136 results about "X-ray optics" patented technology

Disclosed is a natural-superlattice homologous single-crystal thin film, which includes a complex oxide which is epitaxially grown on either one of a ZnO epitaxial thin film formed on a single-crystal substrate, the single-crystal substrate after disappearance of the ZnO epitaxial thin film and a ZnO single crystal. The complex oxide is expressed by the formula: M1M2O3 (ZnO)m, wherein M1 is at least one selected from the group consisting of Ga, Fe, Sc, In, Lu, Yb, Tm, Er, Ho and Y, M2 is at least one selected from the group consisting of Mn, Fe, Ga, In and Al, and m is a natural number of 1 or more. A natural-superlattice homologous single-crystal thin film formed by depositing the complex oxide and subjecting the obtained layered film to a thermal anneal treatment can be used in optimal devices, electronic devices and X-ray optical devices.

A method and apparatus for detecting radiation including x-ray, gamma ray, and particle radiation for radiographic imaging, and nuclear medicine and x-ray mammography in particular, and material composition analysis are described. A detection system employs fixed or configurable arrays of one or more detector modules comprising detector arrays which may be electronically manipulated through a computer system. The detection system, by providing the ability for electronic manipulation, permits adaptive imaging. Detector array configurations include familiar geometries, including slit, slot, plane, open box, and ring configurations, and customized configurations, including wearable detector arrays, that are customized to the shape of the patient. Conventional, such as attenuating, rigid geometry, and unconventional collimators, such as x-ray optic, configurable, Compton scatter modules, can be selectively employed with detector modules and radiation sources. The components of the imaging chain can be calibrated or corrected using processes of the invention. X-ray mammography and scintimammography are enhanced by utilizing sectional compression and related imaging techniques.

An improved microcalorimeter-type energy dispersive x-ray spectrometer provides sufficient energy resolution and throughput for practical high spatial resolution x-ray mapping of a sample at low electron beam energies. When used with a dual beam system that provides the capability to etch a layer from the sample, the system can be used for three-dimensional x-ray mapping. A preferred system uses an x-ray optic having a wide-angle opening to increase the fraction of x-rays leaving the sample that impinge on the detector and multiple detectors to avoid pulse pile up.

A diffracting x-ray optic for accepting and redirecting x-rays. The optic includes at least two layers, the layers having a similar or differing material composition and similar or differing crystalline orientation. Each of the layers exhibits a diffractive effect, and their collective effect provides a diffractive effect on the received x-rays. In one embodiment, the layers are silicon, and are bonded together using a silicon-on-insulator bonding technique. In another embodiment, an adhesive bonding technique may be used. The optic may be a curved, monochromating optic.

A Lobster Eye X-ray Imaging System based on a unique Lobster Eye (LE) structure, X-ray generator, scintillator-based detector and cooled CCD (or Intensified CCD) for real-time, safe, staring Compton backscatter X-ray detection of objects hidden under ground, in containers, behind walls, bulkheads etc. In contrast to existing scanning pencil beam systems, Lobster Eye X-Ray Imaging System's true focusing X-ray optics simultaneously acquire ballistic Compton backscattering photons (CBPs) from an entire scene irradiated by a wide-open cone beam from one or more X-ray generators. The Lobster Eye X-ray Imaging System collects (focuses) thousands of times more backscattered hard X-rays in the range from 40 to 120 keV (or wavelength λ=0.31 to 0.1 Å) than current backscatter imaging sensors (BISs), giving high sensitivity and signal-to-noise ratio (SNR) and penetration through ground, metal walls etc. The collection efficiency of Lobster Eye X-ray Imaging System is optimized to reduce emitted X-ray power and miniaturize the device. This device is especially advantageous for and satisfies requirements of X-ray-based inspection systems, namely, penetration of the X-rays through ground, metal and other material concealments; safety; and man-portability. The advanced technology disclosed herein is also applicable to medical diagnostics and military applications such as mine detection, security screening and a like.

An x-ray optical system includes an x-ray source which emits x-rays, a first optical element which conditions the x-rays to form two beams and at least a second optical element which further conditions at least one of the two beams from the first optical element.

An x-ray analysis apparatus for illuminating a sample spot with an x-ray beam. An x-ray tube is provided having a source spot from which a diverging x-ray beam is produced having a characteristic first energy, and bremsstrahlung energy; a first x-ray optic receives the diverging x-ray beam and directs the beam toward the sample spot, while monochromating the beam; and a second x-ray optic receives the diverging x-ray beam and directs the beam toward the sample spot, while monochromating the beam to a second energy. The first x-ray optic may monochromate characteristic energy from the source spot, and the second x-ray optic may monochromate bremsstrahlung energy from the source spot. The x-ray optics may be curved diffracting optics, for receiving the diverging x-ray beam from the x-ray tube and focusing the beam at the sample spot. Detection is also provided to detect and measure various toxins in, e.g., manufactured products including toys and electronics.

An x-ray tube includes a target on which electrons impinge to form a diverging x-ray beam. The target has a surface formed from first and second target materials, each tailored to emit a respective x-ray energy profile. A first x-ray optic may be provided for directing the beam toward the sample spot, the first x-ray optic monochromating the diverging x-ray beam to a first energy from the energy emitted by the first target material; and a second x-ray optic may be provided, for directing the beam toward the sample spot, the second x-ray optic monochromating the diverging x-ray beam to a second energy from the energy emitted by the second target material. Fluorescence from the sample spot induced by the first and second monochromated energies is used to measure the concentration of at least one element in the sample, or separately measure elements in a coating and underlying substrate.

An x-ray metrology system includes one or more transmissive x-ray optical elements, such as zone plates or compound refractive x-ray lenses, to shape the x-ray beams used in the measurement operations. Each transmissive x-ray optical element can focus or collimate a source x-ray beam onto a test sample. Another transmissive x-ray optical element can be used to focus reflected or scattered x-rays onto a detector to enhance the resolving capabilities of the system. The compact geometry of transmissive x-ray optical element allows for more flexible placement and positioning than would be feasible with conventional curved crystal reflectors. For example, multiple x-ray beams can be focused onto a test sample using a transmissive x-ray optical element array. Robust zone plates can be efficiently produced using a damascene process.

An apparatus directing x-rays along a predetermined axis includes an x-ray optic having one or more nested x-ray reflector rings positioned relative to a source generating broad spectrum x-rays so that generated x-rays moving away from the predetermined axis are collected by the reflector incident at or close to a Bragg angle to thereby reflect the collected x-rays into a conically parallel beam. A first diffractor is positioned relative to the x-ray optic to receive incident thereon the conically parallel beam, the first diffractor selected from a truncated cone and a cylinder and diffracting the conically parallel beam toward the predetermined axis. A second diffractor is positioned relative to the first diffractor and having a geometry effective to receive incident thereon and redirect the conically parallel beam along the predetermined axis as a collimated beam of substantially parallel x-rays.

We present a micro-x-ray fluorescence (XRF) system having a high-brightness x-ray illumination system with high x-ray flux and high flux density. The higher brightness is achieved in part by using x-ray target designs that comprise a number of microstructures of x-ray generating materials fabricated in close thermal contact with a substrate having high thermal conductivity. This allows for bombardment of the targets with higher electron density or higher energy electrons, which leads to greater x-ray flux. The high brightness / high flux x-ray source may then be coupled to an x-ray optical system, which can collect and focus the high flux x-rays to spots that can be as small as one micron, leading to high flux density at the fluorescent sample. Such systems may be useful for a variety of applications, including mineralogy, trace element detection, structure and composition analysis, metrology, as well as forensic science and diagnostic systems.

An x-ray spectrometer system comprising an x-ray imaging system with at least one achromatic imaging x-ray optic and an x-ray detection system. The optical train of the imaging system is arranged so that its object focal plane partially overlaps an x-ray emitting volume of an object. An image of a portion of the object is formed with a predetermined image magnification at the x-ray detection system. The x-ray detection system has both high spatial and spectral resolution, and converts the detected x-rays to electronic signals. In some embodiments, the detector system may have a small aperture placed in the image plane, and use a silicon drift detector to collect x-rays passing through the aperture. In other embodiments, the detector system has an energy resolving pixel array x-ray detector. In other embodiments, wavelength dispersive elements may be used in either the optical train or the detector system.

A diffracting x-ray optic for accepting and redirecting x-rays. The optic includes at least two layers, the layers having a similar or differing material composition and similar or differing crystalline orientation. Each of the layers exhibits a diffractive effect, and their collective effect provides a diffractive effect on the received x-rays. In one embodiment, the layers are silicon, and are bonded together using a silicon-on-insulator bonding technique. In another embodiment, an adhesive bonding technique may be used. The optic may be a curved, monochromating optic.

An X-ray thin film inspection apparatus including a sample table on which an inspection target such as a product wafer or the like is mounted, a positioning mechanism for moving the sample table, a goniometer having first and second swing arms, at least one X-ray irradiation unit that are mounted on the first swing arm and containing an X-ray tube and an X-ray optical element in a shield tube, an X-ray detector mounted on a second swing arm, and an optical camera for subjecting the inspection target disposed on the sample table to pattern recognition.

An x-ray analysis apparatus for illuminating a sample spot with an x-ray beam. An x-ray tube is provided having a source spot from which a diverging x-ray beam is produced, the source spot requiring alignment along a transmission axis passing through the sample spot. A first housing section is provided, to which the x-ray tube is attached, including mounting features for adjustably mounting the x-ray tube therein such that the source spot coincides with the transmission axis. A second housing section includes a second axis coinciding with the transmission axis; and at least one x-ray optic attached to the second housing section for receiving the diverging x-ray beam and directing the beam toward the sample spot. Complimentary mating surfaces may be provided to align the first and second sections, and the optics, to the transmission axis. A third housing section may also be provided, including an aperture through which the x-ray beam passes, and to which a detector may be attached.

Systems for x-ray illumination that have an x-ray brightness several orders of magnitude greater than existing x-ray technologies. These may therefore useful for applications such as trace element detection or for micro-focus fluorescence analysis. The higher brightness is achieved in part by using designs for x-ray targets that comprise a number of microstructures of one or more selected x-ray generating materials fabricated in close thermal contact with a substrate having high thermal conductivity. This allows for bombardment of the targets with higher electron density or higher energy electrons, which leads to greater x-ray flux. The high brightness / high flux x-ray source may have a take-off angle from 0 to 105 mrad. and be coupled to an x-ray optical system that collects and focuses the high flux x-rays to spots that can be as small as one micron, leading to high flux density.

A method for producing X-ray optics includes providing a wafer of crystalline material having front and rear surfaces and a lattice spacing suitable for reflecting incident X-rays of a given wavelength. A thin film is deposited on the front surface of the wafer so as to generate compressive forces in the thin film sufficient to impart a concave curvature to the rear surface of the wafer with at least one radius of curvature selected for focusing the incident X-rays.

An x-ray optical system includes an x-ray source which emits x-rays, a first optical element which conditions the x-rays to form two beams and at least a second optical element which further conditions at least one of the two beams from the first optical element.

An X-ray optical alignment system for X-ray imaging devices includes a visible-light point source and a multi-axis positioner therefor, fixedly mounted with respect to the X-ray focal spot. A mirror or beamsplitter is fixedly mounted with respect to the X-ray focal spot and disposed in the beam path of the X-ray source. The beamsplitter reflects light emitted from the light source and transmits X-rays emitted from the X-ray source. A first X-ray attenuating grid is fixedly but removably mountable with respect to the X-ray source, having a first X-ray attenuation pattern; and a second X-ray attenuating grid is adjustably mountable with respect to the first grid having a second X-ray attenuating pattern corresponding to the first X-ray attenuating pattern. When the grids are aligned, their attenuating patterns are also aligned and allow X-rays from the X-ray source and light reflected from the beamsplitter to pass therethrough.

An X-ray analysis instrument, in particular, an X-ray diffractometer (21), has an X-ray source (22; SC) that emits an X-ray beam (23), an X-ray optics (24), in particular a multi-layer X-ray mirror, and a collimator mechanism (BM), wherein the collimator mechanism (BM) forms an aperture window (2, 2′) with an aperture opening (3, 3′) through which at least part (26) of the X-ray beam (23) passes. The collimator mechanism (BM) comprises means for gradual movement of the aperture window (2, 2′) in at least one direction (A / B, x,y) transversely to the X-ray beam (23), the aperture opening (3, 3′) is at least as large as the cross-section (32) of the X-ray beam (23) at the location of the aperture window (2, 2′), and the path of movement (VWx, VWy) of the aperture window (2, 2′), which is accessible by the collimator mechanism (BM), in the at least one direction (A / B, x, y) is at least twice as large as the extension (RSx, RSy) of the X-ray beam (23) at the location of the aperture window (2, 2′) in this direction (A / B, x, y). The X-ray analysis instrument offers a wider scope of beam conditioning possibilities.

The invention provides a lobster eye X-ray optical element focusing performance test apparatus based on a CCD detector. The apparatus comprises an X-ray optical tube, a laser, a diaphragm, a six-dimensional adjustment apparatus, a CCD detector, a laser range finger, an analog-to-digital conversion card, a digital-to-analog conversion card, a horizontal adjustment apparatus and a computer signal processing system. During an operation test, first of all, an optical path calibration is performed, after the calibration, the laser is moved out, and the X-ray optical tube is moved to an optical path; and a lobster eye X-ray optical element is adjusted to carry out MPO full-caliber two-dimensional scanning, a CCD X-ray detector records an imaging result, and through splicing and processing a recorded image, multiple focusing performance indexes including a focal length, a focal spot, light intensity distribution, space angle resolution and the like are obtained. The test apparatus provided by the invention is ingenious in structure, good in real-time performance, low in test cost and convenient to operate.

An x-ray tube includes a target on which electrons impinge to form a diverging x-ray beam. The target has a surface formed from first and second target materials, each tailored to emit a respective x-ray energy profile. A first x-ray optic may be provided for directing the beam toward the sample spot, the first x-ray optic monochromating the diverging x-ray beam to a first energy from the energy emitted by the first target material; and a second x-ray optic may be provided, for directing the beam toward the sample spot, the second x-ray optic monochromating the diverging x-ray beam to a second energy from the energy emitted by the second target material. Fluorescence from the sample spot induced by the first and second monochromated energies is used to measure the concentration of at least one element in the sample, or separately measure elements in a coating and underlying substrate.

An x-ray spectrometer system comprising an x-ray imaging system with at least one achromatic imaging x-ray optic and an x-ray detection system. The optical train of the imaging system is arranged so that its object focal plane partially overlaps an x-ray emitting volume of an object. An image of a portion of the object is formed with a predetermined image magnification at the x-ray detection system. The x-ray detection system has both high spatial and spectral resolution, and converts the detected x-rays to electronic signals. In some embodiments, the detector system may have a small aperture placed in the image plane, and use a silicon drift detector to collect x-rays passing through the aperture. In other embodiments, the detector system has an energy resolving pixel array x-ray detector. In other embodiments, wavelength dispersive elements may be used in either the optical train or the detector system.

An x-ray optical device includes an optic and an adjustable aperture that selectively occludes a portion of an x-ray beam. The adjustable aperture may be positioned between the optic and a sample and may be integrated with the optic or located in close proximity to the optic. The adjustable aperture enables a user to easily and effectively adjust the convergence of the x-rays. In doing so, the flux and resolution of the x-ray optical device can be optimized by using an optic having the maximum convergence allowed for all potential measurements, and then selecting a convergence for a particular measurement by adjusting the aperture.

An X-ray analysis device (1) having an X-ray source (2) for illuminating a sample (6) with X-radiation (4), a sample support for receiving the sample (6) and a detector (12,14) for detecting the diffracted or scattered X-radiation or fluorescent X-radiation (4') emitted by the sample, wherein an X-ray optical construction element of semi-conductor material having a plurality of channels which are essentially transparent to X-radiation (4,4') is provided in the path of rays between the X-ray source (2) and the detector (12,14), is characterized in that the X-ray optical construction element comprises a semi-conductor wafer (20;30a;30b;40;50) into which micropores (21;31;41) are etched which extend essentially in parallel in the direction of the rays and have diameters of 0.1 to 100 .mu.m, preferably 0.5 and 20 .mu.m. Such X-ray optical construction elements are, on the one hand, not poisonous, and on the other hand particularly transparent for X-rays, wherein a relatively high mechanical rigidity can be achieved also with large openings and very short construction lengths and thus also a particularly long service life and high pressure stability and density.

An improved microcalorimeter-type energy dispersive x-ray spectrometer provides sufficient energy resolution and throughput for practical high spatial resolution x-ray mapping of a sample at low electron beam energies. When used with a dual beam system that provides the capability to etch a layer from the sample, the system can be used for three-dimensional x-ray mapping. A preferred system uses an x-ray optic having a wide-angle opening to increase the fraction of x-rays leaving the sample that impinge on the detector and multiple detectors to avoid pulse pile up.