The invention discloses a surface incidence
graphene photoelectric
detector based on one-dimensional optical
grating. The surface incidence
graphene photoelectric
detector based on the one-dimensional optical
grating comprises a
silicon-on-insulator (SOI) substrate, the one-dimensional optical
grating, a
graphene layer (8), a first interdigital
electrode (4) and a second interdigital
electrode (5), wherein the
SOI substrate sequentially includes
silicon, a
buried oxide layer and top layer
silicon from bottom to top; the top layer silicon is etched to form the one-dimensional optical grating, and the one-dimensional optical grating is formed by alternate distribution of a plurality of
silicon dioxide strips (6) and a plurality of silicon strips (7) and used for modulating the space distribution of an
optical field which acts with the graphene layer; the graphene layer (8) is formed on the one-dimensional optical grating and serves as an
active layer to act with the surrounding
optical field to generate an
electron hole pair; the first interdigital
electrode (4) and the second interdigital electrode (5) are formed on the graphene layer (8), the first interdigital electrode (4) and the second interdigital electrode (5) are both in contact with graphene so as to form a built-in
electric field on a contact surface, and the built-in
electric field is used for effectively collecting
photon-generated carriers to form light current. By means of the surface incidence graphene photoelectric
detector based on the one-dimensional optical grating, the
optical field of incident light around the graphene is modulated through a grating structure, and thereby, high response degree and
high bandwidth of
infrared detection can be achieved.