The invention discloses a permanent-
magnet magnetic control
sputtering target with a round plane, which can sputter magnetic materials and is composed of an outer shield cover, a magnetic steel seat, a pole shoe, an insulating seat, a permanent seat, a target gland bush, inner magnetic steel, outer magnetic steel, a water inlet
nozzle, a water outlet
nozzle, an attachment bolt, a hermetical rubber, and the like, wherein a thread manual adjustable structure is adopted between the outer shield cover and the permanent seat, the materials of the magnetic steel seat are
oxygen-free
copper, the inner magnetic steel is arranged at the center of the magnetic steel seat, the periphery of the magnetic steel seat is drilled to form a plurality of pinholes for installing the outer magnetic steel, and target materials are directly laid on the magnetic steel seat and fixed by the target gland bush. The pole shoe is made of permeability materials, when the magnetic control target works, a
direct current or radio-frequency power supply is applied to the pole shoe, the water inlet
nozzle and the water outlet nozzle are welded by
argon arc welding under the pole shoe, cooling water enters from a low place and outflows from a high place, and hermetical seal is realized by the hermetical
rubber ring. The materials of the insulating seat are temperature-resistant insulating materials which can be used in vacuum, and are installed between the permanent seat (
anode) and the pole shoe (
cathode), and an insulating cap has the insulating action between an electriferous screw (
cathode) and the permanent seat (
anode). The invention has simple structure and low cost.