The invention relates to a double work-piece stage exchanging device based on single / double drive stepping scanning, and a method thereof, and belongs to the technical field of
semiconductor manufacturing equipment. The device comprises a
base station, and work-piece stages, wherein the work-piece stages are respectively positioned on a pre-alignment working position and an
exposure working position. 4 Y-direction linear movement units and 2 X-direction linear movement units are pre-arranged on a balancing
mass block, and concurrently Y-direction transition linear movement units are arranged between the pre-alignment working position and the
exposure working position. The movements of the work-piece stages between the pre-alignment area and the
exposure area are completed through the docking of the
linear motor stators of the Y-direction linear movement units and the Y-direction transition linear movement units so as to achieve the three-step work-piece stage exchanging. The first Y-direction
linear motor mover is fixedly connected with the first work-piece stage, and the fourth Y-direction
linear motor is fixedly connected with the second work-piece stage. According to the present invention, the three-step work-piece stage exchanging is adopted during the stage exchanging process so as to improve the stage exchanging efficiency; the device has characteristics of small movement
inertia, short stabilization time, and avoidance of the clamp mechanism of the work-piece stage during the concrete device implementation process, and has advantages of compact structure, large structure stiffness, and the like.