The
micro mirror box for scanning probe
microscope includes an electrostrictive stepped unit, an electrostrictive scanning tube, a box, a box cover, a sample seat, a probe, a probe rack, a
communication interface and a pumping hole, as well as a sample
cutting push rod and an auxiliary probe. The probe and the auxiliary probe may be available probe for scanning tunnel
microscope, atomic force
microscope and / or magnetic microscope. The present invention has the features of simple and reasonable structure, low cost, small size, etc. and is favorable to raising vacuum degree, lowering temperature, raising S / N ratio, raising
signal stability, etc. It may be used for vacuum
cutting, vacuum probe replacement and scanning with different kinds of probe, in scanning tunnel microscope, atomic force microscope, magnetic microscope and their combination.