The invention relates to a phase-shift
diffraction / interference
measuring instrument and a phase-shift
diffraction / interference measuring method for detecting a three-dimensional shape of a
microsphere, and belongs to the technical field of optical detection of three-dimensional shapes of space objects. Through the instrument and the method, the problems that the detection range of
single measurement is narrow and an ideal sphere which serves as a
reference surface is difficult to manufacture in the conventional way for detecting the
microsphere are solved. The
measuring instrument comprises a short-coherence
laser, a
half wave plate, a
polarizer, a first quarter wave plate, a second quarter wave plate, a right angle
delay prism, a
polarization beam splitter, a polarization analyzer, an
optical fiber coupler, a single-mode single-
core optical fiber, a right angle phase-shift
prism, a converging lens, a pinhole sheet, a knife-edge reflector, a
microscope objective, a large-size
charge coupled device (CCD) and a computer. According to the measuring method, a light path is formed by the
measuring instrument, and the detected
microsphere is adjusted to rotate so as to acquire shape parameters of the corresponding microsphere to ensure that the shape of the microsphere is detected. The measuring instrument and the measuring method are suitable for detecting three-dimensional shapes of microspheres.