59 results about "Resonance angle" patented technology

The invention relates to a method for measuring a thickness of a metal film of a lithographic mask and belongs to the field of physical measurement. The method comprises the following steps of: placing a prism of which the bottom surface is evaporated with a gold film close to a metal chromium surface of the mask so as to form a double-sided metal waveguide structure to be measured; selecting a laser wavelength and a polarization mode of an incident angle; receiving and recording the light intensity of a laser beam reflected from the bottom of a coupled apparatus or the light intensity of a laser beam transmitted from a lower metal film; changing the laser incident angle to obtain a curve of the light intensity and the incident angle; finding a resonance angle of absorption peaks of a guided mode and a width and a depth of the corresponding absorption peak; and calculating to obtain a refractive index and a thickness value of a thin film material. According to the invention, the high accuracy measurement is realized. The method is easy for operation and miniaturization.

A surface plasmon resonance sensor comprising a chip having a substrate (102) and a metal layer (103), a prism (104), an optical system (105) becoming a light source, and a photodetector (106), wherein the metal layer (103) consists of a flat part (109) in the form of a thin film, and protrusions consisting of fine metal particles (110) or the like arranged at intervals. When light impinges on such a metal layer (103), a resonance angle caused by the flat part (109) and each protrusion is attained. Variation in the refractive index of a medium touching the metal layer can be detected from the resonance angle.

The invention discloses a long-range surface plasma resonance sensor and a preparation method thereof. The sensor is formed by bonding a BK7 prism and a glass slide through cedar oil, wherein the outer surface of the glass slide is plated with a magnesium fluoride thin film, a silver film and a gold film in turn; the gold film is directly contacted with biological solution to be detected and is used for detecting the biological solution in a mode of angle modulation; magnesium fluoride with the refractive index of about 1.38, which is close to that of the biological solution, can form approximatively symmetric structures on two sides of a metal conductive layer so as to ensure that surface plasmas on the two sides of the metal conductive layer are coupled to form the long-range surface plasma; compared with other metals, the metal silver used as the conductive layer has a narrower half band width of a resonance absorption peak, but has unsteady chemical properties; a conductive layer gold film can make a resonance angle generate a greater transition along with the change of the refractive index of the biological solution to be detected; simultaneously, the conductive layer gold film has stable chemical properties and high biological affinity. The specific multilayer film structure can integrate the advantages of each film and effectively improve the sensitivity of biological sensors.

A robust multichannel SPR instrument with exceptionally high sensitivity (<pg / mm2). The instrument utilizes an SPR detection scheme providing multiple reflections from a planar light guide configuration to amplify the reflected light intensity changes near the resonance angle. This SPR approach is amenable to simultaneous multichannel detection while maintaining high sensitivity with a simple, cost-effective design. The idea of using multiple reflections to excite multiple surface plasmon waves seems counterintuitive at first because the SPR resonance will be broadened; the broadened resonance will diminish sensitivity for angle or wavelength detection modes. However, changes in reflected light intensity near the resonance angle will be amplified by the multiple reflections, thereby increasing the sensitivity of SPR utilizing intensity detection at a fixed angle of incidence.

The invention discloses a preparation method for a surface plasmon resonance (SPR) DNA sensor based on graphene oxide, and belongs to the technical field of nanometer material biology. The technical problem to be solved in the preparation method is that the distinctive effect of graphene oxide-DNA is utilized, the surface plasmon resonance technology and the signal amplification mechanism of the AuNPs are applied, based on the competitive inhibition method, the phenomenon that the single-stranded DNA with different concentrations is absorbed on the surface of a sensing chip to cause SPR spectral change, and the single-stranded DNA is detected through the linear change of the resonance angle. Through the adoption of the preparation method, the SPR technology is adopted, the GO (Graphene Oxide) is utilized to assemble the surface of the chip, the single-stranded DNA is sensitively detected through adopting the competitive inhibition method and the AuNPs signal amplification effect, the concentration of the single-stranded DNA is quantitatively detected through analyzing the change of the SPR peak, and the detection limit is ultra-low. The preparation method has the advantages as follows: the instrument and equipment are low in cost, the cost is low, the operation is simple, the efficiency is high, the precision is high, and the detection limit is ultra-low.

The invention relates to a method for detecting clenbuterol through the combination of a MIT technology and a SPR technology, belonging to the field of clenbuterol detection. The method of the invention comprises: firstly using a thermal polymerization method to prepare a clenbuterol molecular imprinting polymer film on a gold film substrate, removing template molecules with eluent, and obtaining a clenbuterol molecular imprinting sensor chip; then calculating the displacement value Delta Theta of SPR resonance angle resulting from the post-reaction and the pre-adsorption of the clenbuterol standard solution and the sensor chip, and creating a standard curve of negative logarithm of Delta Theta and the concentration value of the clenbuterol standard solution; and finally according to the displacement value Delta Theta of the SPR resonance angle resulting from the post-reaction and the pre-adsorption of the clenbuterol standard solution and the sensor chip, and reading the corresponding clenbuterol content on the standard curve. The method of the invention has the characteristics of severe-environment-resistance, high selectivity, fast response and simple operation, not only improves the sensitivity and limit of detection of the method, but also correspondingly reduces the detection cost, and also almost has no adsorption to salbutamol having similar structure with clenbuterol.

A method and system for analysis of protein interaction kinetics in microarray or whole-cell based formats includes positioning a sensor chip on a prism. The sensor chip is spotted with a plurality of target molecules. A movable printer head deposits a plurality of analyte droplets on predefined regions of the sensor chip surface. A light source transmits light through the prism to excite surface plasmon resonance on the sensor chip surface, whereby the plurality of target molecules bound to the upper surface are changing the SPR resonance angle and therefore the intensity of the reflected beam. A detector receives reflected light transmitted through the prism from the bottom surface. Signals from the detector are received and processed into kinetic data and microarray labeled data to determine molecular interactions and binding kinetic properties for the plurality of analyte droplets.

The invention relates to a device of realizing the interference photolithography of a maskless surface plasma body through a laue mirror. The device comprises a precision turntable capable of adjusting the incident light angle, a rectangular dove prism capable of coupling and exciting the surface plasma body interference, a compressing device capable of compressing a substrate and the rectangular dove prism, and a support capable of fixing the compressing device. One side face of the rectangular dove prism is fixed on the precision turntable; a P polarized laser beam reaches the inclined plane in a mode of vertical incidence; and the precision turntable is adjusted finely to determine the real resonance angle for exciting the surface plasma body. The substrate coated with photoresist is arranged on the bottom surface of the prism; and the compressing device is adjusted so as to compress the prism and the substrate. A wide beam reaches the prism in a mode of incidence with the real resonance angle; and the surface plasma body interference and the exposure of the photoresist can be realized on the lower surface of a metal membrane; and the substrate after exposure is taken off. The surface plasma body interference photolithography is realized after the postbaking and development of the photoresist. The device has the advantages of low cost, high working efficiency, a great area of a processed pattern region, convenient assembly and adjustment, and the like. The device also facilitates the study and application of nanometer photon crystals and artificial materials.

The present invention relates to a sensor chip, a preparation method and a use thereof, and belongs to the field of hormone detection analysis. The sensor chip sequentially comprises a glass substrate, a gold film layer, a single molecule alkyl chain layer and a progesterone molecule imprinting polymer film from bottom to top. The preparation method comprises: plating a gold film on a glass substrate, forming a single molecule alkyl chain layer on the gold film, and forming a molecule imprinting polymer film on the single molecule alkyl chain layer to obtain the sensor chip, wherein the molecule imprinting polymer film only provides a response for progesterone molecule. The sensor chip can be used for a surface plasmon resonance sensor to detect progesterone content, wherein the sensor chip absorbs progesterone molecules in a sample during detecting, the resonance angle is changed, and the resonance angle change value is proportional to the sample concentration, such that the progesterone content in the sample can be quantitatively detected based on the resonance angle change. According to the present invention, the molecule imprinting technology is adopted, and the prepared sensor chip provides characteristic of sensitivity, rapidness, accuracy and simpleness during progesterone detection.

The invention relates to a method for detecting testosterone by using a surface plasmon resonance (SPR) sensor and belongs to the technical field of hormone detection and analysis. The method comprises the following steps of: fixing a testosterone molecular imprinted identification sensitive chip in the SPR sensor, performing angle scanning on the chip, and then recording an SPR spectrogram to obtain a resonance angle theta1; recording the SPR spectrogram to obtain the resonance angle theta n corresponding to each standard solution; drawing a standard curve by taking delta theta=theta n-theta1 as a vertical coordinate and taking the concentration of the testosterone standard solution as a horizontal coordinate; and injecting sample solution to be detected into a flow cell, and recording the SPR spectrogram to obtain the resonance angle theta x, and computing delta theta x=theta x-theta1 to obtain the testosterone content according to the delta theta x on the standard curve. The method has the advantages of quick response and high selectivity, wherein the result can be obtained in 5 to 10 minutes generally, and the super low testosterone content can be measured; and the chip of the sensor can be recycled, and the detection cost is reduced.

An oxygen sensor using the principle of surface plasmon resonance, capable of measuring an oxygen concentration in a measurement chamber by detecting a change in resonance angle or refractive index using field enhancement effects, is provided. An oxygen transmission rate measurement system including the oxygen sensor is also provided. In this invention, only a change in voltage is measured at a fixed angle, thus achieving rapid measurement, and also, a single wavelength light source is used, thus reducing the size of the oxygen sensor and oxygen transmission rate measurement system. The oxygen sensor includes a laser diode for emitting light, a polarizer for converting the emitted light into polarized light, a prism for receiving the polarized light from the polarizer and having a sensor substrate provided on one surface thereof so that the polarized light is reflected, an oxygen concentration measurement chamber provided to enclose the sensor substrate so that oxygen a concentration of which is to be measured is contained therein, a photodiode for measuring the amount of light reflected from the prism, and a microcontroller unit for controlling operation of the oxygen sensor and calculating the oxygen concentration.

Improved methodology for monitoring deposition or removal of material to or from a process and / or wittness substrate which demonstrates a negative e1 at some wavelength. The method involves detection of changes in P-polarized electromagnetism ellipsometric DELTA at SPR Resonance Angle-of-Incidence (AOI) to monitor deposition of and / or removal of minute amounts of materials onto, or from, said process and / or witness substrate. The methodology can optionally monitor ellipsometric PSI, and involves simultaneously or sequentially applying non-P-polarized electromagnetism at the same angle of incidence, or electromagnetic radiation of any polarization at a different angle-of-incidence and wavelength to the process or wittness substrate and application of conventional ellipsometric analysis.

The method for detecting a surface enhanced raman spectrum based on interference and diffraction stimulation of the invention belongs to the technical field of spectral analysis and detection. The method comprises the steps of: using a surface enhanced raman spectrum substrate having a periodic microstructure with a periodic size range from 0.05 to 50 microns, emitting the P polarized lasers with wavelength as same as the wavelength for stimulating the raman on the substrate which is absorbed with the sample from different angles, measuring the laser reflectivity of the base, using an incidence angle corresponding to the low reflectivity as the surface plasma incidence resonance angle with the stimulated raman wavelength, emitting the P polarized lasers under the incidence resonance angle on the base absorbed with the sample and receiving a raman signal along the reflection resonance angle. The method of the invention can efficiently stimulate the surface plasma and centrally emit the SERS signals under the resonance angle, therefore increasing the energy density of the signal and promoting the collecting effect of the light signals.

The invention discloses a detection apparatus utilizing surface plasma resonance (SPR) effect. The detection apparatus comprises a flexible connecting rod platform, a light source set, a triple prism, a metal film and a light detection unit. A free end of an input rod of the flexible connecting rod platform is suitable for linear movements, such that an output rod is driven to rotate. The light source set rotates with the output rod, such that an incidence angle of a polarized light from the light source radiated on the triple prism is changed. The metal film is arranged on the lower surface of the triple prism. The object requiring detecting is arranged on a metal film surface which does not contact the triple prism. The polarized light is radiated to the metal film through the triple prism, and is reflected by the metal film. The light detection unit is used for detecting a light intensity of an emergent light of the polarized light reflected by the metal film through the triple prism. When the detected light intensity is zero, the incidence angle of the polarized light is the resonance angle of the object requiring detection.

The invention discloses an LSPR sensor device based on Ag nanoparticles, which is composed of a compact optical path and a circuit, and the compact optical path adopts a detection method of a resonance angle optical signal, which includes a laser source, a polarizer, a vibrating mirror, a lens group, a reflecting mirror, Hemispherical prism and sample cell; the circuit is composed of photodetector, photoelectric conversion circuit, micropump drive circuit, galvanometer drive circuit, data acquisition card and computer. The angle of the reflected light is changed by rotation, the reflected light is converged by the lens group, and the converged light is reflected to the hemispherical prism through the mirror. When the surface plasmon resonance effect occurs, the light emitted to the photodetector shows a change in strength , through the photoelectric conversion circuit to convert the electrical signal to the computer, the micropump drive circuit controls the sample cell through the linear motor; to realize the sample pumping and pumping out, the photoelectric conversion circuit is connected to the galvanometer through the galvanometer drive circuit.

Provided is a multi-channel biosensor using a biosensor using a surface plasmon resonance capable of measuring the changed resonance angle in real time without additionally scanning an incident angle according to the change of temperature or external environment by including a sensor chip with a plurality of channels arranged on a top surface thereof in parallel, a light source for vertically emitting a beam from a top portion of the sensor chip to a direct bottom portion of the sensor chip, a first lens for defocusing the beam emitted from the light source in the top portion of the sensor chip, a beam splitter for splitting a reflected beam, wherein the reflected beam is obtained by reflecting the beam defocused through the first lens from each channel of the sensor chip and a sensing unit for receiving a parallel component of the beam split in the beam splitter.

The invention provides a terahertz sensor for surface plasma resonance. The terahertz sensor at least comprises a heavily doped semiconductor film comprising a first surface and a second surface opposite to the first surface, an optical waveguide coupling layer formed on the first surface of the heavily doped semiconductor film, a sensing chip which is formed on the second surface of the heavily doped semiconductor film and arranged in a sample channel and is in contact with molecules to be detected, a terahertz quantum cascade laser for emitting terahertz light to the optical waveguide coupling layer, and a terahertz detector for detecting the terahertz light. According to the terahertz sensor, terahertz laser is generated by a laser device, total reflection is generated on the surfaces of the optical waveguide coupling layer and the heavily doped semiconductor film, evanescent waves are generated at an interface, surface plasma waves are generated between the heavily doped semiconductor film and a molecule-sensitive film, and the evanescent waves and the surface plasma waves form resonance by adjusting incident light and resonance angles; the sensor can be used for detecting biomacromolecules at terahertz resonance frequency band.

A surface plasmon resonance apparatus (10) includes a prism (12); a dielectric layer (90) contacting one face (16) of the prism (12); a conducting layer (14) having a first surface contacting the dielectric layer (90) and a second surface to contact a sample (22) to be analyzed by the surface plasmon resonance apparatus (10); and a light source (18) emitting an incident light beam (26) having a wavelength 0 entering the prism (12) and incident on the face (16) of the prism (12) contacted by the dielectric layer (90) at an adjustable incident angle alpha relative to a normal to the face (16) of the prism (12) contacted by the dielectric layer (90). The conducting layer (14) has a thickness that enables generation of slightly asymmetric coupled surface plasmons when the incident angle alpha is equal to a resonance angle determined by the wavelength 0 of the incident light beam (26), an index of refraction (n m ) of the conducting layer, and an index of refraction (n s ) of the sample (22).

A method for detecting protein kinase based on surface plasmon resonance comprises the following steps: A, a gold film is used as a sensing layer, the sensing layer, first, is soaked with ethanol, then ultrasonically cleaned, H2 flame is used for annealing on the surface of the gold film; B, the gold film processed by the step A is soaked in a polypeptide P1 solution with an amino acid sequence shown as SEQIDNO:1, then soaked with the gold film in a polypeptide P2 solution with an amino acid sequence shown as SEQIDNO:2, and blown to dry with N2, and sealed storage of the prepared polypeptide P1 and P2-modified sensing gold film is performed at-18 DEG C for standby use; and C, the polypeptide P1 and P2-modified sensing gold film prepared by the step B is put on a SPR (surface plasmon resonance) apparatus, protein kinase flow injection is performed on the sensing gold film, when the sensing gold film is bonded with polypeptides on the surface of the gold film, a new resonance angle is produced, and the size of the resonance angle is a SPR response signal.

The invention belongs to the technical field of photoelectric detections, and provides a detection system and a detection method based on SPR. The system and the method combine a spectrum scanning technique and an angle detection technique or a phase detection technique. Firstly, an SPR resonance angle is obtained by using the angle detection technique or the phase detection technique; a point light source at corresponding position of an array source is lightened while the point light sources at other positions are turned off; then the spectrum scanning technique is used to perform spectrum scanning on the lightened point light source to obtain a spectrum position of an optimum linear area; and the wavelength corresponding to the spectrum position is set as a working wavelength of a spectrum filter. The system and the method realize small-angle and high-precision continuous scanning, make full use of the spectral width of the light source, can prevent dense arrangement of the point light sources in the array source and low utilization of the optical spectrum of the light source, and effectively solve the contradiction between the dense degree of the point light sources in the array source and the scanning angle, thereby reducing product cost and simplifying process.

The invention relates to a double-layer metal waveguide coupling surface plasma resonance chip and a preparation method thereof. The preparation method comprises the steps that a first metal layer isprepared on the bottom surface of a prism, and the thickness of the first metal layer ranges from 8 nm to 50 nm; an insulating layer is prepared on the bottom surface of the first metal layer, the thickness of the insulating layer ranges from 300 nm to 1000 nm, and the refractive index of the insulating layer is smaller than that of the prism; and a second metal layer is prepared on the insulatinglayer, and the thickness of the second metal layer ranges from 8 nm to 30 nm. According to the invention, the SERS signal is greatly enhanced; SERS detection sensitivity is further improved; waveguide coupling SPR is used for exciting SERS, so the SPR resonance angle is small, and the requirement for an excitation device is low; and meanwhile, the penetration depth of an electric field in a detected object is large, a protective layer can be constructed on the surface of a metal layer, and therefore an SPR metal sensing film is better protected.

The invention provides a magnetic field measurement method based on the surface plasma resonance technology, comprising a DC source 1, a copper coil 3, a copper coil 5, a light source 7, a sensing probe 11, a processing circuit 15 and a computer system 17, and characterized by employing a magnetofluid 113 and a gold film 112 to take effect mutually to realize surface plasma resonance. A glass groove 114 is filled with the magnetofluid 113, and upper and lower surfaces are provided with magnetic fields to change resonance angles; and then the intensities of the magnetic fields are changed to change a magnetofluid microstructure to furthermore modulate surface plasma waves. The method can reduce the influence caused by medium loss, and realize magnetic field measurement of 0.0173deg / Oe and 0.054deg / Oe sensitivities respectively in a low magnetic field cope and a high magnetic field scope.

The invention discloses a photonic crystal hydrogen sensor adopting angle independence. A titanium dioxide photonic crystal is prepared on a quartz substrate, the period is adjustable, palladium-based alloy films grow on the two side faces of the photonic crystal respectively, the thickness is adjustable, laser beams enter the photonic crystal at a fixed angle (the angle is usually the photonic crystal resonant angle) after being collimated, the transmission coefficient at the moment is 0%, and the size of palladium is increased after palladium absorbs hydrogen, so that the photonic crystal is stretched, the period is prolonged, the resonance angle is moved toward the large-angle direction, and the transmission coefficient of the incidence angle position can change to 70% or above; compared with a traditional reflecting type hydrogen sensor, sensitivity can be improved by 2-3 magnitude orders.

A method for determining the excitation frequency of ultrasonic vibration ageing is characterized in that the average crystal grain size of an ageing workpiece is obtained through the test and analysis; the propagation speed of ultrasonic waves in the ageing workpiece is determined; the resonance frequency of the mesoscopic scale of crystal grains is determined; and the excitation frequency of theultrasonic vibration ageing is determined. According to the method for determining the excitation frequency of ultrasonic vibration ageing, the determined excitation frequency of the ultrasonic vibration ageing is obtained through deduction and analysis from the resonance angle of the mesoscopic scale of the crystal grains, so that ultrasonic vibration ageing treatment is conducted on the workpiece at the determined excitation frequency, the ideal ultrasonic vibration ageing effect can be obtained, and meanwhile the method for determining the excitation frequency of ultrasonic vibration ageing has the beneficial effects that the process is simple, the consumed time is short, and the efficiency is high.

A surface plasmon resonance sensor, comprising: a chip with a substrate (102) and a metal layer (103), a prism (104), an optical system (105) as a light source, and a light detector (106), wherein the metal layer (103 ) is composed of a thin-film flat portion (109) and convex portions formed of metal microparticles (110) and the like arranged at intervals. When light is incident on the metal layer (103) having such a structure, resonance angles caused by the flat portion (109) and the convex portion can be obtained. From this resonance angle, a change in the refractive index of the medium in contact with the metal layer can be detected.

A detection device including a light guide element, a sensing element, a surface plasma resonance layer and a spatial filter element is provided. The light guide element has a top surface and a bottom surface opposite to the top surface. The sensing element is disposed beside the bottom surface of the light guide element. The surface plasma resonance layer is disposed on the top surface of the light guide element and is adapted to receive biopolymers. The spatial filter element is disposed between the bottom surface of the light guide element and the sensing element. The spatial filter element has a plurality of first light channels and a plurality of second light channels. The plurality of first light channels extend in a first direction, the plurality of second light channels extend in a second direction, and the first direction and the second direction are intersected. A normal direction of the top surface of the light guide element and the second direction form an included angle β, and the included angle β corresponds to a resonant angle γ of the surface plasma resonance layer.

The invention belongs to the field of biosensors, and particularly relates to a subwavelength grating-based ultra-sensitive refractive index optical biosensor which comprises a quartz substrate, and a gold film, a fluorine-containing polymer Cytop film layer and a grating waveguide layer which are sequentially arranged on the quartz substrate. The grating waveguide layer is a surface relief grating structure made of a silicon nitride material. And a liquid sample to be detected covers the grating waveguide layer. According to the invention, the fluorine-containing polymer Cytop film is inserted between the grating and the metal film, the extremely narrow full width at half maximum of guided-mode resonance is realized, and calculation shows that the thickness of the film is changed, the influence on an incident resonance angle is small, but the full width at half maximum can be greatly improved and is about 0.0005 degrees, and the refractive index change is-4 * 10 <-5 >so that the sensitivity of the sensor can be greatly improved.

The invention provides a D-shaped micro-column mirror rotary SPR (surface plasmon resonance) sensing chip, belongs to the field of optical sensing and the field of material engineering and particularly relates to the fields of pharmaceutical research and development, disease control, food safety and the like. The D-shaped micro-column mirror rotary SPR sensing chip comprises a D-shaped micro-column mirror optical substrate, a nano-metal film, a resonant enhancement film and a base. The modulation mode of the sensing chip includes that the chip is fixed onto a rotary platform, the rotary platform is turned along a center shaft perpendicular to the plane of the D-shaped micro-column mirror optical substrate, the incidence angle of incident light of the chip is changed, and high-resolution modulation of the incidence angle of exciting light generating SPR is realized. The chip has the advantages of low cost, miniaturization, easiness in integration, capability of realizing scale production, easiness in replacement of a sensing system chip and the like, and overcomes the shortcomings of operation complexity, high cost and the like of a traditional SPR detection technology. Compared with a traditional angle modulation mode, the modulation mode of the chip can improve SPR resonance angle measurement accuracy by several times.

The invention relates to an optical scanning galvanometer of super high reflectivity, which is composed of a glass substrate layer and a highly-reflective film deposited and plated on the glass substrate layer. The highly-reflective film is composed of nine film layers, which are sequentially, according to the distance from the glass substrate layer from small to large, a first Al2O3 film layer, an Ag film layer, a second Al2O3 film layer, a first SiO2 film layer, a first high-refractivity material film layer, a second SiO2 film layer, a second high-refractivity material film layer, a third SiO2 film layer, and a third high-refractivity material film layer. The beneficial effects are as follows: the reflection bandwidth and resonance angle are increased greatly while the number of coating layers is reduced; the reflection bandwidth with the reflectivity higher than 99% is up to 300nm; and the effective resonance angle can be 0-80 degrees.