Phase detector based on micro-mechanical silicon-based cantilever beam and detection method

Abstract

The invention discloses a phase detector based on a micro-mechanical silicon-based cantilever beam and a detection method. The phase detector comprises a silicon substrate (1), a source (2) and a drain (3), wherein the source (2) and the drain (3) grow on the surface of the silicon substrate (1) and are used for outputting saturation current; the source (2) is opposite to the drain (3); a cantilever beam anchor area (6) is arranged outside the source (2) or the drain (3); a gate oxide layer (4) is bridged between the source (2) and the drain (3); and a gate (5) is arranged on the surface of the gate oxide layer (4). The method comprises the following steps of: when direct current offset is loaded to a pull-down electrode (8) and a cantilever beam (7) is pulled down and contacted with the gate (5), simultaneously loading two microwave signals with the same frequency and certain phase difference to the gate (5); and filtering a high-frequency signal from the saturation current of the drain (3) through a blocking capacitor and a low-pass filter, and thus obtaining a current signal with phase difference information. The invention has the advantages of simple structure and convenience for measurement.

Description

technical field [0001] The invention proposes a phase detector based on a micromechanical silicon-based cantilever beam, which belongs to the technical field of microelectromechanical systems (MEMS). Background technique [0002] With the development of radar technology, especially after the emergence of newer technologies such as phased array radar, phased array antenna and accelerator, the measurement of phase shift is becoming more and more important. Existing methods for phase detection include the following: using diode detection, using a multiplier structure and using a vector algorithm to realize phase detection. The disadvantage of the above methods is that they all require a relatively complicated structure. With the development of microelectronics technology, modern personal communication systems and radar systems require microwave phase detectors with simple structure, small size and low power consumption. The MEMS system has the advantages of small size, low pow...

AI Technical Summary

Problems solved by technology

The existing phase detection methods are as follows: use diode detection, use multiplier structure and use vector algorithm to realize phase detection. The disadvantage of the above methods is that they all require relatively complicated structures

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