The invention relates to a piezoelectric-static composite micro
machine vibration energy collector and a manufacture method of the collector, and relates to an energy collecting device. The piezoelectric-static composite micro
machine vibration energy collector comprises a
chip main body and a
chip external circuit, wherein the
chip main body is of a three-layer laminated structure, and the chip main body comprises an upper glass piece device, an SOI (
Silicon On Insulator) piece device, a lower glass piece device, a piezoelectric
ceramic wafer device, a piezoelectric
ceramic wafer electrode and a variable
capacitance plate electrode. The chip
external circuit is provided with a rectification circuit, a
filter capacitor, a first switch, a second switch and an
energy storage capacitor, or is provided with a rectification circuit, a
filter capacitor, a first switch, a second switch and an
energy storage capacitor and a variable
capacitance plate starting power supply. The manufacture method comprises the following steps of: manufacturing the lower glass piece device; manufacturing the SOI piece device; manufacturing the upper glass piece device; assembling; and connecting the chip
external circuit. According to the collector and the manufacture method, the process is simple, the defects of poorer device stability and performance and the like caused by,manufacturing a PZT (Piezoelectric
Transducer) by using the traditional
sol gel can be overcome, and
wide band and high efficiency collection of energy can be realized.