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34 results about "Atomic force acoustic microscopy" patented technology

Atomic force acoustic microscopy (AFAM) is a type of scanning probe microscopy (SPM). It is a combination of acoustics and atomic force microscopy. The principal difference between AFAM and other forms of SPM is the addition of a transducer at the bottom of the sample which induces longitudinal out-of-plane vibrations in the specimen. These vibrations are sensed by a cantilever and tip called a probe. The figure shown here is the clear schematic of AFAM principle here B is the magnified version of the tip and sample placed on the transducer and tip having some optical coating generally gold coating to reflect the laser light on to the photodiode.

Measurement head for atomic force microscopy and other applications

An improvement for atomic force microscopes, more generally for light beam detecting systems, but also in part applicable to scanning probe microscopes, providing significant novel features and advantages. Particular features include using different objective lens regions for incident and reflected light, a flexure that allows three dimensional motion of the optics block, forming the housing and optics block of a composite material or ceramic, arranging the components so that the beam never hits a flat surface at normal incidence, and providing a resonant frequency of cantilever vibration greater than 850 HZ between the cantilever and sample and the cantilever and focusing lens.
Owner:RGT UNIV OF CALIFORNIA

Methods and systems for analyzing a specimen using atomic force microscopy profiling in combination with an optical technique

A system that includes an optical subsystem and an atomic force microscope probe is provided. The optical subsystem is configured to generate positional information about a location on a surface of the specimen. The system is configured to position the probe proximate the location based on the positional information. One method includes generating positional information about a location on a surface of a specimen with an optical subsystem. The method also includes positioning an atomic force microscopy probe proximate the location based on the positional information. Another system includes an optical subsystem configured to measure overlay of a wafer using scatterometry. The system also includes an atomic force microscope configured to measure a characteristic of a feature on the wafer. An additional method includes measuring overlay of a wafer using scatterometry. The method also includes measuring a characteristic of a feature on the wafer using atomic force microscopy.
Owner:KLA TENCOR CORP

Force tracing method for atomic force microscope (AFM)

ActiveCN102662087AAvoid the impact of dynamic process studiesScanning probe microscopyAtomic force microscopyData acquisition
The invention discloses a force tracing method for an atomic force microscope (AFM), which relates to the technical field of micro force measurement methods and solves the problem that force signals obtained by the traditional AFM single molecule force spectrum method are easily regarded as signals generated by motions of an AFM probe but not signals generated in a dynamic process on cell surfaces. The force tracing method for the AFM comprises the following steps of: after needle feed is finished under the control of a feedback regulation system, closing the feedback regulation system, and determining a position of the AFM probe in a Z direction when the AFM probe is contacted with the surface of a tested object through an obtained force-distance curve; gradually approaching the AFM probe to the surface of the tested object, and when the AFM probe is just contacted with the surface of the tested object, closing the feedback regulation system and stopping feeding the probe to ensure that a cantilever is deflected immediately; and acquiring a relation of the deflection of the cantilever along with time by utilizing a data acquisition card. According to the force tracing method, influences of the motions in the Z direction of the AFM probe driven by a piezoelectric ceramic scanner on dynamic process researches of the surface of the tested object are avoided.
Owner:CHANGCHUN INST OF APPLIED CHEMISTRY - CHINESE ACAD OF SCI

Single particle or single molecule tracking device and method based on atomic force microscope

The invention relates to a single particle or single molecule tracking device and method based on an atomic force microscope. The tracking method comprises the following steps that before tracking measurement of a single particle or a single molecule is conducted, the point of a probe of the atomic force microscope is trimmed with a detection object; in the process of tracking measurement, the probe of the atomic force microscope makes contact with the surface of a detected object with constant force; when the detection object and the detected object act to each other, a micro cantilever deflects, and the telescopic distance of piezoelectric ceramics of a scanner is changed; a data acquisition card is used for collecting the changes over time of the deflection of the micro cantilever and the changes over time of the telescopic distance of the piezoelectric ceramics, so that the single particle or the single molecule is tracked. The single particle or single molecule tracking method based on the atomic force microscope can be applied to a study on the dynamic process of cell endocytosis viruses, nano particles and other particles, and is also suitable for a study on the transfer process of glucose, amino acid and other small biological molecules on cytomembrane.
Owner:CHANGCHUN INST OF APPLIED CHEMISTRY - CHINESE ACAD OF SCI

Micro mirror box for scan probe microscope

The micro mirror box for scanning probe microscope includes an electrostrictive stepped unit, an electrostrictive scanning tube, a box, a box cover, a sample seat, a probe, a probe rack, a communication interface and a pumping hole, as well as a sample cutting push rod and an auxiliary probe. The probe and the auxiliary probe may be available probe for scanning tunnel microscope, atomic force microscope and / or magnetic microscope. The present invention has the features of simple and reasonable structure, low cost, small size, etc. and is favorable to raising vacuum degree, lowering temperature, raising S / N ratio, raising signal stability, etc. It may be used for vacuum cutting, vacuum probe replacement and scanning with different kinds of probe, in scanning tunnel microscope, atomic force microscope, magnetic microscope and their combination.
Owner:陆轻锂

Atomic-force acoustic microscopy cantilever beam contact resonance frequency tracking system

The invention discloses an atomic-force acoustic microscopy cantilever beam contact resonance frequency tracking system, which is mainly applied to rapidly acquiring the contact resonance frequency of an atomic-force acoustic microscopy cantilever beam so as to realize quick elastic modulus imaging of an atomic-force acoustic microscopy and belongs to the field of nondestructive testing. The system has the principle of controlling a voltage-controlled oscillator to output a sine voltage signal of the resonance center frequency so as to excite a piezoelectric sensor based on a voltage signal corresponding to the resonance peak of the atomic-force acoustic microscopy cantilever beam. The system mainly comprises an effective value DC conversion circuit (RMS-DC) which is connected with a photodiode detector of the atomic-force acoustic microscopy cantilever beam, a voltage-controlled oscillator (VCO) which is connected with the piezoelectric sensor of the atomic-force acoustic microscopy,and a DSP control panel for processing the frequency signals. The DSP control panel controls the VCO to output the sine voltage signal of the resonance center frequency so as to excite the piezoelectric sensor and obtain a resonance curve. Therefore, the center frequency of the resonance curve is obtained and a rapid automatic frequency tracking system is realized.
Owner:BEIJING UNIV OF TECH

Precision measurement method of nanometer clearance in nanostructure based on atomic force microscope

The invention relates to a method of precision measurement of nanometer clearance of a nanometer structure based on an atomic force microscope, the method comprising: scanning the central region of a top surface of a target sample, and positioning the tip of a probe at the center of the sample; loading/unloading a vertical force with the probe of the atomic force microscope until the bottom surface of the sample contacts the substrate; and recording a force curve of the atomic force microscope during loading/unloading, so as to obtain a nanometer clearance between the bottom surface of the sample and the substrate. Specifically, the method comprises: calibrating the sensitivity of a micro cantilever of the atomic force microscope; positioning the tip of the probe of the atomic force microscope at the geometrical center of the top surface of the sample; obtaining a consistent force curve and a disjunctive force curve; comparing the slopes of the three curves including the sensitivity force curve, the consistent force curve, and the disjunctive force curve; and extracting the distance between the bottom surface of the sample and the substrate. According to the invention, measurement error due to offset of a target point from the center of a sample can be eliminated without damage on the structure of a target nanometer device, thus high-resolution measurement of nanometer clearance of nanometer structures is realized.
Owner:TIANJIN UNIV

Method for stimulating probe to vibrate in atomic force microscope

The invention provides a method for stimulating a probe to vibrate in an atomic force microscope. A piezoelectric transducer is arranged below the probe; the piezoelectric transducer generates mechanical vibration in the vertical direction under the action of a signal source; and the probe is vibrated under the stimulation of mechanical vibration waves. Compared with an existing method for stimulating a cantilever to vibrate by adopting a probe driver so as to drive the probe to vibrate, the method has the advantages that the tip of the probe can more easily get rid of the action of adhesion force and capillary force on the surface of a sample to vibrate stably, so that stable scanning imaging is facilitated, a high-resolution scanning image is obtained, and the high-performance requirement on the cantilever is reduced.
Owner:NINGBO INST OF MATERIALS TECH & ENG CHINESE ACADEMY OF SCI

Atomic force microscope (AFM) probe rapid positioning method for cell mechanical property detection

The invention relates to the technical field of nanometer operation, particularly to an AFM probe rapid positioning method for cell mechanical property detection. The method includes recognizing cells through carrying out a Hough transform round detection mode in cell edge images, obtaining radiuses and central position information of each cell to be detected simultaneously, and calculating the actual distance between each cell to be detected and a probe cantilever beam in working space; determining the relative position relation between the probe tip and cells to be detected through rapid local scanning of cells to be detected; and sequentially achieving rapid positioning of the AFM probe to measuring points of cells to be detected to complete measurement of the mechanical property of each cell. According to the rapid positioning method, a visual image processing technology is used for calibrating the relative position relation between the cells to be detected and the probe cantilever beam in the working space, programming control from probe motion to cells to be detected can be achieved, and the operating efficiency of the probe is improved; and the rapid local scanning method is used, so that accurate calibration of the AFM tip and the cell relative positions is achieved, and the accuracy of cell mechanical property measurement is improved.
Owner:SHENYANG INST OF AUTOMATION - CHINESE ACAD OF SCI
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