The invention discloses a magnetic suspension
linear motion platform based on the combination of permanent magnets and electromagnets. The electromagnets are vertically installed in a suspensoid, array permanent magnets are arranged on the surface of a guide rail, the suspension of the suspensoid can be realized by utilizing the principle of holopolarity repulsion between the electromagnets and the permanent magnets; and meanwhile, an
eddy current displacement sensor is combined to realize the stable suspension of the suspensoid above the guide rail; two pairs of electromagnets are horizontally installed in the suspensoid, which can provide guidance for the
linear motion of the platform by combining with the
eddy current displacement sensor; a
linear motor stator is fixed on a base, a
linear motor rotor is fixed on the suspensoid, a
grating ruler is arranged on the surface of the guide rail, and the reading head of the
grating ruler is installed on the suspensoid, thus the precise linear positioning motion of the suspensoid can be realized. The platform provided by the invention can realize the functions such as super cleaning, high speed, long
stroke, precise positioning motion and the like, which can not be realized by the traditional scheme that a rotary
servo motor is utilized to drive, a precise
ball screw is utilized to transmit and a slide guide is utilized to support, and has the advantages of good
load bearing characteristic and stable suspension performance.