The invention provides a three-dimensional
solid needle tip flexible micro-
electrode array and a making method thereof. The micro-
electrode array comprises a split insulating column array wrapped in an insulating flexible substrate, an
electrode and an
electricity conducting lead, wherein the head of an insulating column is in a shape of a needle tip and wrapped by the electrode, the needle tip electrode is exposed outside, the
electricity conducting lead is paved along the insulating column and the insulating flexible substrate, one end of the
electricity conducting lead is connected with the electrode, and the other end is exposed outside. The insulating column is of a
solid structure, so that the electrode can be pierced into a stimulation part and effectively provide electric stimulation and
record. In order to make the three-dimensional
solid needle tip flexible micro-
electrode array,
silicon materials are treated by a
silicon dicing-
corrosion process for making the three-dimensional solid needle tip flexible micro-
electrode array. The three-dimensional solid needle tip flexible micro-
electrode array provided by the invention can be used for nerve electric stimulation and
record and can be widely used in the fields of nerve
disease treatment, nerve
rehabilitation, neurobiology
basic research and the like.