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45results about How to "Guarantee interconnection" patented technology
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Traffic internet of things (IOT) layering system architecture based on information gathering
InactiveCN102055800AEnsure sustainable developmentClear logical relationshipTransmissionPhysical layerComputer compatibility
The invention discloses a traffic internet of things (IOT) layering system architecture based on information gathering. The layering system architecture provided by the invention comprises an entity physical layer, a network layer, a transmission layer, a foundation application layer and an information gathering layer. The layering system architecture provided by the invention is a height abstraction for various different physical networks, thus a uniform traffic IOT system architecture is provided for a plurality of traffic modes such as railways, waterways, highways and the like, and the transparence of the underlay network technology to an user or an application program can be achieved. According to the invention, an information system architecture which is uniform and cooperative and can provide uniform service is established, thus universal network service is provided for users; a fusion architecture is provided for the compatibility of various traffic IOT platforms; and a good foundation is laid for the compatibility of the existing traffic IOT and other region traffic IOT.
Owner:NANJING UNIV
Method and system for end-to-end pseudo-line simulation virtual leased line access virtual special network
ActiveCN101047636AOther features affectLess businessNetworks interconnectionNetwork connectionsVirtual Switching InstancePseudo-wire
A method for switching end to end pseudoline artificial virtual leased line in to virtual special network includes setting multiple global unique pseudoline ID in virtual exchange example according to pseudoline ID of end to end psudoline artificial virtual leased line requiring to be switched-in, obtaining pseudoline ID corresponding to said virtual exchange example by end to end pseudoline artificial virtual leased line through matching and seeking then switching in said virtual exchange example. The system used for realizing said method is also disclosed.
Owner:HUAWEI TECH CO LTD
Video networking service front-end computer
ActiveCN102905165AFlexible and convenient configurationImprove connectivitySelective content distributionDigital videoCode module
The invention discloses a video networking service front-end computer with an interconnected and intercommunicated video management platform. The video networking service front-end computer comprises a video front-end processor (FEP), a configuration client and a video management platform, wherein the video FEP consists of an analog video capture / conversion module, a universal message module, a digital video reception / conversion module, a video diagnosis module, a control protocol gateway, a coding module H.263 and a communication control protocol interface module; and the configuration client can be in information interaction with the video FEP through the video management platform so as to complete the configuration, operation and maintenance of the FEP. According to the video networking service front-end computer, the output supports ONVIF (Open Network Video Interface Forum) and GB / T28181 standard protocols, and the input supports various heterogeneous system private protocols, so that an extensive media resource support for the interconnection and intercommunication of heterogeneous video systems is provided; and meanwhile, the configuration is flexible and convenient, the network adaptability is strong, and the video data is secure and reliable.
Owner:安徽博微广成信息科技有限公司
IEC61850 detection platform of power quality monitoring terminal and detection method thereof
ActiveCN102654937AGuarantee interconnectionReliable communicationElectric signal transmission systemsElectric energyFile transfer
The invention relates to the technical field of adopting an IEC61850 detection platform of a power quality monitoring terminal and a detection method thereof, in particular to a rapid detection platform conforming to the IEC61850 communication protocol of a power quality monitoring terminal and a detection method thereof. The power quality monitoring terminal is connected with a standard source FLUKE6100 and connected with an industrial tablet computer of a detection client through Ethernet or serial communication. The power quality monitoring terminal detected by the detection platform provided by the invention can completely obtain an IEC61850 communication function, and the reliable communication between the power quality monitoring terminal and a power energy quality master station is guaranteed. The platform performing IEC61850 communication detection on multiple power quality monitoring terminals at the same time is different from the traditional communication test, and performs static / dynamic consistency detection, file transfer detection, log message service detection and time synchronizing service detection on a model of the monitoring terminal.
Owner:NORTHEAST POWER SCI RES INSTITUTION +3
Multi-data fusion meteorological prediction early warning method
InactiveCN111489525AEffective big screen displayEnsure real-time communicationCharacter and pattern recognitionAlarmsData assimilationObservation data
The invention discloses a multi-data fusion meteorological prediction early warning method, and the method comprises the steps: carrying out the assimilation of meteorological observation data througha multi-source 4D-WRF-EnSRF data assimilation system, enabling the assimilation data to serve as the input of a DeepConvLSTMs artificial intelligence prediction network, and achieving the training ofthe network and the real-time rainfall prediction of multiple data sources; finely dividing rainfall intervals, and setting early warning levels; seamlessly dividing the coverage area of each mobilemeteorological station; and planning a mobile meteorological station, a meteorological monitoring center, a multi-means publishing platform and a prediction and early warning information publishing system, and guaranteeing real-time linkage of the system architecture. Multi-data acquisition and fusion are realized, prediction and early warning results are uploaded and issued in real time, a to-be-rescued area is rapidly locked, a rescue scheme is issued, and rescue field communication is ensured; the weather forecasting and early warning timeliness and accuracy are improved, the early warninginformation publishing coverage rate is increased, the weather disaster prevention and reduction service capacity and the rescue capacity are enhanced, and life and property losses caused by rainstormdisasters and secondary derivative disasters of the rainstorm disasters are effectively reduced.
Owner:NANJING UNIV OF INFORMATION SCI & TECH
MEMS integration method
InactiveCN102515089AReduce parasitic capacitance and distributed capacitanceHigh precisionDecorative surface effectsChemical vapor deposition coatingPhotoresistCMOS
The invention discloses an MEMS integration method. The method comprises steps of: first etching an MEMS area groove, manufacturing a CMOS circuit in an area outside the groove and completing all IC technologies except metal interconnection; then precipitating an IC protective layer and manufacturing an MEMS structure in the groove by employing an MEMS surface sacrificial layer technology; then etching to form lead wire apertures of the IC area, precipitating and imaging the metal to form metal interconnection; finally using photoresist to protect the area outside the groove, removing a sacrificial layer and releasing an MEMS movable structure to obtain a monolithic integration chip. The invention employs MEMS-IC-MEMS intersect manufacturing technology to complete MEMS and IC monolithic integration, reduces height difference between the MEMS structure and the IC through the groove, and reduces pressure of the integration technology on photolithography; meanwhile, technology adjustment avoids metal shedding and improves technology quality and yield.
Owner:PEKING UNIV
Method and system for testing non-access stratum authentication function conformance of narrow-band Internet-of-things terminal
ActiveCN107708150APerfect conformance testing requirementsGuarantee interconnectionCorrect operation testingWireless communicationComputer hardwareTest requirements
The invention discloses a system and a method for testing the non-access stratum authentication function conformance of a narrow-band Internet-of-things (NB-IoT) terminal. Based on a master computer and a system simulator, the interface of a non-access stratum NAS in an NB-IoT is defined, and the NAS authentication function of an NB-IoT terminal is tested, in order to improve the existing protocolconformance test requirements. The system and the method can also be used in the research and development, test and network access certification work for NB-IoT in the future. It is ensured that an authenticated commercial terminal can be connected with network equipment from different manufacturers in the existing network.
Owner:BEIJING TAIDE DONGTENG COMM TECH
MEMS (micro-electromechanical system) and IC (integrated circuit) monolithical integration method
InactiveCN102583224ASimple processAdvantages of an integrated approachDecorative surface effectsChemical vapor deposition coatingIntegrated circuit layoutSilicon oxide
The invention discloses an MEMS and IC monolithical integration method. The method comprises the following steps: 1, completing all IC technologies except a metal interconnection technology on a substrate, and sequentially depositing a silicon oxide layer and a silicon nitride layer which are used as protection layers of an IC region; 2, making an MEMS structure through adopting an MEMS surface sacrificial layer technology; 3, etching to remove the silicon nitride protection layer of the IC region, etching the silicon oxide protection layer to form a lead hole, depositing and imaging the metal to form the metal interconnection; and 4, removing the sacrificial layer of an MEMS region, and releasing the MEMS movable structure. The method needs no special low-stress silicon nitride production equipment, adopts above IC-MEMS intersection technology, and allows the internal stress of integrated chips to be controlled through selectively removing the silicon nitride protection layer, so the influence of the integration technology to the IC performances is reduced, and the technology is simple and reliable.
Owner:PEKING UNIV
System and method for inter connecting SP14 equipment and PCI Express equipment
InactiveCN1832488ASolve the problem of interconnectionSolve configuration problemsTransmissionData conversionPCI Express
This invention discloses a system for realizing interconnection between devices of SP14 and PCI Express including: devices SP14 and PCI Express and converting unit between them used in analyzing the received data to be converted to the process layer content of them and sent to the devices of SP14 or PCI, said system also includes an interruption unit and a CPU interface unit, in which, the conversion unit can analyze the data sent by them and convert the format so that the converted format is in conformity with that of them so as to solve the interconnection between them. A method for realizing the inter-connection between devices of them is provided.
Owner:NEW H3C TECH CO LTD
Energy storage monitoring system
ActiveCN105141037AGuaranteed stabilityExpandable and flexibleCircuit arrangementsInformation technology support systemData transmissionBilling system
The invention relates to an energy storage monitoring system comprising a real-time operation system, an electric energy charge system, and a safe WEB issue system which are communicated with a network data transmission platform. The real-time operation system is located in a first safety area and acquires and processes data correlative with an energy storage system. The electric energy charge system is located in a second safety area and performs power grid application analysis and electric energy acquisition statistic. A firewall is arranged between the first safety area and the second safety area. The safe WEB issue system is located in a management information area and issues information to external units. A forward-power-dedicated safe physical isolation device is arranged between the management information area and the first safety area. The energy storage monitoring system uses a layered, distributed, and open network framework, and achieves combined monitoring of a wind power plant and an energy storage power station.
Owner:SHANGHAI MUNICIPAL ELECTRIC POWER CO +1
Automatic routing search and configuration method based on SRIO switching network
ActiveCN109067650ARealize interconnectionIncrease flexibilityData switching networksAutomatic routingTraversal algorithms
The invention discloses a route automatic searching and configuring method based on SRIO switching network. The depth-first traversal algorithm is used to access all kinds of devices in unknown SRIO network to find out all nodes in the network, such as general signal processing resources DSP, FPGA, GPP and routing switch chip SWITCH. The invention can search the unknown SRIO network to find the nodes in the system that have completed SRIO initialization, including DSP, GPP, FPGA and SWITCH.
Owner:CHINESE AERONAUTICAL RADIO ELECTRONICS RES INST
Three-dimensional double-sided silicon micro-strip detector and preparation method thereof
PendingCN110010591ASmall sizeReduce dead zoneFinal product manufactureSolid-state devicesSilicon dioxideSemiconductor
The invention discloses a three-dimensional double-sided silicon micro-strip detector and a preparation method thereof. The three-dimensional double-sided silicon micro-strip detector comprises an upper portion detection unit, a lower portion detection unit and a middle semiconductor base body, a plurality of mutually parallel upper semiconductor base bodies are uniformly inlaid in an upper troughelectrode of the upper portion detection unit, and upper central electrodes are inlaid in the upper semiconductor base bodies; a plurality of mutually parallel lower silicon base bodies are uniformlyinlaid into the lower trough electrode of the lower portion detection unit, and lower central electrodes are inlaid in the lower silicon base bodies; the heights of the upper semiconductor base bodies, the upper trough electrodes, the upper central electrodes, the lower silicon base bodies, the lower trough electrodes and the lower central electrodes are the same; the lower portion detection unitis located below the upper portion detection unit, and the lower portion detection unit and the upper portion detection unit are staggered for a certain angle in a horizontal direction. A silicon dioxide layer is generated at the surface of a silicon wafer by employing the gettering oxidation technology, the detector pattern is transferred onto the silicon dioxide layer through marking and photoetching, the etching and chemical deposition diffusion of the cathode electrode and the anode electrode are performed, and finally, damaging repairing and package are performed.
Owner:XIANGTAN UNIV
Post-CMOS integrated method for threshold presetting
InactiveCN102935995AAchieve monolithic integrationSimple processDecorative surface effectsChemical vapor deposition coatingEngineeringCmos process
The present invention provides a post-CMOS integrated method for threshold presetting. According to the method, a threshold drift magnitude introduced by a MEMS pre-estimating process is adopted to adjust a doping concentration of a CMOS process in an IC process to increase threshold symmetry of a MOS transistor after the post-CMOS process. According to the method, threshold drift defect is subjected to conversion utilization, special low-stress material production equipment is not required, MEMS movable structure and IC monolithic integration requirements can be met, and threshold symmetry of the MOS transistor of the integrated circuit portion can be ensured.
Owner:PEKING UNIV
Method and system for testing consistency of NAS security mode of NB-IoT (Narrow Band Internet of Things) terminal
ActiveCN107947907APerfect conformance testing requirementsGuarantee interconnectionCorrect operation testingData switching networksProtocol for Carrying Authentication for Network AccessInternet of Things
The invention discloses a method and a system for testing consistency of an NAS security mode of an NB-IoT (Narrow Band Internet of Things) terminal. Based on a master computer and a system simulator,an interface of an NAS in an NB-IoT is defined and the NAS security mode of the NB-IoT terminal is tested, so as to perfect existing protocol consistency testing requirements; the method and the system are used in research and development, testing and network authentication work for the NB-IoT, and a commercial terminal passing through authentication can be guaranteed to implement interconnectionand intercommunication with network devices of different manufacturers in an existing network.
Owner:BEIJING TAIDE DONGTENG COMM TECH
Radio frequency chip system-level package structure with sealed casing made of metal and process thereof
ActiveCN110010556AAchieve airtightGuaranteed Circuit InterconnectionSemiconductor/solid-state device detailsSolid-state devicesRadio frequencyBase metal
The invention provides a radio frequency chip system-level package structure with a sealed casing made of metal. The structure comprises a base wafer and a cover plate wafer. The base wafer and the cover plate wafer are bonded together by a wafer-level process, and the outer surfaces of the base wafer and the cover plate wafer are provided with insulating layers. The middle of the base wafer is provided with a TSV hole arrangement area which is internally provided with a plurality of TSV holes arranged in parallel, and the TSV holes penetrate the base wafer in the thickness direction. TSV copper columns are formed in the TSV holes by casting copper, an upper surface of the TSV hole arrangement area is provided with an upper RDL structure, and a lower surface of the TSV hole arrangement area is provided with a lower RDL structure. Upper and lower ends of the TSV copper columns are connected to the upper RDL structure and the lower RDL structure, an upper surface of the upper RDL structure is connected to a functional chip, and the base wafer is provided with a base metal piece outside the hole arrangement area. The invention also provides a package process of the above structure. Making TSV and cavity structures is not needed, and the structure is suitable for mass production.
Owner:浙江集迈科微电子有限公司
Newborn critically ill transfer data acquisition and clinical decision support system based on 5G
PendingCN113345579ATimely diagnosis and treatmentFast data transferMedical automated diagnosisHealthcare resources and facilitiesCritically illVideo transmission
The invention discloses a newborn critically ill transfer data acquisition and clinical decision support system based on 5G. The system comprises a first-aid dispatching command platform, a first-aid referral ambulance information acquisition and transmission module, a first-aid referral trinity information network communication module, a command platform expansion compatible module and a 5G network communication platform. According to the invention, scheduling and command of the whole process of first-aid referral treatment, interconnection, intercommunication and information sharing of clinical data of first-aid whole-process child patients such as neonatal critical child patients, referral treatment hospitals, treatment hospitals and 120 referral ambulances are realized, and real-time first-aid guidance is provided in combination with high-definition video transmission; physical sign information collection and information transmission of critical newborns in the ambulance can be achieved, information collection, information transmission and information data safety guarantee are achieved, interconnection and intercommunication of first-aid referral application, auditing and treatment information are guaranteed, and timely diagnosis and treatment are provided for the critical newborns.
Owner:CHILDRENS HOSPITAL OF FUDAN UNIV
TR component performance comprehensive test system and test method
ActiveCN113746498AEffective performance testingReasonable structureTransmitters monitoringReceivers monitoringTestwareSimulation
The invention relates to a TR component comprehensive performance test system and test method, a TR component performance test device is composed of test software, a test instrument, a switch box, a TR component state controller and the like, and the device is controlled by a system master control computer to complete automatic test of all parameters of a TR component. Automatic testing of selected parameters can be completed by single-time connection of the tested piece through the testing clamp. For different test states and test parameters, the TR assembly performance test device uses the configured switch box to complete connection between a tested piece and different test instruments.
Owner:南京新频点电子科技有限公司
Silver-loaded graphene/copper self-lubricating material and preparation method thereof
InactiveCN113512662AHigh hardnessLow conductivityMaterial nanotechnologyCarbon compoundsPhysical chemistryDodecyl sulfate
The invention provides a silver-loaded graphene / copper self-lubricating material and a preparation method thereof. The method comprises the following steps: dispersing graphene nanosheets and sodium dodecyl sulfate in dimethylformamide, wherein the ratio of the graphene nanosheets to the sodium dodecyl sulfate to the dimethylformamide is (0.05-0.15) g: (0.05-0.15) g: (30-50) ml, and obtaining a dispersion liquid; uniformly dispersing an AgNO3 solution and the dispersion liquid to obtain a precursor solution, carrying out hydrothermal treatment on the precursor solution at 60-90 DEG C, then separating precipitates in the obtained mixed system, and then washing and drying the precipitates to obtain silver-loaded graphene; and uniformly mixing the silver-loaded graphene with copper powder, then carrying out sintering treatment in a vacuum hot-pressing sintering furnace at 700-800 DEG C, and then cooling the mixture along with the furnace to obtain the silver-loaded graphene / copper self-lubricating material.
Owner:SHAANXI UNIV OF SCI & TECH
Method and system for conformance testing of non-access layer authentication function of narrowband Internet of things terminal
ActiveCN107708150BPerfect conformance testing requirementsGuarantee interconnectionCorrect operation testingWireless communicationEngineeringProtocol for Carrying Authentication for Network Access
Owner:BEIJING TAIDE DONGTENG COMM TECH
Method and apparatus for dynamically allocating IPv4 public address through an IPv6 Internet
The embodiment of the invention provides a method and apparatus for dynamically allocating an IPv4 public address through an IPv6 Internet. The method comprises the following steps: receiving a request of obtaining the IPv4 public address sent by a user terminal, wherein the request carries a user identifier and a time period of the user to use the IPv4 public address; if an unallocated IPv4 public address resource exists, extracting a target IPv4 public address from the IPv4 public address resource, and generating a target address carrying an IPv6 prefix mark; allocating the target address tothe user terminal corresponding to the user identifier, starting the timing, and when the timing time length is within the time period, accessing, by the user terminal, the IPv4 network via the IPv6network according to the target address. The device performs the above method. By adoption of the method and apparatus for dynamically allocating the IPv4 public address through the IPv6 Internet provided in the embodiment of the invention, the utilization rate of the IPv4 public address resource can be improved, thereby ensuring the interconnection and intercommunication of the IPv4 network and the IPv6 network in the transitional phase.
Owner:TSINGHUA UNIV
Air-ground network system based on field deployable 5G vehicle-mounted platform and construction method
ActiveCN113783930AIncrease capacityReduce latencySecuring communicationHigh level techniquesThe InternetNetworked system
The invention belongs to the technical field of vehicle-mounted equipment network communication, and relates to an air-ground network system based on a field deployable 5G vehicle-mounted platform and a building method, and the system comprises a cloud computing platform which stores and processes data; and router equipment. The building method comprises the following steps: establishing a local area network; building a satellite navigation positioning module; constructing a distributed storage network by using a block chain; by using the space-based Internet of Things. Advantages of communication between a mobile phone and a satellite and 5G communication are complementary, and continuity, robustness and availability of information transmission are guaranteed. According to the invention, the combination of an urban off-road vehicle and an engineering vehicle is realized, smooth network connection and information sharing between vehicles and between vehicle-mounted terminal equipment in outdoor surveying and mapping operation are realized, and interconnection and intercommunication of vehicle-mounted ground equipment and instruments in an area with a radius of 3 kilometers are guaranteed. Artificial intelligence and the Internet of Things technology are fused, intelligent travel, intelligent service and everything intelligence are interconnected with the sky Internet of Things; finally, smart city and green travel are realized, traffic jam in large and medium-sized cities is broken, and an intelligent traffic town is constructed.
Owner:亚投财富信息科技(北京)有限公司
Narrowband Internet of Things terminal non-access layer security mode conformance testing method and system
ActiveCN107947907BPerfect conformance testing requirementsGuarantee interconnectionCorrect operation testingData switching networksConsistency testEngineering
Owner:BEIJING TAIDE DONGTENG COMM TECH
Portable video capture device
InactiveCN104506798AImprove mobilityQuick buildClosed circuit television systemsVideo transmissionVideo encoding
The invention discloses a portable video capture device, and aims at solving the problem that as traditional limited video transmission needs a transmission cable, important information, namely a video signal cannot be easily applied to battlefield command control. The portable video capture device comprises video capture equipment and a wireless local area network command system, wherein the video capture equipment comprises a video capture module and a video encoding module; the wireless local area network command system comprises a handheld table and a vehicular-locating set; the video collection module is used for collecting an analogue video signal of an original scene image, and transforming into a digital signal; the video encoding module is used for carrying out encoding compression on the digital signal output by the video capture module, and transforming into an H.264 video code stream, and transmitting the encoded H.264 video code stream to a wireless local area network handheld table through a network interface; the handheld table is used for wirelessly transferring the H / 264 video code stream to the remote vehicular-locating set. The portable video capture device is relatively small in size and relatively light in weight, is powered by virtue of a built-in battery, and is free of limitation of a data transmission cable, so that the portable video capture device can be used as a man-portable video capture device.
Owner:THE 22ND RES INST OF CHINA ELECTRONICS TECH GROUP CORP
Method for achieving high-density reliable expansion of ATX mainboard
InactiveCN107239114AGuaranteed feature richnessGuarantee interconnectionDigital processing power distributionExpansion cardHigh density
The invention discloses a method for achieving high-density reliable expansion of an ATX mainboard, and relates to the field of mainboard expansion; a PCI / PCIE expansion backboard independent of the mainboard is arranged, and is in perpendicular insertion connection with the mainboard through a CPCIE connecting unit, so that a PCI / PCIE expansion card installed in the PCI / PCIE expansion backboard is parallel to the mainboard, laminating placement is formed, and the expansion is achieved. Through the utilization of the method for achieving the high-density reliable expansion of the ATX mainboard, a PCI expansion part function on the ATX mainboard is innovatively and independently divided, the expansion plate is formed, the richness of a mother board function is guaranteed, and the flexibility of the expansion is achieved at the same time; the fixation form of the PCI / PCIE expansion card is innovatively changed from being perpendicular to the mother board into being parallel to the mother board, and the expansibility during light and thin machine case design is satisfied at the same time; the high-speed reliability of the CPCIE connecting unit is utilized to guarantee interconnection of the expansion card and a CPU.
Owner:SHANDONG CHAOYUE DATA CONTROL ELECTRONICS CO LTD
Multi-frequency time division multiple access system and method based on directional antenna
ActiveCN107979872BImprove anti-interference abilityLong transmission distanceOrthogonal multiplexWireless communicationInterference (communication)Frequency spectrum
Owner:XIDIAN UNIV
IEC61850 detection platform of power quality monitoring terminal and detection method thereof
ActiveCN102654937BGuarantee interconnectionReliable communicationElectric signal transmission systemsTablet computerMaster station
The invention relates to the technical field of adopting an IEC61850 detection platform of a power quality monitoring terminal and a detection method thereof, in particular to a rapid detection platform conforming to the IEC61850 communication protocol of a power quality monitoring terminal and a detection method thereof. The power quality monitoring terminal is connected with a standard source FLUKE6100 and connected with an industrial tablet computer of a detection client through Ethernet or serial communication. The power quality monitoring terminal detected by the detection platform provided by the invention can completely obtain an IEC61850 communication function, and the reliable communication between the power quality monitoring terminal and a power energy quality master station is guaranteed. The platform performing IEC61850 communication detection on multiple power quality monitoring terminals at the same time is different from the traditional communication test, and performs static / dynamic consistency detection, file transfer detection, log message service detection and time synchronizing service detection on a model of the monitoring terminal.
Owner:NORTHEAST POWER SCI RES INSTITUTION +3
Method and system for end-to-end pseudo-line simulation virtual leased line access virtual special network
ActiveCN101047636BOther features affectAchieving a fully interconnected topologyNetworks interconnectionNetwork connectionsVirtual Switching InstancePseudo-wire
Owner:HUAWEI TECH CO LTD
A Comprehensive Experimental System of Multimedia Network Communication
InactiveCN103871299BGuarantee interconnectionMeet the needs of practical teachingTeaching apparatusFiberDigital television
Owner:SOUTHEAST UNIV
A multi-column parallel lightning arrester protection component
ActiveCN112967855BGuaranteed wearReduce wearResistor housing/enclosing/embeddingOvervoltage protection resistorsScrew threadLightning arrester
Owner:WUHU KAIXIN ARRESTER
Two-dimensional-arrangement double-sided staggered embedded type three-dimensional detector and preparation method and array thereof
PendingCN109935643AReduce widthReduce position changesFinal product manufactureRadiation controlled devicesDamage repairSilicon dioxide
The invention discloses a two-dimensional-arrangement double-sided staggered embedded type three-dimensional detector and a preparation method and array thereof. The detector comprises an upper trenchelectrode and a lower trench electrode, wherein the upper trench electrode and the lower trench electrode are etched on the surface of an intermediate semiconductor substrate; an upper central electrode is embedded in the upper groove electrode, and an upper semiconductor substrate is filled between the upper central electrode and the upper groove electrode; a lower central electrode is embeddedin the lower groove electrode, and a lower semiconductor substrate is filled between the lower groove electrode and the lower central electrode; the outer widths of the upper trench electrode and thelower trench electrode are 2RX; the lower trench electrode is located below the upper trench electrode, and the vertical distance d3 is formed between the upper trench electrode and the lower trench electrode; 1 / 4 of parts of the upper trench electrode and the lower trench electrode are overlapped, and the upper central electrode and the lower central electrode are of the same specification. A silicon dioxide layer is generated on the surface of a chip through gettering oxidation, a detector pattern is transferred to the silicon dioxide layer through marking and photoetching, etching and chemical deposition diffusion of a cathode electrode and an anode electrode are carried out, and finally damage repair and packaging are carried out.
Owner:XIANGTAN UNIV
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