Provided is an
actuator formed in a substrate including a
handle layer, an elastic body layer, and an insulating layer, the
actuator including a movable portion supported to a support portion by an elastic body, a movable comb
electrode formed on the movable portion, a fixed comb
electrode supported by the support portion, and
electrode wirings connected to the respective comb electrodes in which the elastic body supports the movable portion such that the movable portion is displaceable in a direction perpendicular to the substrate in accordance with voltages applied to the comb electrodes; the comb electrodes are made up of the
handle layer, and the elastic body is made up of the elastic body layer; and a
handle layer separation groove is provided to electrically separate between the handle
layers of the support portions supporting the comb electrodes, and a structure reinforcing portion is formed across the separation groove.