An interferometer scans the sample surface laterally with respect to the
optical axis of the interferometric objective. The objective is tilted, so that the sample surface is placed at an angle with respect to the maximum coherence plane of the instrument. By moving the sample stage laterally, at an angle, through a point at a
set distance from the objective on the objective's
optical axis, rather than vertically along the
optical axis, different parts of the object intersect the maximum coherence plane at different times as the surface passes through the coherence plane, the precise time depending on the profile of the surface. When the OPD of a point on the object's surface is greater than the
coherence length of the
light source, the intensity of light reflected from this point does not produce interference fringes. Therefore, the intensity registered by the
detector is approximately constant. However, when the
object point enters the zone of coherence, the interference effects modulate the intensity the same way as in a regular VSI procedure. As the object moves along the scanning direction, it also has a relative vertical speed with respect to the objective because of the tilt of the objective's optical axis with respect to the
scanning plane; therefore, the lateral scanning motion produces an OPD variation as the vertical scan in a conventional
system. As a result,
light intensity data are acquired continuously as the test surface is scanned, thus
elimination the need for stitching multiple sub-sets of data.