The invention relates to a
multiple stress concentrated type MEMS bionic
hydrophone, and solves the problems including that a present MEMS bionic
hydrophone can only measure vector information of a
sound field, is relatively low in flexibility and
frequency response bandwidth and is fuzzy in port and starboard. The
hydrophone comprises a bottom
silicon layer, an
oxide layer and a top
silicon layer, four
tetra-beam
cilium type acoustoelectric transduction structures are distributed in the top
silicon layer uniformly, the bottom of each
tetra-beam
cilium type acoustoelectric transduction structure includes a cavity, each of the two ends of each
cantilever beam is provided with a
settling tank and an internally shrunk gap, the four cavities are distributed uniformly on the
oxide layer, the top silicon layer is sputtered with upper electrodes at positions facing the cavities respectively, the bottom silicon layer is sputtered with lower electrodes at positions facing the cavities respectively, and each upper
electrode is surrounded by four oil filling holes which are distributed in the top silicon layer uniformly. The hydrophone of the invention is simple in structure, greatly widens the
effective frequency band range, provides convenience for installation and test by monolithic integration, improves the installation precision, uses a single sensor to realize a
sensor array in small size, and overcomes the problem that different hydrophones in a traditional array are inconsistent.