The invention belongs to the technical field of electronic science, and relates to an MEMS
capacitive switch. The MEMS
capacitive switch comprises a substrate with an
insulation layer, a
signal transmission line and ground electrodes on the two sides, a
dielectric layer is arranged on the surface of the
signal transmission line, three
metal coverage areas are arranged on the surface of the
dielectric layer, the two ground electrodes are respectively provided with a fixed
anchor point, and the two fixed anchor points support a drive
electrode structure. The drive
electrode structure is of a two-wing type
phase step structure, and comprises a first drive
electrode in the middle, a second drive electrode and a third electrode, the second drive electrode and the third electrode are arranged on the two wings, the two sides of the first drive electrode are connected with the fixed anchor points through clamped beams, the second drive electrode and the third drive electrode are connected with the first drive electrode through
cantilever beams, and the distance between the second drive electrode and the third drive electrode and the
signal transmission line is larger than the distance between the first drive electrode and the signal transmission line. The areas of the three drive electrodes are increased in sequence. Three work frequency bands can be achieved, and the MEMS
capacitive switch has the advantages of being low in
insertion loss, high in isolation degree and low in drop-down
voltage and can be applied to a radio-frequency or
microwave communication
system.