The invention discloses a nanoscale precision piezoelectric driving
linear displacement table which comprises a matrix, a sliding rail, a driving base, a flexible
mass block, a piezoelectric driving unit, a
position sensor unit and a stick-slip friction
assembly. The flexible
mass block and the piezoelectric driving unit are matched through a spherical contact and a spherical
concave surface, a self-positioning function is realized, it can be effectively guaranteed that a
stress point does not deviate, and the requirements for
machining precision and assembling precision are lowered. Comparedwith a traditional
point contact or plane
contact mode, the contact area is increased, and the service life is prolonged. A flat bridge part on the flexible
mass block has an elastic function and canaccept certain deformation, so that the influence of installation errors on plane contact is effectively eliminated. In addition, the whole structure of the nanoscale precision piezoelectric driving
linear displacement table is simple and compact, the size is small, the sliding rail is driven in a stick-slip mode without up-down friction, and only single friction in the stick-slip motion exists, so that the
power loss and the requirements for other parts are effectively reduced, the working stability is good, and the application range is wide.