the same as one of the specific embodiments 1 to 4.

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Abstract

The invention relates to a filter of tunable terahertz metamaterial and a preparation method thereof based on low-voltage-driven liquid crystal material with the aim of solving problems of an existing filter of tunable terahertz metamaterial such as fixed working wavelength, limited working bandwidth, narrow application scope, complicated structure and preparation technology and low reliability. The filter is in the structure of a multi-layer flat plate and comprises a glass substrate layer, a first metal structure layer, an insulation layer, a metal seed layer, a second metal structure layer, liquid crystal material and a glass cover plate. The preparation method comprises following steps: first, preparation of metal structure layers; second, preparation of the insulation layer; third, preparation of the metal seed layer; fourth, preparation of a mould structure used for electroplating; fifth, preparation of a periodic slit-metal structure; sixth, filling of liquid crystal material and covering with the glass cover plate. The filter of tunable terahertz metamaterial and the preparation method thereof based on low-voltage-driven liquid crystal material have following beneficial effects: the filter is low in needed voltage, simple in structure, wide in tuning range, high in response speed and good in chemical stability and is not sensitive to polarization; and the method is suitable for preparation of filter of tunable terahertz metamaterial filter of tunable terahertz metamaterial.

Description

technical field [0001] The invention relates to a tunable terahertz metamaterial filter based on low-voltage driving liquid crystal material and its preparation method Background technique [0002] Metamaterial is an artificial electromagnetic material composed of periodically arranged sub-wavelength structural units. Its electromagnetic properties depend on the shape, size and arrangement of structural units. By rationally designing structural units, the propagation of electromagnetic waves can be effectively controlled to achieve Extraordinary electromagnetic properties that are not found in natural materials, such as negative refraction, electromagnetic cloaking, and optical transformation. At present, with the deepening of metamaterial research, its working frequency has been extended from the initial microwave band to the terahertz wave and visible light region. Terahertz (Terahertz) wave refers to the electromagnetic spectrum with a frequency of 0.1-10THz, which is in...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02F1/13G02F1/1343
CPCG02F1/1313
Inventor 贺训军石爽杨兴宇李少鹏吴丰民姜久兴
Owner HARBIN UNIV OF SCI & TECH
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