Terahertz metamaterial biosensing chip and testing method thereof
A biosensing and testing method technology, applied in the field of terahertz metamaterials, can solve the problems of difficult processing, low sensitivity, and high production cost, and achieve the effects of improving sensing sensitivity, simple structural design, and improving uniformity
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Embodiment 1
[0040] A substrate 1, and a subwavelength metal resonant ring array attached to the substrate 1;
[0041] Wherein, the substrate 1 has an absorption coefficient of less than 0.5 cm in the terahertz wave band. -1The sub-wavelength metal resonator ring array includes at least 4 resonator ring units 2, each of the resonator ring units 2 is a square metal frame as a whole, and a Openings of the same size 3.
[0042] Specifically, the period of the sub-wavelength metal resonant ring array is 50um.
[0043] Specifically, the line width of the metal frame of the resonant ring unit 2 is 2um.
[0044] Specifically, the distance between every two resonant ring units 2 in the sub-wavelength metal resonant ring array is 2um.
[0045] Specifically, the size of the opening 3 in the resonance ring unit 2 is 1 um.
Embodiment 2
[0047] A substrate 1, and a subwavelength metal resonant ring array attached to the substrate 1;
[0048] Wherein, the substrate 1 has an absorption coefficient of less than 0.5 cm in the terahertz wave band. -1 The sub-wavelength metal resonator ring array includes at least 4 resonator ring units 2, each of the resonator ring units 2 is a square metal frame as a whole, and a Openings of the same size 3.
[0049] Specifically, the period of the sub-wavelength metal resonant ring array is 70um.
[0050] Specifically, the line width of the metal frame of the resonant ring unit 2 is 7um.
[0051] Specifically, the distance between every two resonant ring units 2 in the sub-wavelength metal resonant ring array is 7um.
[0052] Specifically, the size of the opening 3 in the resonance ring unit 2 is 2um.
Embodiment 3
[0054] A substrate 1, and a subwavelength metal resonant ring array attached to the substrate 1;
[0055] Wherein, the substrate 1 has an absorption coefficient of less than 0.5 cm in the terahertz wave band. -1 The sub-wavelength metal resonator ring array includes at least 4 resonator ring units 2, each of the resonator ring units 2 is a square metal frame as a whole, and a Openings of the same size 3.
[0056] Specifically, the period of the sub-wavelength metal resonant ring array is 100 um.
[0057] Specifically, the line width of the metal frame of the resonant ring unit 2 is 10um.
[0058] Specifically, the distance between every two resonant ring units 2 in the sub-wavelength metal resonant ring array is 10 um.
[0059] Specifically, the size of the opening 3 in the resonance ring unit 2 is 4um.
[0060] Wherein, the sub-wavelength metal resonator ring array period is: the distance between each side of each sub-wavelength metal resonator ring unit (corresponding up...
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