The invention discloses a novel low-cost stack-up array liquid
refrigeration semiconductor laser and a manufacturing method thereof. The
laser comprises a lower base plate, an
anode block, micro-
refrigeration modules with chips, a
cathode block, an upper pressing block and a liquid
refrigeration block which are arranged from bottom up in turn. The micro-refrigeration modules with chips are two ormore and stacked up to form a multiple bar series module group, and the lower base plate is provided with side plates on both sides; the
anode block, the multiple bar series module group and the
cathode block are sequentially stacked up and arranged between the two side plates on the lower base plate, the upper pressing block is arranged on the upper side of the
cathode block and fixedly connectedwith upper ends of the two sides plates of the lower base plate, and the upper side of the upper pressing block is fixedly connected with the liquid refrigeration block. The
laser has simple manufacturing method and low production cost, and effectively reduces flow resistance of
cooling fluid, causes obviously reduced pressure drop of the
cooling fluid, has easier sealing of the
cooling fluid andstrong heat emission capability, effectively prolongs service life of the
semiconductor laser and improves reliability by replacing a traditional micro channel structure with fins.