Micro-spectrum analysis method and device based on Fresnel zone plate

Abstract

The invention discloses a micro-spectrum analysis method and device based on Fresnel zone plate, wherein intensities of incoming lights with different wavelengths are detected in axial direction in adoption of axial light splitting characteristics of Fresnel zone plate, thereby realizing spectrum analysis / detection. An axial light-splitting component consisting of Fresnel zone plates is regarded as an upper movable light-splitting structure; a single static photoelectric detection unit and a drive circuit are regarded as lower static detection and active drive structure, wherein the two structures are connected via a bridge-like support structure. Optical signal is firstly radiated to an upper Fresnel zone plate to be focused to a photoelectric detection unit on lower layer; the drive circuit longitudinally pulls down the Fresnel zone plate to make focusing points with different wavelengths orderly lie on the photoelectric detection unit; thereafter, the optical signal is converted into electric signal, and incoming light spectrum is therefore acquired in adoption of subsequence signal treatment and algorithm analysis. Further, this invention can be achieved using MEMS technique and optical micro-machining technique, thereby greatly shortening light path, and achieving compacter device component structure, higher integration degree as well as smaller dimension.

Description

technical field [0001] The invention relates to a micro-spectral analysis method and device based on a Fresnel zone plate. More specifically, the invention utilizes the axial light splitting of the Fresnel zone plate to realize spectrum analysis. Background technique [0002] With the continuous development and maturity of MEMS (micro-electromechanical systems) technology and micro-optical devices and system technologies, many micro-optical components are widely used in various instruments, such as digital micromirror devices (DMDs), grating light valves (GLVs) etc., making the instrument more and more miniaturized, and has achieved great success in commercial applications. [0003] In the field of miniature spectral analysis instruments, although there are corresponding products abroad, there are certain shortcomings and deficiencies. For example, the finger-up spectrometer of Steag Microparts in Germany uses a concave grating. Due to the small effective diffraction area o...

AI Technical Summary

Problems solved by technology

For example, the finger-up spectrometer of Steag Microparts in Germany uses a concave grating. Due to the small effective diffraction area on the grating, the utilization rate of light energy is low and the processing is difficult.

The handheld light spectrometer of Ocean Optic Company in the United States does not change the structure of traditional spectroscopic instruments, and the optical components are more complicated.

In addition, digital micromirror technology is used, but the processing technology is complicated, the yield rate is low, and the repeatability is poor.

In the domestic literature, there is no micro-spectral analysis device using Fresnel zone plate as a spectroscopic element.

Images