266 results about "Excimer lamp" patented technology

A system and method for processing substrates, such as porous low-K semiconductor wafers, using ultraviolet (UV) radiation is disclosed. The substrates are first cleaned in a wet processing module and then dried in a UV module under reduced pressure and at a temperature below 100 C., preferably at or below 80 C. A robot module transfers the substrates from the wet processing module to the UV module. The UV module can include a pulse xenon excimer lamp providing incoherent vacuum ultraviolet (VUV) radiation at 172 nm.

A system for measuring the amount of sulfur in a sample is provided comprising a UV fluorescence detector for determining the sulfur dioxide content of the sample and an analyzer for receiving the sulfur dioxide content of the sample from the UV fluorescence detector for evaluating the content of species under investigation and for quantifying the sulfur content in the sample. The UV fluorescence detector comprising an excimer lamp comprising a quartz envelope and a krypton-chloride excimer gas mixture therein. The quartz envelope comprising the emission aperture substantially perpendicular to the longitudinal axis of the quartz envelope for transmitting photons there through, an inner electrode comprising a conductive solid metallic rod having effective contact with the interior cylindrical surface of the quartz envelope, and an outer electrode comprising a conductive solid metallic housing having effective contact between the outer electrode and the exterior cylindrical surface of the quartz envelope, such that the quartz envelope is bounded on the interior cylindrical surface by the inner electrode and on the exterior cylindrical surface by the outer electrode. Further, the outer electrode may comprise a first member and a second member symmetrically divided along the longitudinal axis of the quartz envelope, such that when the two members are joined together to encapsulate and hold the quartz envelope there between with an interior diameter closely coinciding with the outer diameter of the quartz envelope. In another embodiment of the present invention, a UV fluorescence method for determining the sulfur dioxide content of a sample is provided.

The invention discloses a device for treating waste water with a microwave electrodeless excimer lamp and a gas distributing system for the electrodeless excimer lamp in the device. A waster water treatment pond of the device is arranged below the shell of a microwave generator; 1 / 5 to 1 / 3 of the electrodeless excimer lamp is fixed in a resonant cavity, and the part of the electrodeless excimer lamp, which is not arranged in the resonant cavity, is sheathed with a quartz casing tube with a closed lower end; the microwave generator comprises a fan and a cooling copper tube which are used for cooling the resonant cavity, the fan is fixed on the inner side wall of the shell, and the cooling copper tube is welded around the external surface of the shell; the gas distributing system for the electrodeless excimer lamp is also provided with a cold well in front of a vacuum pump; and the pipeline, which is connected with a third port of a second three-way valve, is connected with a gas bottle, a gas storage bottle, a pressure indicating meter, a buffer bottle and a gas filling pipeline in parallel. The vacuum gas distributing system has a high vacuum degree, and can fill different gases according to the specific ultraviolet wavelength required by waste water treatment, so that the electrodeless excimer lamp can emit ultraviolet light with high intensity and high light effect.

A phototherapy device using excimer radiation in which, by skillful use of the individual peak wavelength of 308 nm and of the emission range of shorter wavelengths than 308 nm, the therapy effect is enhanced, and in which, at the same time, harm can be reduced is achieved using a XeCl excimer lamp and in which diseased sites of skin disorders are irradiated with UV-B radiation with an optical filter being used for changing the spectral shape of the UV-B radiation with which the diseased sites are irradiated.

Provided is an excimer lamp having an outer electrode that can be manufactured at low cost with reliability. The excimer lamp comprises a discharge tube 10 having an inner tube 11 and an outer tube 12, formed as coaxial cylinders. A high voltage is applied between an inner electrode 15 inside the inner tube 11 and the outer electrode 14 arranged on outside surface of the outer tube 12 to cause the gas encapsulated in a space 15 between the inner tube 11 and the outer tube 12 to perform discharge light emission. The outer electrode 14 is formed by transferring a metal electrode pattern from a transferring paper to the surface of the outer tube 12, and baked. In an embodiment, the outer electrode 14 is a mesh having an open area ratio of 70% or more. The outer electrode 14 is formed of a metal or a metal alloy made of two or more metals out of gold, silver, platinum, nickel, or chromium.

The invention relates to a process for the surface-finishing of plastics substrates, preferably polymethyl methacrylate (abbreviated hereinafter to PMMA), by coating with a clear coating material comprising nanoparticles (hereinafter nanocomposite coating material) and irradiating the same with vacuum UV light of wavelength 172 nm from an Xe* excimer lamp. This process leads to excellent adhesion of the coating substance on the substrate. It is moreover possible to give the coating surface a topography. The mechanical and chemical properties and performance characteristics of uncoated substrate are substantially exceeded when a substrate is coated in this way.

The invention provides an ultraviolet irradiation set which can fill the non-active gas rapidly around the quasi-molecule lamp and comprises: a plurality of quasi-molecule lamps enclosed with the discharging gas in a sealed space formed in a discharging container and forming a pair of electrodes on the outer surface of the capacitor isolated by the sealed space; a lampshade surrounding the plurality of quasi-molecule lamps, opening at one direction of the vertical direction and a gas supply mechanism for supplying the non-active gas to the interior of the lampshade. The ultraviolet irradiation set is characterized in that in the lampshade the space shielding body is disposed in a space out of the space of the quasi-molecule lamp.

Provided is an excimer lamp having a simple and small structure, which can be used in, for example, a refrigerator, and can emit ultraviolet light at a wavelength effective in disinfection processing without generating ozone in a surrounding atmosphere, without leaving gas impurities and moisture in an electrical discharge vessel, and without causing a steep illuminance decrease. A fluorescent substance is disposed on an inner face of the electrical discharge vessel for converting ultraviolet light emitted upon excimer electrical discharge of a light emitting gas to ultraviolet light having a longer wavelength. An inner electrode has a coil shape. A tight winding portion is formed at a certain area of the interior electrode which extends in the center axial direction of the interior electrode such that the coil is tightly wound in the tight winding portion. A getter is attached to the tight winding portion.

Provided is a small-sized less expensive light-intensity measuring apparatus for measuring a xenon excimer lamp that radiates a light beam having a central wavelength of 172 nm for an intensity.The light-intensity measuring apparatus of the present invention comprises a photoelectric converting means 23, preferably a photodiode, having photosensitivity in the range of from 800 to 1,000 nm, an operating means 25 for relatively determining the intensity of a light beam having a central wavelength of 172 nm depending upon an output of the photoelectric converting means 23 and a transmitting means 26 for transmitting the light intensity determined with the operating means 25.

Excimers are formed in a high pressure gas by applying a potential between a first electrode (14, 214) and a counter electrode (25, 226) so as to impose an electric field within the gas, or by introducing high energy electrons into the gas using an electron beam. A phosphor for converting the wavelength of radiation emitted from the formed excimers is disposed within the gas and outside a region (62, 162) where the excimers are expected to be formed, so as to avoid degradation of the phosphor.

The invention discloses a preparation method of a super-matte floor. The preparation method of the super-matte floor comprises the following steps that 1, a semi-finished product floor is manufactured; 2, super-matte paint is applied to the surface of the floor and semi-cured; 3, the semi-cured floor surface is irradiated with a UV excimer lamp; and 4, the floor is isolated with nitrogen gas for 2-30 s. According to the preparation method of the super-matte floor, the super-matte floor with the super-matte effect can be prepared.

A decomposition apparatus is provided that includes an excimer lamp emitting UV light for decomposing an organic compound and a decomposition container provided with the excimer lamp for decomposing the organic compound in a liquid or a gas. In the decomposition apparatus, since the UV light irradiated from the excimer lamp is emitted to the liquid or the gas, the organic compound in the liquid or the gas can be decomposed easily by the simple decomposition apparatus and method. The decomposition apparatus and method are effective to decompose the organic compound, such as dioxin (polychlorinated dibenzo-para-dioxin), PCB (polychiorinated biphenyl), trichloroethylene or the like, polluting the air or water to purify the environment.

The invention discloses a device and a method for waste gas photocatalytic degradation using an electrodeless excimer lamp. A used reactor comprises a three quartz medium layer, an inner electrode, an outer electrode and a high-voltage power supply, wherein the three-layer quartz medium layer comprises a first quartz tube, a second quartz tube and a third quartz tube, which are coaxial and are sequentially arranged from inside to outside; the inner cavity of the first quartz tube is a zone I reaction zone; a hermetic circular cavity is formed between the second quartz tube and the first quartz tube, and is used as a gas filling zone II; and a zone III reaction zone is formed between the third quartz tube and the second quartz tube. During waste gas photocatalytic degradation, gas in the gas filling zone II is excited to generate excimer UV-light, and then sends radiation towards the zone I reaction zone and the zone III reaction zone; and the waste gas to be degraded all passes through the zone I reaction zone, or all passes through the zone III reaction zone, or split-flows into the zone I reaction zone and the zone III reaction zone, and is then degraded under the action of the excimer UV-light radiation.

A first excimer lamp includes: a quartz glass-made light-emitting tube containing an excimer emission gas sealed therein; and a pair of electrodes for generating dielectric barrier discharge. One of the pair of electrodes is disposed in the inner space of the light-emitting tube so as to extend in the direction of a tube axis of the light-emitting tube, and the other one of the pair of electrodes is embedded in the tube wall of the light-emitting tube so as to extend in the direction of the tube axis of the light-emitting tube. The one electrode is electrically connected to a conductive foil hermetically embedded in an end portion of the light-emitting tube.

The invention discloses a production method of a skin-touch floor. The production method comprises the following steps: (1) manufacturing a semi-finished floor plain plate; (2) sanding or polishing, coloring, applying an adhesive primer and filling an ultraviolet photocuring primer in sequence; (3) coating a matte primer, then coating an ultra-matte or matt UV (ultraviolet) photocuring finishing coat, and curing by using a UV mercury lamp; (4) coating one or more skin-feeling UV light curing paint on the cured semi-finished product floor plain board; (5) using an LED lamp and an excimer lamp to jointly carry out extinction pre-curing on the semi-finished product floor plain plate which is coated with the skin-feeling UV light-cured paint in a rolling manner; and (6) carrying out full curing by using a UV mercury lamp to finally obtain an ultra-matte or light-free floor finished product. The skin feeling and matte effect of the floor are achieved through multiple means, and therefore the texture and the visual sense are improved.

The invention provides an excimer lamp apparatus that has advanced start-up properties, in terms of start-up time and start-up stability, in the presence of voltage variations, without any trigger electrode, by arranging a pair of electrodes along the entire length of a discharge container. An ultra-violet emitter is arranged to irradiate discharge gas in the discharge container with ultra-violet light, and the excimer lamp is started up by means of exposure with ultra-violet light from the ultra-violet emitting unit.

The invention discloses a device for treating waste water with a microwave electrodeless excimer lamp and a gas distributing system for the electrodeless excimer lamp in the device. A waster water treatment pond of the device is arranged below the shell of a microwave generator; 1 / 5 to 1 / 3 of the electrodeless excimer lamp is fixed in a resonant cavity, and the part of the electrodeless excimer lamp, which is not arranged in the resonant cavity, is sheathed with a quartz casing tube with a closed lower end; the microwave generator comprises a fan and a cooling copper tube which are used for cooling the resonant cavity, the fan is fixed on the inner side wall of the shell, and the cooling copper tube is welded around the external surface of the shell; the gas distributing system for the electrodeless excimer lamp is also provided with a cold well in front of a vacuum pump; and the pipeline, which is connected with a third port of a second three-way valve, is connected with a gas bottle, a gas storage bottle, a pressure indicating meter, a buffer bottle and a gas filling pipeline in parallel. The vacuum gas distributing system has a high vacuum degree, and can fill different gases according to the specific ultraviolet wavelength required by waste water treatment, so that the electrodeless excimer lamp can emit ultraviolet light with high intensity and high light effect.