The present invention discloses a back gold
chip packaging structure and a packaging method thereof, belonging to the technical field of
semiconductor packaging. A plurality of
chip electrodes and front protective
layers are arranged at the front surface of a
silicon-based body, each front protective layer is provided with one front protective layer opening to
expose chip electrodes again, and
metal bump are arranged at the surfaces of the chip electrodes. The back surface of the
silicon-based body is provided with a back
gold layer, the back
gold layer is in bonding connection with the back surface of the
silicon-based body through a back gold bonding layer. A
plastic packaging layer packages exposed surfaces of the back
gold layer and the silicon-based body, and a
plastic packaging layeropening is arranged to
expose the exposed surface of the back surface of the back gold layer. The
wafer-level back gold chip packaging structure and the packaging method thereof are simple in packaging flow, the silicon face
processing technology, the back gold technology, the
plastic packaging material
ablation and the de-bonding technology are completed on a
wafer, and therefore, the
wafer-level back gold chip packaging structure and the packaging method thereof accord with future development direction of
semiconductor manufacturing.