The invention relates to the technical field of MEMS light modulators, in particular to an MEMS
blazed grating light modulator and an array. The
shutter type MEMS large-rotation-corner adjustable
blazed grating light modulator comprises a
silicon substrate, an insulating layer, a movable frame, flexible beams, a
grating mirror plane, double-layer comb tooth drive structures, an elastic
cantilever beam, a bias
voltage exerting device and a plurality of columns, wherein the insulating layer, the movable frame, the flexible beams, the
grating mirror plane, the double-layer comb tooth drive structures, the elastic
cantilever beam, the bias
voltage exerting device and the columns are arranged on the
silicon substrate. One side of the
grating mirror plane is fixed to the surface of the substrate through supporting beams and two of the columns, and the other side of the grating mirror plane is connected with the movable frame through a deformation beam and driven by the double-layer comb tooth drive structures. The bias
voltage exerting device can exert drive voltages at different levels and different frequencies between movable teeth and fixed teeth, and therefore the movable teeth can deflect and move to drive the movable frame, and the movable frame pulls the grating mirror plane to defect through the deformation beam. Due to the structure, an MEMS
blazed grating has the advantages of being large in rotation angle, adjustable in continuous analog, good in controllable capacity, high in
diffraction efficiency, high in tuning efficiency and capable of preventing adhesion failure.