The invention discloses a non-contact optical component surface profile measuring device and a method thereof. The device includes a host computer, an electronic control module, a probe supporting structure, an optical probe, a to-be-measured element, an element clamping device, a Z-axis electric translation stage, a dial indicator and an XY-axis electric translation stage; and the optical probe projects a focusing
light spot on the surface of the to-be-measured element, and the
light spot forms a three-hole
bright spot through a three-hole diaphragm after being reflected back to an object lens. As the distance between the bright spots is related to the height position of the
light spot, surface thicknesses can be obtained by collecting images in real time to calculate the distance betweenthe bright spots; in order to increase a height measuring range, the Z-axis electric translation stage can be used to move the to-be-measured element up and down, and the dial indicator can be used to measure the position of the element; and compared with traditional contact surface profile measuring systems, the device has the
advantage of being non-contact, so that influences on the surface ofthe element can be avoided, and large measuring scope and high precision can be obtained.