Two-degree-of-freedom high-speed parallel scanning platform and perpendicularity error calibration method thereof
A technology of scanning platform and degree of freedom, which is applied in the field of precision optical scanning equipment, can solve the problems of large moment of inertia and frictional moment, high precision of shafting, high cost, etc., achieve large stiffness and deflection angle, and avoid error amplification effect , the effect of strong bearing capacity
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[0036] The technical solutions of the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the specification of the present invention.
[0037] For reasons of convenience only, in the following description, specific directional terms, such as "up", "down", "left", "right", etc., are used with reference to the corresponding drawings and It should not be regarded as a limitation on the present invention, and when the defined direction of the drawings changes, the directions indicated by these words should be interpreted as correspondingly different directions.
[0038] Such as figure 1 with figure 2 As shown, a two-degree-of-freedom high-speed parallel scanning platform provided by the embodiment of the present invention includes a casing 1 and a linear drive mechanism installed in the casing 1 , a mirror axis mechanism 3 , a joint bearing 4 and a PSD position sensor 5 .
[0039] Specifically, as ...
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