Nanoscale precision piezoelectric driving linear displacement table

Abstract

The invention discloses a nanoscale precision piezoelectric driving linear displacement table which comprises a matrix, a sliding rail, a driving base, a flexible mass block, a piezoelectric driving unit, a position sensor unit and a stick-slip friction assembly. The flexible mass block and the piezoelectric driving unit are matched through a spherical contact and a spherical concave surface, a self-positioning function is realized, it can be effectively guaranteed that a stress point does not deviate, and the requirements for machining precision and assembling precision are lowered. Comparedwith a traditional point contact or plane contact mode, the contact area is increased, and the service life is prolonged. A flat bridge part on the flexible mass block has an elastic function and canaccept certain deformation, so that the influence of installation errors on plane contact is effectively eliminated. In addition, the whole structure of the nanoscale precision piezoelectric driving linear displacement table is simple and compact, the size is small, the sliding rail is driven in a stick-slip mode without up-down friction, and only single friction in the stick-slip motion exists, so that the power loss and the requirements for other parts are effectively reduced, the working stability is good, and the application range is wide.

Description

technical field [0001] The invention relates to the technical field of nanoscale precision displacement platforms, in particular to a nanoscale precision piezoelectric driven linear displacement platform. Background technique [0002] With the continuous development and updating of technology, the demand for precision operation on the microscopic scale is increasing day by day. Therefore, the nano-micro-drive technology based on the piezoelectric principle has been vigorously developed, and has been widely used in various high-level fields such as medicine, scientific research, aerospace, and manufacturing The sophisticated field provides strong technical support for human experimental research and product manufacturing in the microscopic field. [0003] Piezoelectric ceramic driving is the basic driving method in the field of microscopic operation. It uses the inverse piezoelectric effect of piezoelectric ceramics. By applying an electric field to piezoelectric ceramics, it...

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Problems solved by technology

[0004] At present, the existing stick-slip driving structure has a large volume, and some structures are relatively complex, and there is still a lot of room for improvement in miniaturization; in addition, the preload adjustment method is also very different, generally there is up and down friction, There is generally relative sliding between the pre-pressed contact surface and the friction parts during work, which imposes requirements on the wear resistance of the parts and generates additional power loss for the stick-slip movement; Good fit, easy to form point contact, so during long-term use, wear or pits will appear on the friction surface, affecting the use accuracy and life

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