78results about How to "Shorten the light path" patented technology

The present invention provides a projection display comprising an illumination system comprising at least one laser source unit and configured and operable for producing one or more light beams; a spatial light modulating (SLM) system accommodated at output of the illumination system and comprising one or more SLM units for modulating light incident thereon in accordance with image data; and a light projection optics for imaging modulated light onto a projection surface. The illumination system comprises at least one beam shaping unit comprising a Dual Micro-lens Array (DMLA) arrangement formed by front and rear micro-lens arrays (MLA) located in front and rear parallel planes spaced-apart along an optical path of light propagating towards the SLM unit, the DMLA arrangement being configured such that each lenslet of the DMLA directs light incident thereon onto the entire active surface of the SLM unit, each lenslet having a geometrical aspect ratio corresponding to an aspect ratio of said active surface of the SLM unit.

Subjects for the invention are to provide a light-modulating element having an elevated energy efficiency while preventing a decrease in contrast at low cost without using a display technique employing a waveguide or lightguide plate, and to provide a display element capable of producing high-quality display images and an exposure element capable of exposure treatment. In the invention, the light-modulating element comprises: a total-reflection optical member 2 having such a property that at least part of planar incident light introduced into the light-modulating element is totally reflected at an interface (total reflection plane) 22 of a layer constituted by the light-modulating element and the incident light does not substantially go out through the side opposite to the incident-light introduction side; and light-coupling elements 6 which are disposed on the total reflection plane 22 side of the total-reflection optical member 2 and serve to selectively couple with the incident light and take out the same from the total reflection plane 22.

An image sensor includes a substrate, at least an optical device, at least a dielectric layer, and at least a wave-guide tube disposed upon the optical device. The wave-guide tube has an optical barrier disposed on a sidewall thereof and a filter layer filled in the wave-guide tube. The structure of the wave-guide tube has the advantages of shortening light path, focusing, and preventing undesirable crosstalk effect between different optical devices.

Subjects for the invention are to provide a light-modulating element having an elevated energy efficiency while preventing a decrease in contrast at low cost without using a display technique employing a waveguide or lightguide plate, and to provide a display element capable of producing high-quality display images and an exposure element capable of exposure treatment.

Systems and methods for EUV Light Source metrology are disclosed. In a first aspect, a system for measuring an EUV light source power output may include a photoelectron source material disposed along an EUV light pathway to expose the material and generate a quantity of photoelectrons. The system may further include a detector for detecting the photoelectrons and producing an output indicative of EUV power. In another aspect, a system for measuring an EUV light intensity may include a multi-layer mirror, e.g., Mo / Si, disposable along an EUV light pathway to expose the mirror and generate a photocurrent in the mirror. A current monitor may be connected to the mirror to measure the photocurrent and produce an output indicative of EUV power. In yet another aspect, an off-line EUV metrology system may include an instrument for measuring a light characteristic and MoSi2 / Si multi-layer mirror.

The invention discloses a micro-spectrum analysis method and device based on Fresnel zone plate, wherein intensities of incoming lights with different wavelengths are detected in axial direction in adoption of axial light splitting characteristics of Fresnel zone plate, thereby realizing spectrum analysis / detection. An axial light-splitting component consisting of Fresnel zone plates is regarded as an upper movable light-splitting structure; a single static photoelectric detection unit and a drive circuit are regarded as lower static detection and active drive structure, wherein the two structures are connected via a bridge-like support structure. Optical signal is firstly radiated to an upper Fresnel zone plate to be focused to a photoelectric detection unit on lower layer; the drive circuit longitudinally pulls down the Fresnel zone plate to make focusing points with different wavelengths orderly lie on the photoelectric detection unit; thereafter, the optical signal is converted into electric signal, and incoming light spectrum is therefore acquired in adoption of subsequence signal treatment and algorithm analysis. Further, this invention can be achieved using MEMS technique and optical micro-machining technique, thereby greatly shortening light path, and achieving compacter device component structure, higher integration degree as well as smaller dimension.

The invention discloses a small structured light illumination super-resolution microscopic imaging system which includes a laser light source, a collimating lens, a rotary light baffle module, a dichroic mirror, a filter plate, a microscopic objective lens, a carrier table, an imaging lens, a photoelectric detector and a synchronous control system. The light emitted by the laser light source is collimated by the collimating lens into parallel beams, the parallel beams are partially blocked by the rotary light baffle module, divided by the dichroic sheet and filtered by the filter plate placedon the entrance pupil surface of the microscopic objective lens, and then, structured light illumination is formed on the surface of a sample on the carrier table through the microscopic objective lens. The imaging lens and the photoelectric detector are placed behind the dichroic mirror and used for forming an image of fluorescence distribution on the surface of the sample. The synchronous control system is connected in a control manner with the rotary light baffle module, the carrier table and the photoelectric detector. The small structured light illumination super-resolution microscopic imaging system has the advantages of small size, compact structure, low cost, and the like, and is easy to carry. The application scope of structured light illumination super-resolution imaging is greatly extended.

An electron beam emitted from an electron gun (G) forms a reduced image on a sample (S) through a non-dispersion Wien-filter (5-1), an electromagnetic deflector (11-1), a beam separator (12-1), and a tablet lens (17-1) as an objective lens. The beam separator (12-1) is configured such that a distance by which a secondary electron beam passes through the beam separator is approximately three times longer than a distance by which a primary electron beam passes through the beam separator. Therefore, even if a magnetic field in the beam separator is set to deflect the primary electron beam by a small angle equal to or less than approximately 10 degrees, the secondary electron beam can be deflected by approximately 30 degrees, so that the primary and secondary electron beams are sufficiently separated. Also, since the primary electron beam is deflected by a small angle, less aberration occurs in the primary electron beam. Accordingly, since a light path length of a primary electro-optical system, it is possible to reduce the influence of space charge and the occurrence of deflection aberration.

A rear projection type projector is provided. An optic axis of modulated light to be projected to a screen projection surface is slanted to a normal N-N of the screen projection surface and projected to a trapezoidal range ABCD housing the actual projection range EFGH. A reflector is disposed in the rear of the screen projection surface, a projection unit projecting modulated light is placed on a side of the screen projection surface, and the modulated light is projected towards the rear, and then reflected at the reflector. Further, image information is corrected and a distortion-free image is projected.

Provided may be a treatment method to remove defects created on the surface of a substrate, a method of fabricating an image sensor by using the treatment method, and an image sensor fabricated by the same. The treatment method may include providing a semiconductor substrate including a surface defect, providing a chemical solution to a surface of the semiconductor substrate, and removing the surface defect by consuming the surface of the semiconductor substrate and forming a chemical oxide layer on the semiconductor substrate.

The present invention relates to an optical switch and its manufacturing method. In the present invention, the base layer has an input terminal for receiving an optical signal and an output terminal for selectively receiving the optical signal from the input terminal to transmit the optical signal to the outside. In a direction crossing the optical signal, the micro-mirrors are respectively movably located on the optical signal path receiving the optical signal from the input end, so as to selectively change the optical signal from the first optical path to the second optical path. MEMS actuating elements are formed in a layer above the optical path and are connected to the micromirrors, respectively, so as to drive the micromirrors in a direction crossing the optical signal.

A top-emitting organic electroluminescent display panel, a manufacturing method, and a display device. The top-emitting organic electroluminescent display panel comprises: a substrate, a layer of white organic light emitting diodes and a thin film encapsulation layer arranged on the substrate in sequence. The thin film encapsulation layer comprises at least two inorganic thin film layers and at least one organic thin film layer. At least one organic thin film layer is a color filter layer, the color filter layer being arranged between the at least two inorganic thin film layers. Since one of the organic thin film layers in the thin film encapsulation layer is a color filter layer, the color filter layer does not have to be arranged above the thin film encapsulation layer separately, thus reducing the number of film lavers, simplifying the film layer structure, reducing manufacturing costs, and improving the luminous efficiency and the display effect.