Atomic force microscope and test method of sample surface property

Abstract

The invention discloses an atomic force microscope and a test method of a sample surface property. The atomic force microscope comprises a signal generator, a probe component, Z-direction piezoelectric ceramics, a laser generator, a photoelectric detector, a displacement coarse adjustment unit, a controller, and a sample stage. The probe component comprises a probe and an excitation module. The probe includes a cantilever beam and a needle tip located at a first end of the cantilever beam. The excitation module is connected to a signal generator, is used for receiving an excitation signal anddrives the probe to deflect at a first direction under the effect of the excitation signal. The excitation module is a non-laser photothermal excitation module. In the technical scheme of the invention, a vibration frequency of the probe is greatly increased so as to effectively speed up a speed when the surface property to be tested is tested by using a non-resonant tapping mode, and shorten testtime of the same surface to be tested.

Description

technical field [0001] The embodiments of the present invention relate to surface property testing technology, in particular to an atomic force microscope and a testing method for sample surface properties. Background technique [0002] Atomic Force Microscope (AFM) has the advantages of high resolution and wide application range, and is widely used as an important tool for micro-nano size morphology characterization, physical property measurement and micro-nano manipulation. [0003] At present, the commonly used imaging modes in AFM mainly include: contact mode, tapping mode and non-resonant tapping mode. In the contact mode, the probe is in continuous contact with the sample during the imaging process, and a large lateral force is easy to cause damage to the probe and the sample; in the tapping mode, the probe cantilever vibrates at its resonance frequency during the imaging process, and the probe and the sample are easily damaged. The sample is in intermittent contact, ...

AI Technical Summary

Problems solved by technology

Due to the heavy weight of the probe clip 103 and the probe 101, it is difficult to drive the whole body to vibrate up and down, which leads to its low vibration frequency during the test and cannot realize high-speed testing.

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